| 研究課題/領域番号 |
14F04812
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| 研究機関 | 名古屋工業大学 |
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研究代表者 |
江龍 修 名古屋工業大学, 工学(系)研究科(研究院), 教授 (10223679)
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| 研究分担者 |
PERFETTI CLAIRE 名古屋工業大学, 工学(系)研究科(研究院), 外国人特別研究員
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| 研究期間 (年度) |
2014-04-25 – 2017-03-31
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| キーワード | zinc oxide / Chemical Bath Deposition |
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| 研究実績の概要 |
During the past year, research emphasis has been put on manufacturing and characterization and the following achievements were obtained. Regarding the manufacturing development of the piezoelectric layer, zinc oxide (ZnO) deposition using Sputtering deposition process and Chemical Bath Deposition (CBD) process were investigated. CBD has been extensively studied in the past year as this process is easy to implement and was already in use in our laboratory. This two-step process s requires a preliminary seed layer deposition to ensure a good adhesion good crystalline orientation of the consecutive thick layer. As a result, the seed layer process deposition was parametrically investigated. Different combination of temperature of deposition, growth time and growth process repetition were led on both rigid (glass, Si-SiO2, Si) substrates and polyimide soft substrate. A complete characterization of the morphology of the layer has also been performed thanks to Atomic Force Microscopy (ATM) and Scanning Electron Microscopy (SEM). The crystalline structure of the layer was investigated using X-Ray Diffraction (XRD) and Raman spectroscopy. The results of these investigations were presented at MNE2015 conference and a paper is under progress.
ZnO deposition on Si-SiO2 and polyimide substrates was alternatively done using Sputtering deposition method. The layer was similarly characterized, and results presented at ISPlasma2016 conference where I was awarded with an Excellent Presentation Award for this poster presentation.
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| 現在までの達成度 (区分) |
現在までの達成度 (区分)
1: 当初の計画以上に進展している
理由
Regarding the original plan, SAW device modelling task is under progress and is expected to be completed in the following weeks.
Manufacturing development task is also under progress. In this work package, the deposition of piezoelectric layer (ZnO) has been intensively investigated, and this task is completed. Electrodes printing and sensing area deposition are under progress as a preliminary deposition was realized and characterized in collaboration with the Institute of Microelectronic of Barcelona (IMB-CNM-CSIC, Barcelona, Spain).
Characterization work package is also under progress, as morphological and structural characterization are continuously performed on material samples. Electrical characterization was also performed after the deposition of electrodes.
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| 今後の研究の推進方策 |
The project task regarding ZnO deposition has raised several interests, and new collaborations have been issued involving CBD process of ZnO. The first research axis consists in building ZnO/Al-Zn Layered Double Hydroxides (LDH) which are hydrotalcite-like ionic lamellar materials that have raised a growing attention due to their adsorbent and catalytic properties for sensing or liquid waste treatment. The aim of this work is to develop a reproducible manufacturing process that would enable a large scale nanostructured ZnO coating [4] with a high surface area for gas sensing applications. The results of these investigations will be presented at the upcoming ICCGE-18 conference [3] and the proceeding paper is under progress. Recently, the interest of CBD of ZnO for dye sensitized solar cell is investigated in collaboration with another research group in NITech, as this deposition method could be an answer to their current problem of layer adhesion on substrate.
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