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[文献書誌] G.Lim,S.Baek and M.Esashi: "A New Bulk-Micromachining Using Deep RIE and Wet Etching for an Accelerometer" 電気学会論文誌E. 118-E・9. 420-424 (1998)
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[文献書誌] J.-J.Choi、南和幸、江刺正樹: "Deep ICP RIE と XeF_2 ガスエッチングによる回転振動型角速度センサ" 電気学会論文誌E. 118-E・10. 437-443 (1998)
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[文献書誌] J.-J.Choi、南和幸、江刺正樹: "電磁駆動誘導起電力検出型シリコン角速度センサ" 電気学会論文誌E. 118-E・12. 641-646 (1998)
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[文献書誌] Y.Shiba,T.Ono,K.Minami and M.Esashi: "Capacitive AFM Probe for High Speed Imaging^1" 電気学会論文誌E. 118-E・12. 647-651 (1998)
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[文献書誌] T.Ono and M.Esashi: "Subwavelength Pattern Transfer by Near-Field Photolithography" Jpn.J.Appl.Phys.37. 1644-1648 (1998)
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[文献書誌] Y.Ueda,H.Henmi,K.Minami and M.Esashi: "An Electrostatic Servo Capacitive Pressure Sensor" 電気学会論文誌E. 119-E・2. 94-98 (1999)
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[文献書誌] M.Esashi,S.Sugiyama,K.Ikeda,Y.Wang and H.Miyashita: "Vacuum-Sealed Silicon Micromachined Pressure Sensors" Proceedings of the IEEE. 86・8. 1627-1639 (1998)
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[文献書誌] 小野崇人、江刺正喜: "ナノメートル加工の応用(2)-ナノメカニックスへの応用-" 応用物理. 67・12. 1395-1399 (1998)
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[文献書誌] A.P Hui,R.Toda and M.Esashi: "Extremely High Aspect Ratio Metal Structures for Suspentsion of a Optical Shatter" Proc.of SPIE Conference on Microelectronic Structures and MEMS for Optical Processing IV. 3513. 233-238 (1998)
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[文献書誌] K.Minamim,T.Matsunaga and M.Esashi: "Simple Modeling and Simulation of the Squeeze Film Effect and Transint Response of the MEMS Device" Technical Digest of the MEMS'99. 12. 338-343 (1999)
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[文献書誌] N.M.Phan,T.Ono and M.Esashi: "A Novel Fabrication Method of the Tiny Aperture on Silicon Cantilever for Near Field Scanning Optical Microscopy" Technical Digest of the MEMS'99. 12. 360-365 (1999)
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[文献書誌] T.Matsunaga,K.Minami and M.Esashi: "Acceleration Switch with Extended Holding Time Using the Squeeze Film Effect" Technical Digest of the Transducere'99. 10(印刷中). (1999)
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[文献書誌] D.-W.Lee,T.Ono and M.Esashi: "Resonator Integrated Cantilever for Scanning Probe Microscope" Technical Digest of the Transducere'99. 10(印刷中). (1999)
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[文献書誌] K.Fukatsu,T.Murakoshi and M.Esashi: "Electrostatically Levitated Micro Motor for Inertia Measurement System" Technical Digest of the Transducere'99. 10(印刷中). (1999)