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[文献書誌] 石島達夫, 菅井秀郎他1名: "Control of Electron Distribution Function and Radical Composition of Fluorocarbon Plasma by Rare Gas Selection"Control of Electron Distribution Function and Radical Composition of Fluorocarbon Plasma by Rare Gas Selection. 79-80 (2001)
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[文献書誌] 石島達夫, 菅井秀郎他1名: "Control of Electron Temperature by Mixing Rare Gases in Fluorocarbon Plasma"Bulletin of the American Physical Society. 6巻6号. 58 (2001)
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[文献書誌] 石島達夫, 菅井秀郎他1名: "Effects of Rare Gas Mixture on Electron Distribution Function and Fluorocarbon Radical Composition"Proceedings of 25th International Conference on Phenomena in Ionized Gases. 1巻. 157-158 (2001)
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[文献書誌] 石島達夫, 菅井秀郎他1名: "Effects of metastable atom contribution to Electron Temperature and radical composition in Fluorocarbon plasmas"Abstracts of Frontiers of Surface Engineering 2001. 208 (2001)
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[文献書誌] 石島達夫, 菅井秀郎他1名: "Electron Temperature Control by Rare Gas Mixing with Metastable Atom Contribution"Proceedings of International Conference of Dry Process Symposium 2001. 87-92 (2001)
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[文献書誌] 石島達夫, 菅井秀郎他1名: "Rare-gas based control of high density plasmas for silicon oxidation"Proceedings of 16th ESCAMPIG and 5th ICRP. 1巻. 325-326 (2002)