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[文献書誌] D.GALAYKO, A KAISER, L.BUCHAILLOT, B.LEGRAND, D.COLLARD, C.COMBI: "Design, realisation and test of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction"Journal of Micromechanics and Microengineering. Vol.13. 134-140 (2003)
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[文献書誌] V.AGACHE, P.BIGOTTE, B.LEGRAND, V.SENEZ, L.BUCHAILLOT, D.COLLARD: "Pseudo-Two-Dimensional Analytical Modeling of Oxidation Sharpening Effect of Silicon Pedestals"Appl.Phys.Let. (In press).
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[文献書誌] O.MILLET, P.BERNARDONI, S.REGNIER, P.BIDAUD, E.TSITSIRIS, D.COLLARD, L.BUCHAILLOT: "Electrostatic Actuated Micro Gripper Using An Amplification Mechanism"Sensors and Actuators. (In press).
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[文献書誌] D.GALAYKO, A.KAISER, L.BUCHAILLOT, D.COLLARD, C.COMBI: "Micro-electro-mechanical variable bandwidth IF frequency filters with tunable electrostatic coupling spring"Proc.IEEE MEMS Conference, MEMS 2003. (2003)
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[文献書誌] K.KAKUSHIMA, H.FUJITA: "Micromachined Tools for Fabrication and Characterization in Nano Region"US-Japan Workshop on "Frontiers of Nanoscale Science and Technology. 86-87 (2003)
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[文献書誌] Y.CHO, T.KUKI, Y.FUKUTA, H.FUJITA, B.J.KIM: "Si-based micro probe card with sharp knife-edged tips combined metal deposition"Proc.of the 12^<th> Int.Conference on Solid-State Sensors, Actuators and Microsystems(Transducer'03), June 8-12, Boston, USA. 2E94P. 774-777 (2003)