2003 年度実績報告書

高圧力・高密度マイクロ波プラズマ源の開発とその大面積薄膜プロセスへの応用

研究課題

研究課題/領域番号	14580516
研究機関	静岡大学
研究代表者	永津雅章静岡大学, 工学部, 教授 (20155948)
研究分担者	菅井秀郎名古屋大学, 工学研究科, 教授 (40005517)
キーワード	マイクロ波プラズマ / プラズマCVD / ダイヤモンド薄膜 / カーボンナノチューブ / マイクロ波ランチャー / 電磁界解析 / アッシング
研究概要	最終年度の平成15年度では昨年度の研究成果を踏まえ、実験装置の大面積化を主な研究課題として、以下の研究項目を実施した (1)マイクロ波プラズマ装置の大面積化:平成14年度に設計した直径60cmの大口径プラズマ真空装置を製作し、また新しく開発した直径50cm内挿型同軸マイクロ波ランチャー(特許出願)を用いて大面積プラズマ生成実験を実施した。マイクロ波ランチャーの設計および構造の最適化には電磁界解析シミュレータMAFIAを用いて共振器型構造および開放型構造のランチャー形状に対して放射電磁界の解析を行い、プラズマ大面積化に関するマイクロ波ランチャー構造の設計指針を示した。 (2)大面積マイクロ波プラズマの生成:アルゴンあるいはヘリウムを用いたプラズマ生成実験を実施し、開放型ランチャーを用いたとき、マイクロ波パワー1kW、圧力約0.1Torrにおいて直径40cm以上にわたりほぼ均一な大面積プラズマが生成できることを示した。 (3)大面積プラズマ装置の各種応用:マイクロ波プラズマのプラズマCVDへの応用として、直径40cmの表面波プラズマ装置を用い、直径20cmにわたる大面積カーボンナノチューブの堆積実験を行い、空間的に均一性なナノチューブ合成が可能であることを示した。また、本研究の内容と異なるが、同装置の医療滅菌への応用についても併せて研究を実施し、高速かつ低温滅菌が可能であることを示し、その実用化の可能性を示した(外国特許出願)。 (4)高圧力マイクロ波プラズマ生成実験:2台のマイクロ波を用いた新しい高圧力マイクロ波プラズマ装置を開発し(特許出願)、プラズマ放電領域が従来のマイクロ波CVD装置に比べ、約2倍に拡大できることを示し、ダイヤモンド膜の大面積堆積が可能であることを示した。 (5)研究成果のまとめ:本研究に関連する成果は、学術論文に3件、著書3編、国際会議に11件、国内学会・研究会に20件発表し、国内特許出願2件、外国特許出願1件を行った。

研究成果
(21件)

すべてその他

すべて文献書誌 (21件)

[文献書誌] M.Nagatsu: "Low-Temperature Sterilization with Surface-Wave-Excited Oxygen Plasma"Jpn.J.Appl.Phys.. Vol.42, No.7B. L856-L859 (2003)
[文献書誌] A.F.Bardamid: "The Prospect on the Use of Be mirrors in a Fusion Reactor with Be First Wall"Problems of Atomic Science and Technology, Series Plasma Physics. Vol.9, No.1. 52-55 (2003)
[文献書誌] M.Nagatsu: "Large-Area Microwave Plasma Device Using Internally Mounted Planar Launcher"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 31 (2003)
[文献書誌] M.Nagatsu: "Characteristics of Low-Temperature Sterilization Using Surface Wave Plasma"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 131 (2003)
[文献書誌] M.Nagatsu: "Production of Large-Area Microwave Plasma and its Application to Plasma CVD"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 107 (2003)
[文献書誌] J.Maeda: "Microwave Plasma CVD Reactor for Diamond Film Synthesis with Double Microwave Launchers System"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 157-158 (2003)
[文献書誌] M.Nagatsu: "Experimental Study of Low-Temperature Sterilization Using Surface Wave Plasma Excited by a 2.45 GHz Microwave"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 205-206 (2003)
[文献書誌] S.Kurita: "Growth of Catalytic Metal Composed Amorphous Carbon Films and Carbon Nanotube Using Large-Area Surface-Wave Plasma"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 161-162 (2003)
[文献書誌] M.Nagatsu: "Diamond Film Synthesis Using Microwave Plasma CVD Combined with Hot Filament Technique"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.1.1 (2003)
[文献書誌] M.Nagatsu: "New Microwave Plasma CVD Device for Diamond Film Synthesis Using Two-Oscillators System"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.1.6 (2003)
[文献書誌] M.Nagatsu: "Characterisation of Catalytic Metal Composed Carbon Films Prepared with Large-Area Surface-Wave Plasma"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.3.9 (2003)
[文献書誌] T.Sugie: "Irradiation Test on Mo- and W-Mirrors by Low Energy Deuterium Ions for ITER"J.Nuclear Materials. (掲載予定). (2004)
[文献書誌] K.Naito: "Field Analysis of Internally Mounted Planar Microwave Launcher and Its Characteristics of Plasma Production"Proc.of 21^<st> Symposium of Plasma Processing. 82-83 (2004)
[文献書誌] S.Kurita: "Production of Amorphous Carbon Coated Nanotubes Using Surface-Wave Plasma CVD and Their Field Emission Characteristics"Proc.of 21^<st> Symposium of Plasma Processing. 144-145 (2004)
[文献書誌] J.Maeda: "Diamond Film Synthesis Using Microwave Plasma CVD Reactor with Double Launchers System"Proc.of 21^<st> Symposium of Plasma Processing. 146-147 (2004)
[文献書誌] F.Terashita: "Measurement of Survival Curves in Microwave Plasma Sterilization Using Colony Count Technique"Proc.of 21^<st> Symposium of Plasma Processing. 266-267 (2004)
[文献書誌] M.Nagatsu: "Novel Microwave Plasma Reactor with Two Microwave Oscillators for Nano-Crystalline Diamond Film Synthesis"Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. 63 (2004)
[文献書誌] M.Nagatsu: "Field Emission Performance of Carbon Nanotube Overcoated with Amorphous Carbon Film Prepared with Surface-wave Plasma"Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. 66 (2004)
[文献書誌] 電気学会・マイクロ波プラズマ調査専門委員会編(分担執筆): "マイクロ波プラズマの技術"オーム社. 272 (2003)
[文献書誌] プラズマ・核融合学会編(分担執筆): "プラズマの生成と診断 -応用への道-"コロナ社. 456 (2003)
[文献書誌] A.Ohl 編著 (分担執筆): "Vth Int.Workshop on Microwave Discharges : Fundamentals and Applications"Institute for Niedertemperature-Plasmaphysik Kiebu-Druck GmbH. 272 (2003)

2003 年度 実績報告書

高圧力・高密度マイクロ波プラズマ源の開発とその大面積薄膜プロセスへの応用

研究代表者

永津 雅章 静岡大学, 工学部, 教授 (20155948)

研究成果

[文献書誌] M.Nagatsu: "Low-Temperature Sterilization with Surface-Wave-Excited Oxygen Plasma"Jpn.J.Appl.Phys.. Vol.42, No.7B. L856-L859 (2003)

[文献書誌] A.F.Bardamid: "The Prospect on the Use of Be mirrors in a Fusion Reactor with Be First Wall"Problems of Atomic Science and Technology, Series Plasma Physics. Vol.9, No.1. 52-55 (2003)

[文献書誌] M.Nagatsu: "Large-Area Microwave Plasma Device Using Internally Mounted Planar Launcher"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 31 (2003)

[文献書誌] M.Nagatsu: "Characteristics of Low-Temperature Sterilization Using Surface Wave Plasma"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 131 (2003)

[文献書誌] M.Nagatsu: "Production of Large-Area Microwave Plasma and its Application to Plasma CVD"Abstracts of 5th Int.Workshop on Microwave Discharges : Fundamentals and Applications. 107 (2003)

[文献書誌] J.Maeda: "Microwave Plasma CVD Reactor for Diamond Film Synthesis with Double Microwave Launchers System"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 157-158 (2003)

[文献書誌] M.Nagatsu: "Experimental Study of Low-Temperature Sterilization Using Surface Wave Plasma Excited by a 2.45 GHz Microwave"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 205-206 (2003)

[文献書誌] S.Kurita: "Growth of Catalytic Metal Composed Amorphous Carbon Films and Carbon Nanotube Using Large-Area Surface-Wave Plasma"Proc.of 26th Int.Conf.on Phenomena in Ionized Gases. Vol.3. 161-162 (2003)

[文献書誌] M.Nagatsu: "Diamond Film Synthesis Using Microwave Plasma CVD Combined with Hot Filament Technique"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.1.1 (2003)

[文献書誌] M.Nagatsu: "New Microwave Plasma CVD Device for Diamond Film Synthesis Using Two-Oscillators System"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.1.6 (2003)

[文献書誌] M.Nagatsu: "Characterisation of Catalytic Metal Composed Carbon Films Prepared with Large-Area Surface-Wave Plasma"Abstracts of 14th European Conf.on Diamond, Diamond-like Materials.Carbon Nanotube.Nitrides & Silicon Carbide. 5.3.9 (2003)

[文献書誌] T.Sugie: "Irradiation Test on Mo- and W-Mirrors by Low Energy Deuterium Ions for ITER"J.Nuclear Materials. (掲載予定). (2004)

[文献書誌] K.Naito: "Field Analysis of Internally Mounted Planar Microwave Launcher and Its Characteristics of Plasma Production"Proc.of 21^<st> Symposium of Plasma Processing. 82-83 (2004)

[文献書誌] S.Kurita: "Production of Amorphous Carbon Coated Nanotubes Using Surface-Wave Plasma CVD and Their Field Emission Characteristics"Proc.of 21^<st> Symposium of Plasma Processing. 144-145 (2004)

[文献書誌] J.Maeda: "Diamond Film Synthesis Using Microwave Plasma CVD Reactor with Double Launchers System"Proc.of 21^<st> Symposium of Plasma Processing. 146-147 (2004)

[文献書誌] F.Terashita: "Measurement of Survival Curves in Microwave Plasma Sterilization Using Colony Count Technique"Proc.of 21^<st> Symposium of Plasma Processing. 266-267 (2004)

[文献書誌] M.Nagatsu: "Novel Microwave Plasma Reactor with Two Microwave Oscillators for Nano-Crystalline Diamond Film Synthesis"Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. 63 (2004)

[文献書誌] M.Nagatsu: "Field Emission Performance of Carbon Nanotube Overcoated with Amorphous Carbon Film Prepared with Surface-wave Plasma"Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources. 66 (2004)

[文献書誌] 電気学会・マイクロ波プラズマ調査専門委員会編(分担執筆): "マイクロ波プラズマの技術"オーム社. 272 (2003)

[文献書誌] プラズマ・核融合学会編(分担執筆): "プラズマの生成と診断 -応用への道-"コロナ社. 456 (2003)

[文献書誌] A.Ohl 編著 (分担執筆): "Vth Int.Workshop on Microwave Discharges : Fundamentals and Applications"Institute for Niedertemperature-Plasmaphysik Kiebu-Druck GmbH. 272 (2003)

2003 年度実績報告書

永津雅章静岡大学, 工学部, 教授 (20155948)