2001 年度実績報告書

宇宙などの微小重力環境に於けるInGaSb化合物半導体の溶解と結晶化に関する研究

研究課題

研究課題/領域番号	11694144
研究機関	静岡大学
研究代表者	熊川征司静岡大学, 電子工学研究所, 教授 (30022130)
研究分担者	早川泰弘静岡大学, 電子工学研究所, 助教授 (00115453) 山口十六夫静岡大学, 電子工学研究所, 教授 (40010938) 平田彰早稲田大学, 理工学部, 教授 (00063610) 小澤哲夫静岡理工科大学, 理工学部, 助教授 (90247578) 岡野泰則静岡大学, 工学部, 助教授 (90204007)
キーワード	微小重力環境 / 化合物半導体 / ガリウムアンチモン / インディウムアンチモン / インディウムガリウムアンチモン / 一方向凝固法 / 落下塔実験 / 数値解析
研究概要	地上では得られない標準・基準物質としての超高品質III-V族半導体単結晶の成長実験を宇宙ステーションで遂行するための地上予備実験を遂行した。また、溶液対流の数値解析を行い、3年間の研究を総括した。 1.均一組成比のInGaSb結晶成長条件を調べるために、GaSb/InSb/GaSbサンドイッチ構造試料を用いて一方向性凝固法による地上実験を行った。重力に対して、平行配置、垂直配置および傾斜配置の電気炉内で実験を行い、重力方向が溶解と成長に及ぼす効果を調べた。その結果(1)垂直配置では固液界面形状は重力方向に対し、垂直になるが、傾斜型配置と水平配置の場合には、固液界面形状が重力方向に末広がりの形状になること、(2)In組成比の均一な領域は、垂直配置と傾斜配置で約6mm得られることがわかった。 2.In組成比の均一領域を長くするための最適条件は、種結晶温度648℃、昇温速度20℃/min、保持時間20時間、冷却速度0.5℃/min、電気炉の温度勾配を10℃/cmであった。 3.落下塔を利用して、自由空間のある試料で、InGaSb結晶が成長する様子を高速ビデオでその場観察した結果、半球の結晶が成長することや、温度が低下するにつれて、In組成比の高い突起物が形成されることがわかった。 4.マランゴニ対流の有無や重力レベルの関数として溶液内の対流、温度分布、濃度分布を数値解析した。本実験系では、重力レベルが10^<-5>G以下になれば、拡散律速で物質が輸送されることが示された。また、マランゴニ対流がある場合固液界面形状が凹状になること、重力変動の周波数が低い程溶液対流、濃度分布への影響が大きいことがわかった。 5.宇宙実験用のIn_xGa_<1-x>Sb種結晶を作製するために、垂直ブリッジマン法と回転引上げ法により、In_xGa_<1-x>Sbバルク単結晶成長させた。In組成比が0.05の単結晶が得られた。本研究では、一方向性凝固法により均一組成比のIn_xGa_<1-x>Sb結晶成長条件を明らかにした。単結晶成長条件を確立することが今後の課題である。

研究成果

(33件)

すべてその他

すべて文献書誌 (33件)

[文献書誌] T.KIMURA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Dependence of Dissolution and Growth Processes of Compound Semiconductors on Crystal Surface Orientation"The Japan Society of Microgravity Application. 15. 472-475 (1999)
[文献書誌] Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "Numerical Simulation of Ocillatory Flow in Melt during InSb Single Crystal Growth by RF Heating Czochralski Method"Int.J.Numerical Modeling. 11. 289-298 (1999)
[文献書誌] K.BALAKRISHNAN, Y.HAYAKAWA, M.KUMAGAWA et al.: "Preparatory Terrestrial Growth of InGaSb for the Crystallization in Space"Proc. Joint International Conference on Advanced Science and Technology. 213-216 (1999)
[文献書誌] N.SHIBATA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Preliminary Experiments of InGaSb Growth in the Space Station"Proc. 50^<th> International Astronautical Congress. 1-7 (1999)
[文献書誌] Y.HAYAKAWA, M.KUMAGAWA et al.: "Experimental and Numerical Investigations on Dissolution and Recrystallization Processes of GaSb/InSb/GaSb under Microgravity and Terrestial Conditions"J.Crystal Growth. 213. 40-50 (2000)
[文献書誌] Y.HAYAKAWA, M.KUMAGAWA et al.: "Effect of Marangoni Convection on the Dissolution and Recrystallization Processes of InGaSb Semiconductors"Proc. 22^<nd> International Symposium on Space and Technology and Science. II. 1426-1433 (2000)
[文献書誌] 早川泰弘, 熊川征司他: "微小重力下と地上におけるGaSb/InSb/GaSb試料の溶解実験と数値解析"静岡大学電子工学研究所研究報告. 34. 1-7 (2000)
[文献書誌] A.HIRATA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Effect of Gravity on the Melting of In-Sb Melt"Int.J.Applied Electromagnetics in Materials. 10[6]. 527-536 (2000)
[文献書誌] T.OZAWA, Y.HAYAKAWA, M.KUMAGAWA et al.: "3-Dimensional Analysis of Flow Patterns and Temperature Profiles for the Growth of InGaSb by Rotational Bridgman Method"Computer Modeling in Engineering & Sciences. 1[1]. 1-5 (2000)
[文献書誌] S.UMEMURA, Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "Marangoni Convection Effect on the Melting of GaSb/InSb/GaSb Sandwich Structured Sample"Proc. Joint International Conference on Advanced Science and Technology. 28-31 (2000)
[文献書誌] T.NAKAMURA, Y.HAYAKAWA, M.KUMAGAWA et al.: "A Comparative Analysis on the Crystallization of InGaSb under Reduced Gravity using Parabolic Flight of an Airplane and Normal Gravity Conditions"Proc. Joint International Conference on Advanced Science and Technology. 367-370 (2000)
[文献書誌] N.MURAKANI, Y.HAYAKAWA, M.KUMAGAWA et al.: "Drop Tower Experiments on the Melting of GaSb and InSb"Proc. Joint International Conference on Advanced Science and Technology. 371-374 (2000)
[文献書誌] H.KOMATSU, Y.HAYAKAWA, M.KUMAGAWA et al.: "Solidification of InGaSb under Reduced Gravity using a Drop Tower"Proc. Joint International Conference on Advanced Science and Technology. 375-378 (2000)
[文献書誌] S.ABE, Y.HAYAKAWA, M.KUMAGAWA et al.: "Crystallization of InGaSb in Preparation for the Futher Space Experiment under Microgravity"Proc. Joint International Conference on Advanced Science and Technology. 379-382 (2000)
[文献書誌] H.ADACHI, Y.HAYAKAWA, M.KUMAGAWA et al.: "Effect of Heating Rate on the Dissolution Process of GaSb into InSb Melt"Proc. Joint International Conference on Advanced Science and Technology. 383-386 (2000)
[文献書誌] T.OZAWA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Growth of In_xGa_<1-x>As Bulk Mixed Crystals with a Uniform Composition by the Rotational Bridgman Method"J.Crystal Growth. 229. 124-129 (2001)
[文献書誌] Y.HAYAKAWA, Y.OKANO, M.KUMAGAWA et al.: "Study on the Crystallization of InGaSb under Different Gravity Conditions"Proc.Space Bound 2000. (CD-ROM). (2001)
[文献書誌] Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "Numerical Study on the Effect of Natural and Marangoni Convection on the Melting of a Pseudo Binary Alloy under Normal and Reduced Gravity Fields"Proc.Space Bound 2000. (CD-ROM). (2001)
[文献書誌] Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "A Numerical Study for the Melting of a Pseudo Binary Alloy under Normal and Reduced Gravity"Prof. 6^<th> World Congress of Chemical Engineering. (CD-ROM). (2001)
[文献書誌] N.ARAKI, Y.HAYAKAWA et al.: "Measuring Thermal Diffusivities of Semiconductor Melts"Proc. The Sixth Asian Thermophysical Properties Conference. 55-60 (2001)
[文献書誌] Y.HAYAKAWA, M.KUMAGAWA et al.: "Microgravity Experiments on Melting and Crystallization of InGaSb Performed using a Drop Tower"Proc. 52^<nd> International Autronautical Conference. 1-6 (2001)
[文献書誌] N.MURAKAMI, Y.HAYAKAWA, M.KUMAGAWA et al.: "Numerical Analysis of Gravity Influence on Dissolution of GaSb into InSb Mekt"Proc. Joint International Conference on Advanced Science and Technology. 280-283 (2001)
[文献書誌] 早川泰弘, 岡野泰則, 熊川征司: "航空機利用による微小重力環境下におけるInGaSb半導体の結晶成長"日本マイクログラビテイ応用学会誌. 18. 79-83 (2001)
[文献書誌] Y.HAYAKAWA, Y.OKANO, M.KUMAGAWA et al.: "Effects of Gravity on Crystallization of InGaSb"Proc. 43^<rd> DAE-Solid State Physics Symposium. 26-29 (2002)
[文献書誌] 岡野泰則, 早川泰弘, 熊川征司: "GaSb/InSb/GaSbサンドイッチ構造試料溶融に及ぼす自然対流、マランゴニ対流の影響に関する数値解析"日本マイクログラビテイ応用学会誌. 19. 24-29 (2002)
[文献書誌] Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "Numerical Study of Marangoni Convection Effect on the Melting of GaSb/InSb/GaSb"J.Crystal Growth. 235. 135-139 (2002)
[文献書誌] Y.HAYAKAWA, S.DOST, M.KUMAGAWA et al.: "Drop Experiments on Crystallization of InGaSb Semiconductors"J.Crystal Growth. (In print). (2002)
[文献書誌] T.OZAWA, Y.HAYAKAWA, M/KUMAGAWA et al.: "Numerical Analysis of Effect of Ampoule Rotation for the Growth of InGaSb by Rotational Bridgman Method"J.Crystal Growth. (In print). (2002)
[文献書誌] K.BALAKRISHNAN, Y.HAYAKAWA, M.KUMAGAWA et al.: "Airplane and Drop Experiments on Crystallization of In_xGa_<1-x>Sb Semiconductors under Different Gravity Conditions"Proc. MRS Fall Meeting Symposium. (In print). (2002)
[文献書誌] Y.HAYAKAWA, Y.OKANO, M.KUMAGAWA et al.: "Experimental and Numerical analysis of Crystallization Processes of In_xGa_<1-x>Sb under Different Gravity Conditions"The Journal of Space Technology and Science. (In print). (2002)
[文献書誌] T.ARAKI, Y.HAYAKAWA: "Thermal Diffusivity of High-Temperature Melts (Specimen Enclosed in a in a Quartz Container)"High Temperature-High Pressures. (In press). (2002)
[文献書誌] T.OZAWA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Advances in Computational Engineering Sciences 2000"Tech Science Press (Edited by Satye N.Atluri and Frederick W.Brust). 6 (2000)
[文献書誌] T.OZAWA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Advances in Computational Engineering Sciences 2001"Tech Science Press (Edited by Satye N.Atluri and Frederick W.Brust). 6 (2001)

2001 年度 実績報告書

宇宙などの微小重力環境に於けるInGaSb化合物半導体の溶解と結晶化に関する研究

研究代表者

熊川 征司 静岡大学, 電子工学研究所, 教授 (30022130)

研究成果

[文献書誌] T.KIMURA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Dependence of Dissolution and Growth Processes of Compound Semiconductors on Crystal Surface Orientation"The Japan Society of Microgravity Application. 15. 472-475 (1999)

[文献書誌] Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "Numerical Simulation of Ocillatory Flow in Melt during InSb Single Crystal Growth by RF Heating Czochralski Method"Int.J.Numerical Modeling. 11. 289-298 (1999)

[文献書誌] K.BALAKRISHNAN, Y.HAYAKAWA, M.KUMAGAWA et al.: "Preparatory Terrestrial Growth of InGaSb for the Crystallization in Space"Proc. Joint International Conference on Advanced Science and Technology. 213-216 (1999)

[文献書誌] N.SHIBATA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Preliminary Experiments of InGaSb Growth in the Space Station"Proc. 50^<th> International Astronautical Congress. 1-7 (1999)

[文献書誌] Y.HAYAKAWA, M.KUMAGAWA et al.: "Experimental and Numerical Investigations on Dissolution and Recrystallization Processes of GaSb/InSb/GaSb under Microgravity and Terrestial Conditions"J.Crystal Growth. 213. 40-50 (2000)

[文献書誌] Y.HAYAKAWA, M.KUMAGAWA et al.: "Effect of Marangoni Convection on the Dissolution and Recrystallization Processes of InGaSb Semiconductors"Proc. 22^<nd> International Symposium on Space and Technology and Science. II. 1426-1433 (2000)

[文献書誌] 早川泰弘, 熊川征司 他: "微小重力下と地上におけるGaSb/InSb/GaSb試料の溶解実験と数値解析"静岡大学電子工学研究所研究報告. 34. 1-7 (2000)

[文献書誌] A.HIRATA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Effect of Gravity on the Melting of In-Sb Melt"Int.J.Applied Electromagnetics in Materials. 10[6]. 527-536 (2000)

[文献書誌] T.OZAWA, Y.HAYAKAWA, M.KUMAGAWA et al.: "3-Dimensional Analysis of Flow Patterns and Temperature Profiles for the Growth of InGaSb by Rotational Bridgman Method"Computer Modeling in Engineering & Sciences. 1[1]. 1-5 (2000)

[文献書誌] S.UMEMURA, Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "Marangoni Convection Effect on the Melting of GaSb/InSb/GaSb Sandwich Structured Sample"Proc. Joint International Conference on Advanced Science and Technology. 28-31 (2000)

[文献書誌] T.NAKAMURA, Y.HAYAKAWA, M.KUMAGAWA et al.: "A Comparative Analysis on the Crystallization of InGaSb under Reduced Gravity using Parabolic Flight of an Airplane and Normal Gravity Conditions"Proc. Joint International Conference on Advanced Science and Technology. 367-370 (2000)

[文献書誌] N.MURAKANI, Y.HAYAKAWA, M.KUMAGAWA et al.: "Drop Tower Experiments on the Melting of GaSb and InSb"Proc. Joint International Conference on Advanced Science and Technology. 371-374 (2000)

[文献書誌] H.KOMATSU, Y.HAYAKAWA, M.KUMAGAWA et al.: "Solidification of InGaSb under Reduced Gravity using a Drop Tower"Proc. Joint International Conference on Advanced Science and Technology. 375-378 (2000)

[文献書誌] S.ABE, Y.HAYAKAWA, M.KUMAGAWA et al.: "Crystallization of InGaSb in Preparation for the Futher Space Experiment under Microgravity"Proc. Joint International Conference on Advanced Science and Technology. 379-382 (2000)

[文献書誌] H.ADACHI, Y.HAYAKAWA, M.KUMAGAWA et al.: "Effect of Heating Rate on the Dissolution Process of GaSb into InSb Melt"Proc. Joint International Conference on Advanced Science and Technology. 383-386 (2000)

[文献書誌] T.OZAWA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Growth of In_xGa_<1-x>As Bulk Mixed Crystals with a Uniform Composition by the Rotational Bridgman Method"J.Crystal Growth. 229. 124-129 (2001)

[文献書誌] Y.HAYAKAWA, Y.OKANO, M.KUMAGAWA et al.: "Study on the Crystallization of InGaSb under Different Gravity Conditions"Proc.Space Bound 2000. (CD-ROM). (2001)

[文献書誌] Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "Numerical Study on the Effect of Natural and Marangoni Convection on the Melting of a Pseudo Binary Alloy under Normal and Reduced Gravity Fields"Proc.Space Bound 2000. (CD-ROM). (2001)

[文献書誌] Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "A Numerical Study for the Melting of a Pseudo Binary Alloy under Normal and Reduced Gravity"Prof. 6^<th> World Congress of Chemical Engineering. (CD-ROM). (2001)

[文献書誌] N.ARAKI, Y.HAYAKAWA et al.: "Measuring Thermal Diffusivities of Semiconductor Melts"Proc. The Sixth Asian Thermophysical Properties Conference. 55-60 (2001)

[文献書誌] Y.HAYAKAWA, M.KUMAGAWA et al.: "Microgravity Experiments on Melting and Crystallization of InGaSb Performed using a Drop Tower"Proc. 52^<nd> International Autronautical Conference. 1-6 (2001)

[文献書誌] N.MURAKAMI, Y.HAYAKAWA, M.KUMAGAWA et al.: "Numerical Analysis of Gravity Influence on Dissolution of GaSb into InSb Mekt"Proc. Joint International Conference on Advanced Science and Technology. 280-283 (2001)

[文献書誌] 早川泰弘, 岡野泰則, 熊川征司: "航空機利用による微小重力環境下におけるInGaSb半導体の結晶成長"日本マイクログラビテイ応用学会誌. 18. 79-83 (2001)

[文献書誌] Y.HAYAKAWA, Y.OKANO, M.KUMAGAWA et al.: "Effects of Gravity on Crystallization of InGaSb"Proc. 43^<rd> DAE-Solid State Physics Symposium. 26-29 (2002)

[文献書誌] 岡野泰則, 早川泰弘, 熊川征司: "GaSb/InSb/GaSbサンドイッチ構造試料溶融に及ぼす自然対流、マランゴニ対流の影響に関する数値解析"日本マイクログラビテイ応用学会誌. 19. 24-29 (2002)

[文献書誌] Y.OKANO, Y.HAYAKAWA, M.KUMAGAWA et al.: "Numerical Study of Marangoni Convection Effect on the Melting of GaSb/InSb/GaSb"J.Crystal Growth. 235. 135-139 (2002)

[文献書誌] Y.HAYAKAWA, S.DOST, M.KUMAGAWA et al.: "Drop Experiments on Crystallization of InGaSb Semiconductors"J.Crystal Growth. (In print). (2002)

[文献書誌] T.OZAWA, Y.HAYAKAWA, M/KUMAGAWA et al.: "Numerical Analysis of Effect of Ampoule Rotation for the Growth of InGaSb by Rotational Bridgman Method"J.Crystal Growth. (In print). (2002)

[文献書誌] K.BALAKRISHNAN, Y.HAYAKAWA, M.KUMAGAWA et al.: "Airplane and Drop Experiments on Crystallization of In_xGa_<1-x>Sb Semiconductors under Different Gravity Conditions"Proc. MRS Fall Meeting Symposium. (In print). (2002)

[文献書誌] Y.HAYAKAWA, Y.OKANO, M.KUMAGAWA et al.: "Experimental and Numerical analysis of Crystallization Processes of In_xGa_<1-x>Sb under Different Gravity Conditions"The Journal of Space Technology and Science. (In print). (2002)

[文献書誌] T.ARAKI, Y.HAYAKAWA: "Thermal Diffusivity of High-Temperature Melts (Specimen Enclosed in a in a Quartz Container)"High Temperature-High Pressures. (In press). (2002)

[文献書誌] T.OZAWA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Advances in Computational Engineering Sciences 2000"Tech Science Press (Edited by Satye N.Atluri and Frederick W.Brust). 6 (2000)

[文献書誌] T.OZAWA, Y.HAYAKAWA, M.KUMAGAWA et al.: "Advances in Computational Engineering Sciences 2001"Tech Science Press (Edited by Satye N.Atluri and Frederick W.Brust). 6 (2001)

2001 年度実績報告書

熊川征司静岡大学, 電子工学研究所, 教授 (30022130)

[文献書誌] 早川泰弘, 熊川征司他: "微小重力下と地上におけるGaSb/InSb/GaSb試料の溶解実験と数値解析"静岡大学電子工学研究所研究報告. 34. 1-7 (2000)