超高速光ネットワーク用光IC -大規模集積限界への挑戦-

2002 年度 実績報告書

• 研究課題/領域番号: 14GS0212
• 研究機関: 東京工業大学
• 研究代表者: 小山 二三夫 東京工業大学, 精密工学研究所, 教授 (30178397)
• 研究分担者: 國分 泰雄 横浜国立大学, 大学院・工学研究院, 教授 (60134839) ; 植之原 裕行 東京工業大学, 精密工学研究所, 助教授 (20334526) ; 宮本 智之 東京工業大学, 精密工学研究所, 助教授 (70282861) ; 滝沢 國治 成蹊大学, 工学部, 教授 (80327973)
• キーワード: 半導体レーザ / 面発光レーザ / 波長多重 / 光通信 / 光集積回路 / アレイ光源 / リング共振器 / 光波導路

研究概要

本研究では,(1)広いスペクトル領域における高性能面発光レーザとその極限性能追求,(2)面発光レーザの波長制御技術の開拓と大規模な2次元集積化,(3)3次元集積化による大規模集積化波長ルーティング回路,の3項目のデバイス研究を中核とし,これらのデバイスを結集して,超高速光ネットワークへの応用と新しいシステムコンセプトの創成を目指して,研究を進めた.具体的な研究成果は,以下の通りである.
テラビット級大容量の光データリンクの実現を目指して研究を進め,GaInAs/GaAs及びGaInNAs/GaAsの高品質量子井戸レーザの製作に成功し,1.0-1.3μm帯面発光レーザの製作技術を確立するとともに,パターン基板を用いた多波長面発光レーザアレイの構成法を確立し,波長幅2000nmに及ぶ広波長域多波長レーザアレイを初めて実現した.また,熱応力を利用した光マイクロマシンによる垂直光共振器を提案して,温度無依存特性や連続波長掃引を可能とする半導体共振器を実現し,波長を高精度に制御可能な光フィルタや面発光レーザの実現の可能性を示した.また,新規な中空光導波路による光機能回路の提案と基盤技術を提示した.次世代フォトニックネットワーク用のAdd/Drop波長フィルタとして國分らが提案・開発してきた積層マイクロリング共振器型波長フィルタについては,今年度は中心波長の高精度設定と,超大容量波長多重化のためのフィルタの最適設計について検討し,SiNをコアに用いたマイクロリング共振器フィルタに紫外線を照射して12.1nmの広い波長範囲にわたるトリミング技術を開発するとともに,極限符号効率を達成するためのフィルタ特性の合成法を開発した.また,電気光学(EO)結晶を用いた超高速光デバイスの電界計測プローブの超高感度化の新しい手法を提案し,解析によりその効果を実証した.

研究成果

• [文献書誌] S.Shinada, F.Koyama, N.Nishiyama, M.Arai: "Single high-order transverse mode surface emitting laser with micromachined surface relief"Trans. IEICE. vol.E85-C, no.4. 995-1000 (2002)
• [文献書誌] A.Matsutani, H.Ohtsuki, F.Koyama, K.Iga: "Measurement of plasma density for control of etching profile in inductively coupled plasma etching of InP"Jpn. J. Appl. Phys.. vol.41, no.5A. 3147-3148 (2002)
• [文献書誌] T.Kondo, M.Arai, M.Azuchi, T.Uchida, A.Matsutani, T.Miyamoto, F.Koyama: "Low threshold current density operation of 1.16μm highly strained GaInAs/GaAs vertical cavity surface emitting lasers on (100) GaAs substrate"Jpn. J. Appl. Phys.. vol.41, no.5B. L562-L564 (2002)
• [文献書誌] T.Kondo, M.Arai, M.Azuchi, T.Uchida, T.Miyamoto, F.Koyama: "Effect of annealing on highly strained GaInAs/GaAs quantum wells"Jpn. J. Appl. Phys.. vol.41, no.6A. L612-L614 (2002)
• [文献書誌] T.Yamatoya, F.Koyama: "High-speed operation of optical preamplifier using inverted amplified spontaneous emission signal of saturated semiconductor optical amplifier"Jpn. J. Appl. Phys.. vol.41, no.6A. L638-L640 (2002)
• [文献書誌] Y.Ohnishi, F.Koyama: "Optical characterization of InGaAs quantum wells after InP-GaAs low-temperature wafer bonding"Jpn. J. Appl. Phys.. vol.41, no.6B. L669-L671 (2002)
• [文献書誌] J.Hashizume, S.Shinada, F.Koyama: "Near-field optical probing using a microaperture GaInAs/GaAs surface emitting laser"Jpn. J. Appl. Phys.. vol.41, no.6B. L700-L702 (2002)
• [文献書誌] 大和屋 武, 小山二三夫: "半導体光増幅器を用いたスペクトルスライス光の雑音抑圧"電子情報通信学会論文誌. vol.J85-C, no.6. 417-423 (2002)
• [文献書誌] E Gouardes, T.Miyamoto, M.Kawaguchi, T.Kondo, F.Koyama, K.Iga: "GaInAs/GaInNAs/GaInAs intermediate layer structure for long wavelength lasers"IEEE Photon. Technol. Lett. vol.14, no.7. 896-898 (2002)
• [文献書誌] T.Amano, F.Koyama, M.Arai: "GaAlAs/GaAs micromachined thermally tunable vertical cavity filter with low tuning voltage"Electron. Lett.. vol.38, no.14. 738-740 (2002)
• [文献書誌] M.Arai, T.Kondo, A.Matsutani, T.Miyamoto, F.Koyama: "Growth of highly strained GaInAs-GaAs quantum wells on patterned substrate and its application for multiple-wavelength vertical-cavity surface-emitting laser array"IEEE J. Select. Top. Quantum Electron.. vol.8, no.4. 811-816 (2002)
• [文献書誌] T.Miura, F.Koyama, A.Matsutani: "Modeling and fabrication of hollow optical waveguide for photonic integrated circuits"Jpn. J. Appl. Phys.. vol.41, no.7B. 4785-4789 (2002)
• [文献書誌] T.Kondo, M.Arai, M.Azuchi, T.Uchida, A.Matsutani, T.Miyamoto, F.Koyama: "Singlemode fibre transmission using 1.2μm band GaInAs/GaAs surface emitting laser"Electron. Lett.. vol.38, no.16. 901-903 (2002)
• [文献書誌] 坂口 孝浩, 小山 二三夫, 伊賀 健一: "GaN系青色面発光レーザ用共振器の形成と評価"日本結晶成長学会誌. vol.29, no.3. 47-54 (2002)
• [文献書誌] T.Miura, F.Koyama, A.Matsutani: "Three-dimensional hollow optical waveguide with an etched groove substrate"Jpn. J. Appl. Phys.. vol.41, no.9. 5607-5608 (2002)
• [文献書誌] J.Hashizume, S.Shinada, F.Koyama: "Reflection induced voltage change of surface emitting laser for optical probing"Optical Review. vol.9, no.5. 186-188 (2002)
• [文献書誌] S.Shinada, F.Koyama: "Single high-order transverse mode surface-emitting laser with controlled far-field pattern"IEEE Photon. Technol. Lett.. vol.14, no.12. 1641-1643 (2002)
• [文献書誌] M.Ohta, T.Miyamoto, S.Makino, Y.Ikenaga, F.Koyama: "Effect of quantum well width reduction for GaInNAs/GaAs lasers,"Optical Review. vol.9, no.6. 231-233 (2002)
• [文献書誌] A.Matsutani, H.Ohtsuki, F.Koyama: "In situ Observation of Etching Profile in Inductivity Coupled Plasma Etching of GaAs and Inp using Long Distance Microscope"Jpn. J. Appl. Phys.. vol.42, no.2,. 426-427 (2003)
• [文献書誌] T.Amano, F.Koyama, T.Hino, M.Arai, A.Matsutani: "Design and fabrication of GaAs/GaAlAs micromachined tunable filter with thermal strain control"J. Lightwave Technol. vol.21, no.3. (2003)
• [文献書誌] H.Uenohara, T.Seki: "Optical routing characteristics of wavelength switched probe light from super-structure-grating (SSG) DBR laser and cross-gain modulation in SOA"Electron. Lett.. vol.38, no.24. 1566-1567 (2002)
• [文献書誌] S.Shinada, F.Koyama: "Single high-order transverse mode surface-emitting laser with controlled far-field pattern"IEEE Photon. Technol. Lett.. vol.14, no.12. 1641-1643 (2002)
• [文献書誌] M.Ohta, T.Miyamoto, S.Makino, Y.Ikenaga, F.Koyama: "Effect of quantum well width reduction for GaInNAs/GaAs lasers"Optical Review. vol.9, no.6. 231-233 (2002)
• [文献書誌] H.Uenohara, T.Seki: "Investigation of optical packet transfer time and BER of optical routing configuration by use of high-speed electrically tunable laser and second-stage wavelength converters using SOAs"Electron. Lett.. vol.38, no.25. 1699-1701 (2002)
• [文献書誌] M.Kawaguchi, T.Miyamoto, S.Minobe, F.Koyama, K.Iga: "Growth temperature dependence of annealing effect for GaInNAs/GaAs quantum wells grown by metalorganic chemical vapor deposition"14th Int. Conf. on Indium Phosphide and Related Materials (IPRM2002), Stockholm, Sweden. PI-17. 237-240 (2002)
• [文献書誌] M.Arai, T.Kondo, M.Azuchi, T.Uchida, A.Matsutani, T.Miyamoto, F.Koyama: "1.2μm band multiple-wavelength GaInAs/GaAs vertical cavity surface emitting laser array on patterned substrate"14th Int. Conf. on Indium Phosphide and Related Materials (IPRM2002), Stockholm, Sweden. A3-3. 303-304 (2002)
• [文献書誌] T.Yamatoya, F.Koyama: "10 Gb/s operation of optical preamplifier using inverted ASE signal of saturated semiconductor optical amplifier"Conf. on Lasers and Electro-Optics 2002 (CLEO2002), Long Beach, CA.. CWD5. 375-376 (2002)
• [文献書誌] ^*T.Miyamoto, F.Koyama: "GaInNAs based laser diodes grown by MOVPE"11th Int. Conf. on Metalorganic Vapor Phase Epitaxy (ICMOVPE XI). Tue-A1. (2002)
• [文献書誌] ^*T.Miyamoto, F.Koyama: "GaInNAs based laser diodes grown by MOVPE"11th Int. Conf. on Metalorganic Vapor Phase Epitaxy (ICMOVPE XI). Tue-A1. (2002)
• [文献書誌] T.Amano, F.Koyama, T.Hino, M3.Arai, A.Matsutani: "GaAlAs/GaAs micromachined tunable vertical filter with low tuning voltage below 5 bolts,"60th Annual Device Research Conference (DRC 2002), Santa Barbara, CA. V.A.-5. (2002)
• [文献書誌] ^*F.Koyama, T.Amano, T.Miura: "Micromachined tunable optical filters"7th Optoelectronics and Communication Conf. (OECC2002). 9C1-1. 36-37 (2002)
• [文献書誌] T.Kondo, M.Arai, M.Azuchi, T.Uchida, A.Matsutani, T.Miyamoto, F.Koyama: "Singlemode fibre transmission using 1.2μm band GaInAs/GaAs surface emitting laser"7th Optoelectronics and Communication Conf. (OECC2002). 10C2-3. 148-149 (2002)
• [文献書誌] ^*T.Miyamoto, F.Koyama: "Low threshold GaInNAs/GaAs VCSEL"7th Optoelectronics and Communication Conf. (OECC2002). 10C2-4. 150-151 (2002)
• [文献書誌] S.Shinada, F.Koyama: "Far field pattern control of single high order transverse mode VCSEL with micromachined surface relief"7th Optoelectronics and Communication Conf. (OECC2002). 10C3-2. 154-155 (2002)
• [文献書誌] J.Hashizume, S.Shinada, F.Koyama: "Near-field optical probing based on micro-aperture surface emitting laser"7th Optoelectronics and Communication Conf. (OECC2002). 10P-74. (2002)
• [文献書誌] T.Miura, F.Koyama, A.Matsutani: "Fabrication and propagation characteristics of three-dimensional hollow optical waveguides"7th Optoelectronics and Communication Conf. (OECC2002). 12A4-3. (2002)
• [文献書誌] H.Uenohara, T.Seki: "Optical data routing performance using a super-structure-grating DBR tunable laser and cross-gain modulation based wavelength conversion"7th Optoelectronics and Communication Conf. (OECC2002). 12B3.
• [文献書誌] ^*F.Koyama, S.Shinada: "Single high-order transverse mode VCSELs"LEOS Summer Topical Meetings (Summer Topicals 2002). TuP1. 41-42 (2002)
• [文献書誌] H.Uenohara, T.Seki: "Bit error rate evaluation of optical routing operation in a ultrafast packet-by-packet optical routing system"Int. Conf. on Optical Internet and Topical Metting on Photonics in Switching (COIN+PS2002). MoC1. (2002)
• [文献書誌] ^*F.Koyama, T.Miyamoto, K.Iga: "Recent progress of surface emitting lasers for high speed photonic networks"SPIE ITCom (ITCom 2002). (2002)
• [文献書誌] T.Miura, F.Koyama, A.Matsutani: "Novel variable optical attenuaT. sing hollow waveguide"Int. Conf. on Optical Switching (MOEMS2002). FB2. 201-201 (2002)
• [文献書誌] ^*T.Miyamoto, F.Koyama: "Progress of GaInNAs long wavelength Lasers"The 2002 Int. Conf. on Solid State Devices and Materials (SSDM2002). G-2-1. (2002)
• [文献書誌] ^*T.Miyamoto, S.Makino, M.Kawaguchi, F.Koyama: "Wavelength elongation of GaInNAs lasers beyond 1.3μm"Physics and Technology of Dilute Nitrides for Optical Communications. (2002)
• [文献書誌] ^*F.Koyama: "Widely tunable optical MEMS devices"The Int. Photonics Technology Conf. (IPTC 2002). (2002)
• [文献書誌] ^*F.Koyama: "VCSELs and MEMS technologies for high speed LANs"28th European Conference on Optical Communications (ECOC 2002). 05.4.3. (2002)
• [文献書誌] T.Miura, F.Koyama: "3D hollow waveguides for micromachined tunable photonic devices"28th European Conference on Optical Communications (ECOC 2002). 04.4.4. (2002)
• [文献書誌] S.Makino, T.Miyamoto, M..Ohta, T.Kageyama, Y.Ikenaga, F.Koyama, K.Iga: "Growth temperature and nitrogen composition dependence of growth characteristics of GaInNAs/GaAs quantum dots"12th International Conference on Molecular Beam Epitaxy (ICMBE 2002). ThA2.3. (2002)
• [文献書誌] M.Arai, T.Kondo, A.Matsutani, T.Miyamoto, F.Koyama: "Multiple-wavelength GaInAs/GaAs vertical cavity surface emitting laser array with wavelength span of over 100nm"IEEE 18th Int. Semiconductor Laser Conf. (ISLC 2002). MB2. 9-10 (2002)
• [文献書誌] S.Makino, T.Miyamoto, M..Ohta, Tetsuya Matsuura, Yasuhisa Matsui, F.Koyama: "Thermal annealing effect on self-assembled GaInNAs/GaAs quantum dots grown by chemical beam epitaxy"2nd Int. Conf. on Semiconductor Quantum Dots (QD 2002). (2002)
• [文献書誌] ^*F.Koyama: "Surface emitting lasers for high speed LANs"Materials and Devices for Optical and Wireless Communications (APOC 2002). 4905-56. (2002)
• [文献書誌] ^*F.Koyama, T.Miyamoto: "Micro/nano fabrication for surface emitting lasers and optical MEMS"Nano Microprocess Conference (NMC 2002). (2002)
• [文献書誌] ^*F.Koyama, T.Miyamoto, M.Arai, T.Kondo: "1200nm highly strained GaInAs/GaAs VCSELs"The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2002). (2002)
• [文献書誌] S.Shinada, J.Hashizume, F.Koyama: "Surface plasmon resonance on VCSEL with metal grating and nano-aperture"The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2002). TuAA4. (2002)
• [文献書誌] T.Kondo, M.Arai, A.Onomura, T.Miyamoto, F.Koyama: "1.23μm long wavelength highly strained GaInAs/GaAs quantum well laser"The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2002). WFF5. 618-619 (2002)
• [文献書誌] A.Onomura, M.Arai, T.Kondo, A.Matsutani, T.Miyamoto, F.Koyama: "Densely integrated multiple wavelength vertical surface emitting laser array"The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2002), Glasgow, Scotland. ThH3. 689-690 (2002)
• [文献書誌] T.Amano, T.Hino, F.Koyama, M.Arai, A.Matsutani: "Dynamic response of thermally tunable micromachined optical filter with low tuning"The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2002). ThV4. 618-619 (2002)
• [文献書誌] T.Amano, F.Koyama, T.Hino, M.Arai, A.Matsutani: "GaAlAs/GaAs micromachined tunable vertical filter with low tuning voltage below 5 volts"60th annual Device Research Conference (DRC 2002). V.A.-5. 618-619 (2002)
• [文献書誌] T.Honda, K.Iga, H.Kawanishi, T.Sakaguchi, F.Koyama: "Deposition of GaN films on glass substrate and its application to UV electroluminescent devices"Meeting of the Materials Research Society (MRS 2002). L6.31. (2002)
• [文献書誌] ^*F.Koyama: "Widely tunable micromachined filters using stress control of multiplayer"Photonic West 2003, San Jose, USA. 4987-05. (2003)
• [文献書誌] J.Hashizume, F.Koyama: "Modeling and characterization of optical near-field nano-probing based on nano-aperture surface emitting lase"Photonic West 2003, San Jose, USA. 4986-39. (2003)
• [文献書誌] Y.Onishi, F.Koyama: ""Optical signal processing using a vertical-cavity surface-emitting laser with external optical injection"Photonic West 2003, San Jose, USA. 4986-4. (2003)
• [文献書誌] ^*F.Koyama, T.Miyamoto: "Long wavelength surface emitting lasers in 1.2-1.3 mm wavelength band"Conference on Optical Fiber Communications, OFC 2003, Atlanta, USA. FG5,4986-41. (2003)
• [文献書誌] H.Takeda, F.Kondo, H.Uenohara: "Modulation format dependence of wavelength conversion performance using cross gain modulation in a semiconductor optical amplifier"6th Contemporary Photonics Technology. CPT 2003. (2003)
• [文献書誌] Y.Kokubun, T.Kato, S.T.Chu: "Box-like response of microring resonator filter by stacked double-ring geometry"IEICE Trans. on Electronics. vol.E85-C, No.4. 1018-1024 (2002)
• [文献書誌] S.Suzuki, Y.Hatakeyama, Y.Kokubun, S.T.Chu: "Precise control of wavelength channel spacing of microring resonator Add/Drop filter array"IEEE/OSA J. Lightwave Technology. vol.20, No.4. 745-750 (2002)
• [文献書誌] H.Haeiwa, H.Nakashima, Y.Kokubun, A.Masaki, T.Toyooka: "Precise Formation of Fine Pits on Birefringent Film for Multi-level Optical Data Storage"Japan J. Appl. Phys.. vol.41, No.7B. 4841-4844 (2002)
• [文献書誌] T.Kato, S.Suzuki, Y.Kokubun, S.T.Chu: "Coupling loss reduction of vertically coupled microring resonator filter by spot size matched busline waveguides"Applied Optics. vol.41, No.21. 4394-4399 (2002)
• [文献書誌] Y.Yanagase, S.Suzuki, Y.Kokubun, S.T.Chu: "Box-like filter response and expansion of FSR by vertically triple coupled microring resonator filter"IEEE/OSA J. Lightwave Technology. vol.20, No.8. 1525-1529 (2002)
• [文献書誌] 小林慎治, 菊池宏, 滝沢國治: "ポッケルス効果と逆圧電効果を利用した縦型光変調素子の設計"電子情報通信学会論文誌C. J86-C, No.1. 83-85 (2003)
• [文献書誌] Kuniharu Takizawa: "Analysis of electro-optic crystal-based Fabry-Perot etalons for high-speed spatial light modulators"Applied Optics. Vol.42, No.6. (2003)