| 研究課題/領域番号 |
14F04812
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| 研究機関 | 名古屋工業大学 |
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研究代表者 |
江龍 修 名古屋工業大学, 工学(系)研究科(研究院), 教授 (10223679)
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| 研究分担者 |
PERFETTI Claire 名古屋工業大学, 工学(系)研究科(研究院), 外国人特別研究員
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| 研究期間 (年度) |
2014-04-25 – 2017-03-31
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| キーワード | SAW device / Finite Element Modeling / SAW modeling |
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| 研究実績の概要 |
Since the beginning of the project to the start of the maternal leave date (30 Nov 2014 - 28 Feb 2015), research investigations have been focused into 1) the modeling the Surface Acoustic Wave (SAW) device and 2) the synthesis of the piezoelectric layer.
Concerning the Finite Element Modeling (FEM), two numerical codes commercially available, namely ANSYS and Comsol, have been tested, using a free trial license. Preliminary harmonic and modal numerical model of a SAW device was successfully completed. ANSYS and Comsol have been evaluated for their respective usability, performance and costs. In the particular case of SAW modeling, Comsol software has been outlined as the best tool for this particular application.
Regarding the fabrication of the device, first, a bibliographic investigation showed that Zinc Oxide is a good candidate for the piezoelectric layer. Synthetic methods have been considered and selected from the literature according to the SAW functionality. The growth of a micro-nanostructured layer has been successfully accomplished using a wet method (hydrothermal) on both rigid and flexible substrates; such as glass, SiO2, and polyimide. ZnO layer deposition by a physical method (RF sputtering) has been also realized. Morphological characterization of the layer has been performed by means of Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). The crystal structure of the layer has also been investigated using Raman spectroscopy and XRD.
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| 現在までの達成度 (区分) |
現在までの達成度 (区分)
2: おおむね順調に進展している
理由
Tasks such as the SAW device modeling and the piezoelectric layer fabrication have been addressed as planned in the original proposal; first trimester (T1 of Year 1) of the project. The refinement and completion of this preliminary work is an essential step for the achievement of the project. In particular, the device modeling, which would allow assisting the design of the geometry of the different device components (e.g. piezoelectric layer thickness, spacing of the electrodes, etc.), will help optimize the development of the SAW sensor fabrication, by reducing the number of trials.
On the other hand, the preliminary synthesis tests that have been realized during the first trimester are an asset for the investigation, as the results are promising; towards the determination of the optimal recipe for the deposition of an operational piezoelectric layer. The morphological and structural analysis of the grown Zinc Oxide material reveals that the layer presents common features with the ones built in SAW applications.
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| 今後の研究の推進方策 |
In the short term, research work will focus mainly on the completion of the modelling task, as a necessary step of the sensor development. Reliable and tuneable FEM tool will greatly help in accurately designing the device. At the same time, the dielectric measurements and characterization of the piezoelectric layer will enable the extraction of more accurate data of the material, which would be later integrated to the FEM tool to increase its efficiency and make it more realistic. Piezoelectric layer will continue to be experimentally developed as well. Its characterization will be applied and deepen according to the degree of sophistication attained, e.g. by using transmission electron microscopy.
As described in the original proposal, the future work (mid-term) will also address the improvement of the sensitivity of the sensor by using a graphene-based layer as the sensing area. Ultimately, the sensor packaging will then be investigated as the device will be integrated into a polycarbonate packaging to ensure robustness against cross-linked effect, such as physical adsorption and biofouling.
Intrinsic to the project objective, a strong effort will be then dedicated to the device signal processing, as it could have a significant impact on the accuracy and the performance of the sensor. As an example, a parametric study about temperature and pH impact on the signal will be conducted in order to apply an efficient filtration of the acoustic response signal.
At a longer term, the effort will be put into the integration of the sensor platform into a collagen matrix.
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