2000 年度実績報告書

平面状表面波プラズマを用いた大面積ダイヤモンド薄膜生成に関する研究

研究課題

研究課題/領域番号	11480106
研究機関	名古屋大学
研究代表者	永津雅章名古屋大学, 工学研究科, 助教授 (20155948)
研究分担者	菅井秀郎名古屋大学, 工学研究科, 教授 (40005517)
キーワード	プラズマCVD / 表面波プラズマ / マイクロ波プラズマ / ダイヤモンド膜 / 電界電子放出特性 / ダイヤモンドライクカーボン膜
研究概要	本研究では、プラズマCVD法による大面積薄膜生成法の確立を目的とし、大口径表面波プラズマ装置を用いたダイヤモンドライクカーボン(DLC)薄膜の成膜特性およびカーボン系薄膜の膜質診断に関する研究を行った。以下に本研究成果の概要を列記する。 (1)実験装置の整備:直径40cmのステンレス製真空容器の表面波プラズマ装置を用い、ガス吸排気系の整備および基板ステージ、基板温度制御装置などのハードウエアの整備を行った。 (2)プラズマ成膜用プラズマ特性の診断:2.45GHzマイクロ波源を用いてアルゴンおよびヘリウムの表面波プラズマ生成実験を行い、プラズマパラメータの空間分布特性を調べた。とくにダウンストリーミング領域の基板ステージ近傍では直径10cm以上に亘り±5%以内の空間均一性が得られた。 (3)ダイヤモンドライクカーボン膜の成膜特性:ヘリウムガスにメタンガスを混入した表面波プラズマ放電を用いてシリコン基板上に室温下で成膜を行い、直径10cm以上に亘り均一なカーボン薄膜が得られることを示した。また、成膜速度はHe/CH_4流量比に大きく依存し、He/CH_4比が280/6sccmのとき約16nm/minが得られ、メタン比の増加とともに成膜速度の低下が見られた。 (4)電界電子放出特性およびその他の膜特性:水素化DLC薄膜の電界電子放出特性の測定の結果、電界4V/μmのとき電流密度1μA/cm^2の電子放出が得られ、これは結晶はダイヤモンド膜に匹敵する特性であることを示した。また、プラズマ表面処理の効果、窒素ドープの効果、バイアスの効果およびガス比による電界電子放出特性および膜質の違い等を明らかにした。 (5)研究成果の取りまとめ:本研究の研究成果は発表予定も含め学術論文に9件、国内開催の学会、研究会に34件(シンポジウム講演2件)、国際会議に11件発表した。

研究成果

(20件)

すべてその他

すべて文献書誌 (20件)

[文献書誌] M.Nagatsu: "Characteristics of Ultrahigh-Frequency Surface Wave Plasmas Excited at 915 MHz"Jpn.J.Appl.Phys.. Vol.38 No.6AB. L679-L682 (1999)
[文献書誌] I.Ghanashev: "Test-Wave Measurements of Microwave Absorption Efficiency in a Planar Surface-Wave Plasma Device"Jpn.J.Appl.Phys.. Vol.38 No.7B. 4313-4320 (1999)
[文献書誌] M.Nagatsu: "Large-Area Planar Surface Wave Plasmas Excited by 915 MHz UHF Waves"Proc.of 24th Int.Conf.on Phenomena in Ionized Gases. Vol.1. 71-72 (1999)
[文献書誌] M.Nagatsu: "Plasma Synthesis of Carbon-Metal Clusters by Means of Arc Plasma Discharges"Proc.of 24th Int.Conf.on Phenomena in Ionized Gases. Vol.4. 131-132 (1999)
[文献書誌] M.Nagatsu: "Effect of Slot Antenna Structures on Production of Large-Area Planar Surface-Wave Plasmas Excited at 2.45 GHz"J.of Phys.D : Appl.Phys.. Vol.33 No.10. 1143-1149 (2000)
[文献書誌] M.Nagatsu: "Production of Vanadium-Carbon Clusters Using DC Arc Discharges with Pulsed Helium/Methane Gas Injection"Jpn.J.Appl.Phys.. Vol.39. 6037-6042 (2000)
[文献書誌] M.Nagatsu: "Field Emission Characteristics of Hydrogenated Amorphous Carbon Films Prepared by Surface-Wave Plasma"Jpn.J.Appl.Phys.. Vol.39. L929-L932 (2000)
[文献書誌] M.Nagatsu: "Mode Structures of Surface Wave Plasma Excited at 915 MHz"Abstracts of IV International Workshop on Microwave Discharges : Fundamentals and Applications. 51-51 (2000)
[文献書誌] M.Nagatsu: "Field Emission Characteristics of Amorphous Carbon Films Deposited by Surface Wave Plasma"Abstracts of IV International Workshop on Microwave Discharges : Fundamentals and Applications. 78-78 (2000)
[文献書誌] M.Nagatsu: "Antenna Effects on Excitation of Surface-Wave Modes in 915 MHz UHF Plasmas"Bulletin of 53rd Annual Gaseous Electronics Conf.. 16-16 (2000)
[文献書誌] T.Sano: "Surface-Wave Plasma Deposition of a-C : H Films for Field Emission"Bulletin of 53rd Annual Gaseous Electronics Conf.. 50-50 (2000)
[文献書誌] M.Nagatsu: "Surface Wave Modes in a Large Square High Density Plasma Excited at 915 MHz"J.Vac.Sci.Technol.A. (発表予定). (2001)
[文献書誌] M.Nagatsu: "Field Emission Characteristics of a-C : H Films Deposited by Surface Wave Plasma at Low Pressure"25th International Conf.on Phenomena in Ionized Gases. (発表予定). (2001)
[文献書誌] M.Makino: "Diagnostics of Microwave Plasma Ball Formed in a High Pressure Regime"25th International Conf.on Phenomena in Ionized Gases. (発表予定). (2001)
[文献書誌] T.Niwa: "Comparison of Electron Energy Distribution Functions in Surface-Wave Plasmas Excited at 915 MHz and 2.45 GHz"25th International Conf.on Phenomena in Ionized Gases. (発表予定). (2001)
[文献書誌] M.Nagatsu: "Characteristics of Hydrogenated Amorphous Carbon Films Deposited by large-Area Planar Surface Wave Plasma"12th European Conf.on Diamond,Diamond-Like Materials Carbon Nanotubes. Nitrides & Silicon Carbide. (発表予定). (2001)
[文献書誌] M.Nagatsu: "Diagnostics of Plasma Ball Formed in High Pressure Microwave Plasma For Diamond Film Synthesis"12th European Conf.on Diamond, Diamond-Like Materials Carbon Nanotubes. Nitrides & Silicon Carbide. (発表予定). (2001)
[文献書誌] T.Sano: "Effect of Film Thickness on Field Emission Characteristics of Surface-Wave Deposted Hydrogenated Amorphous Carbon Films"Diamond Related Materials. (発表予定). (2001)
[文献書誌] M.Nagatsu: "Electron Energy Distribution Functions in Surface-Wave Plasmas Excited at 915 MHz"Jpn.J.Applied Phys.. (発表予定). (2001)
[文献書誌] M.Nagatsu: "Film Characteristics of Surface-Wave Deposted Hydrogenated Amorphous Carbon Films"Thin Solid Films. (発表予定). (2001)

2000 年度 実績報告書

平面状表面波プラズマを用いた大面積ダイヤモンド薄膜生成に関する研究

研究代表者

永津 雅章 名古屋大学, 工学研究科, 助教授 (20155948)

研究成果

[文献書誌] M.Nagatsu: "Characteristics of Ultrahigh-Frequency Surface Wave Plasmas Excited at 915 MHz"Jpn.J.Appl.Phys.. Vol.38 No.6AB. L679-L682 (1999)

[文献書誌] I.Ghanashev: "Test-Wave Measurements of Microwave Absorption Efficiency in a Planar Surface-Wave Plasma Device"Jpn.J.Appl.Phys.. Vol.38 No.7B. 4313-4320 (1999)

[文献書誌] M.Nagatsu: "Large-Area Planar Surface Wave Plasmas Excited by 915 MHz UHF Waves"Proc.of 24th Int.Conf.on Phenomena in Ionized Gases. Vol.1. 71-72 (1999)

[文献書誌] M.Nagatsu: "Plasma Synthesis of Carbon-Metal Clusters by Means of Arc Plasma Discharges"Proc.of 24th Int.Conf.on Phenomena in Ionized Gases. Vol.4. 131-132 (1999)

[文献書誌] M.Nagatsu: "Effect of Slot Antenna Structures on Production of Large-Area Planar Surface-Wave Plasmas Excited at 2.45 GHz"J.of Phys.D : Appl.Phys.. Vol.33 No.10. 1143-1149 (2000)

[文献書誌] M.Nagatsu: "Production of Vanadium-Carbon Clusters Using DC Arc Discharges with Pulsed Helium/Methane Gas Injection"Jpn.J.Appl.Phys.. Vol.39. 6037-6042 (2000)

[文献書誌] M.Nagatsu: "Field Emission Characteristics of Hydrogenated Amorphous Carbon Films Prepared by Surface-Wave Plasma"Jpn.J.Appl.Phys.. Vol.39. L929-L932 (2000)

[文献書誌] M.Nagatsu: "Mode Structures of Surface Wave Plasma Excited at 915 MHz"Abstracts of IV International Workshop on Microwave Discharges : Fundamentals and Applications. 51-51 (2000)

[文献書誌] M.Nagatsu: "Field Emission Characteristics of Amorphous Carbon Films Deposited by Surface Wave Plasma"Abstracts of IV International Workshop on Microwave Discharges : Fundamentals and Applications. 78-78 (2000)

[文献書誌] M.Nagatsu: "Antenna Effects on Excitation of Surface-Wave Modes in 915 MHz UHF Plasmas"Bulletin of 53rd Annual Gaseous Electronics Conf.. 16-16 (2000)

[文献書誌] T.Sano: "Surface-Wave Plasma Deposition of a-C : H Films for Field Emission"Bulletin of 53rd Annual Gaseous Electronics Conf.. 50-50 (2000)

[文献書誌] M.Nagatsu: "Surface Wave Modes in a Large Square High Density Plasma Excited at 915 MHz"J.Vac.Sci.Technol.A. (発表予定). (2001)

[文献書誌] M.Nagatsu: "Field Emission Characteristics of a-C : H Films Deposited by Surface Wave Plasma at Low Pressure"25th International Conf.on Phenomena in Ionized Gases. (発表予定). (2001)

[文献書誌] M.Makino: "Diagnostics of Microwave Plasma Ball Formed in a High Pressure Regime"25th International Conf.on Phenomena in Ionized Gases. (発表予定). (2001)

[文献書誌] T.Niwa: "Comparison of Electron Energy Distribution Functions in Surface-Wave Plasmas Excited at 915 MHz and 2.45 GHz"25th International Conf.on Phenomena in Ionized Gases. (発表予定). (2001)

[文献書誌] M.Nagatsu: "Characteristics of Hydrogenated Amorphous Carbon Films Deposited by large-Area Planar Surface Wave Plasma"12th European Conf.on Diamond,Diamond-Like Materials Carbon Nanotubes. Nitrides & Silicon Carbide. (発表予定). (2001)

[文献書誌] M.Nagatsu: "Diagnostics of Plasma Ball Formed in High Pressure Microwave Plasma For Diamond Film Synthesis"12th European Conf.on Diamond, Diamond-Like Materials Carbon Nanotubes. Nitrides & Silicon Carbide. (発表予定). (2001)

[文献書誌] T.Sano: "Effect of Film Thickness on Field Emission Characteristics of Surface-Wave Deposted Hydrogenated Amorphous Carbon Films"Diamond Related Materials. (発表予定). (2001)

[文献書誌] M.Nagatsu: "Electron Energy Distribution Functions in Surface-Wave Plasmas Excited at 915 MHz"Jpn.J.Applied Phys.. (発表予定). (2001)

[文献書誌] M.Nagatsu: "Film Characteristics of Surface-Wave Deposted Hydrogenated Amorphous Carbon Films"Thin Solid Films. (発表予定). (2001)

2000 年度実績報告書

永津雅章名古屋大学, 工学研究科, 助教授 (20155948)