中空光導波路における巨大可変特性発現とその光ネットワークデバイスへの展開

2008 年度 研究成果報告書

• 研究課題/領域番号: 17068006
• 研究種目: 特定領域研究
• 配分区分: 補助金
• 審査区分: 理工系
• 研究機関: 東京工業大学
• 研究代表者: 小山 二三夫 東京工業大学, 精密工学研究所, 教授 (30178397)
• 研究分担者: 坂口 孝浩 東京工業大学, 精密工学研究所, 助教 (70215622) ; 松谷 晃宏 東京工業大学, 技術部, 技術専門員 (40397047)
• 研究期間 (年度): 2005 – 2008
• キーワード: 光通信 / マイクロマシン / 光デバイス / 光信号処理

研究概要

本研究では, 高反射率の反射鏡により光を空気あるいは真空中に閉じこめる中空光導波路とマイクロマシン構造を融合して, 巨大な伝搬定数の変化を可能とする可変中空光導波路とその光回路への応用を目指して研究を進めた. 10%に及ぶ巨大な伝搬定数変化や温度無依存動作などの特性を実証するとともに, 低損失3次元中空導波路の実現や, 可変分散補償器, 波長可変レーザ, 波長可変フィルらなどのデバイス応用を実証した.

研究成果

• [雑誌論文] Wide tunability and ultralarge birefringence with 3D hollow waveguide Bragg reflector (2009)
  • 著者名/発表者名: M. Kumar, T. Sakaguchi and F. Koyama
  • 雑誌名: Optics Lett. vol.34, no.8 ページ: 1252-1254
  • 査読あり
• [雑誌論文] Novel Waveguide Optical Switch Using Slow light (2009)
  • 著者名/発表者名: A. Fuchida and F. Koyama
  • 雑誌名: Trans. IEICE Vol.J92-C, no.3 ページ: 69-74
  • 査読あり
• [雑誌論文] Giant birefriengence and tunable differential group delay in Bragg reflector based on tapered three-dimensional hollow waveguide (2009)
  • 著者名/発表者名: M. Kumar, T. Sakaguchi and F. Koyama
  • 雑誌名: Appl. Phys. Lett. vol.94 ページ: 061112
  • 査読あり
• [雑誌論文] New Functions of VCSEL-based Optical Devices (invited paper) (2008)
  • 著者名/発表者名: F. Koyama
  • 雑誌名: Chinese Optics Letters vol.6, no.10
  • 査読あり
• [雑誌論文] Modeling and experiment on tapered hollow waveguide multiplexer for multiwavelength VCSEL array (2008)
  • 著者名/発表者名: A. Imamura and F. Koyama
  • 雑誌名: IEICE Electronics Express vol.5, no.12 ページ: 451-456
  • 査読あり
• [雑誌論文] Beam steering and tilt coupling in tunable hollow waveguide (2008)
  • 著者名/発表者名: A. Imamura, N. Kitabayashi and F. Koyama
  • 雑誌名: IEICE Electronics Express vol.5, no.11 ページ: 405-410
  • 査読あり
• [雑誌論文] Polarization-insensetive and low-loss 3D nanostep hollow waveguide for widely tunable photonic devices (2008)
  • 著者名/発表者名: M. Kumar, T. Sakaguchi and F. Koyama
  • 雑誌名: Journal of Lightwave Technology vol.26, no.11 ページ: 1417-1422
  • 査読あり
• [雑誌論文] Generation of Solid-Source H2O Plasma and Its Application to Dry Etching of CaF2 (2008)
  • 著者名/発表者名: A. Matsutani, H. Ohtsuki and F. Koyama
  • 雑誌名: Jpn. J. Appl. Phys. Vol. 47, no. 6 ページ: 5113-5115
  • 査読あり
• [雑誌論文] Tunable three-dimensional nanostep hollow optical waveguide with low polarization dependence (2008)
  • 著者名/発表者名: M. Kumar, T. Sakaguchi and F. Koyama
  • 雑誌名: Applied Physics Express vol.1 ページ: 052002
  • 査読あり
• [雑誌論文] Investigation and theoretical analysis of low-loss 3Dhollow waveguides for widely tunable photonic devices (2008)
  • 著者名/発表者名: M. Kumar and F. Koyama
  • 雑誌名: Jpn. J. Appl. Phys. vol.47, no.5 ページ: 3471-3475
  • 査読あり
• [雑誌論文] Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations (2007)
  • 著者名/発表者名: W. Janto, A. Matsutani and F. Koyama
  • 雑誌名: OPTICAL REVIEW vol. 14, no. 2 ページ: 86-90
  • 査読あり
• [雑誌論文] Recent Advances of VCSEL Photonics (2006)
  • 著者名/発表者名: F. Koyama
  • 雑誌名: Jounal of Ligtwave Technology vol.24, no.12 ページ: 4502-4513
  • 査読あり
• [雑誌論文] Solid Source Dry Etching Process for GaAs and InP (2006)
  • 著者名/発表者名: A. Matsutani, Hideo Ohtsuki and F. Koyama
  • 雑誌名: Jpn. J. Appl. Phys. vol. 45, no. 10B ページ: 8374-8377
  • 査読あり
• [雑誌論文] Design and Fabrication of Multi-Mode Interference Hollow Waveguide Optical Switch with Variable Air Core (2006)
  • 著者名/発表者名: C-H. Bae and F. Koyama
  • 雑誌名: Jpn. J. Appl. Phys vol.45, no. 8B ページ: 6648-6653
  • 査読あり
• [雑誌論文] Tunable stop-band hollow waveguide Bragg reflector with tapered air-core for adaptive dispersion-compensation (2006)
  • 著者名/発表者名: Y. Sakurai, A. Matsutani and F. Koyama
  • 雑誌名: Appl. Phys. Lett. vol.88, no. 12 ページ: 121103
  • 査読あり
• [雑誌論文] Tunable Planar Air-Core Resonator Based on Tunable Hollow Waveguide (2006)
  • 著者名/発表者名: Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
  • 雑誌名: Jpn. J. Appl. Phys vol.45, no. 11
  • 査読あり
• [雑誌論文] Giant Bragg wavelength tuning of tunable hollow waveguide Bragg reflector (2005)
  • 著者名/発表者名: Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
  • 雑誌名: Jpn. J. Appl. Phys. vol. 44, no. 37 ページ: L1171-L1173
  • 査読あり
• [雑誌論文] Tunable Hollow Optical Waveguide and Their Applications for Photonic Integrated Circuis (invited paper) (2005)
  • 著者名/発表者名: F. Koyama, T. Miura and Y. Sakurai
  • 雑誌名: IEICE of Japan Vol.J88-C, no. 6 ページ: 388-396-343
  • 査読あり
• [雑誌論文] Iodine Solid Source Inductively Coupled Plasma Etching of InP (2005)
  • 著者名/発表者名: A. Matsutani, H. Ohtsuki and F. Koyama
  • 雑誌名: Jpn. J. Appl. Phys. vol.44, no.19 ページ: L576-L577
  • 査読あり
• [雑誌論文] Fabrication and characterization of hollow waveguide optical switch with variable air core (2005)
  • 著者名/発表者名: C.-H. Bae and F. Koyama
  • 雑誌名: OPTICS EXPRESS vol.13, no.9 ページ: 3259-3263
  • 査読あり
• [学会発表] Adjustable Polarization Mode Dispersion Compensation using 3D Hollow Waveguide Bragg Reflector (CThB5) (2009)
  • 著者名/発表者名: M. Kumar, T. Sakaguchi, A. Matsutani and F. Koyama
  • 学会等名: Conference on Lasers and Electro-Optics, CLEO/IQEC2009
  • 発表場所: Baltimore, USA
  • 年月日: 2009-06-04
• [学会発表] 2D Confinement and Reduction of Polarization Dependence in Hollow Waveguide with High Index Contrast Grating (JWA44) (2009)
  • 著者名/発表者名: M. Kumar, F. Koyama and C. J. Chang-Hasnain
  • 学会等名: Conference on Lasers and Electro-Optics, CLEO/IQEC2009
  • 発表場所: Baltimore, USA
  • 年月日: 2009-06-03
• [学会発表] Novel 2D High-Contrast Grating Hollow-Core Waveguide (CMQ7) (2009)
  • 著者名/発表者名: B. Pesala, V. Karagodsky, F. Koyama and C. Chang-Hasnain
  • 学会等名: Conference on Lasers and Electro-Optics, CLEO/IQEC2009
  • 発表場所: Baltimore, USA
  • 年月日: 2009-06-02
• [学会発表] A tunable Bragg reflector based on tapered 3D hollow optical waveguide with large birefringence and tunable differential group delay (2009)
  • 著者名/発表者名: M. Kumar and F. Koyama
  • 学会等名: OFC 2009, OWC3
  • 発表場所: San Diego
  • 年月日: 2009-03-11
• [学会発表] Tunable Hollow Optical Waveguide with High Contrast Grating (WN4, pp.523-524) (2008)
  • 著者名/発表者名: M. Kumar, F. Koyama and C. J. C.-Hasnain
  • 学会等名: 21st Annual Meeting of The IEEE Lasers & Electro-Optics Society, LEOS2008
  • 発表場所: Newport Beach, USA
  • 年月日: 2008-11-05
• [学会発表] Dry Etching of Si by XeF2 Plasma and Investigation of Emission Intensities from Xe and F in XeF2 Plasma (29D-9-58) (2008)
  • 著者名/発表者名: A. Matsutanil, H. Ohtsuki and F. Koyama
  • 学会等名: 1st International Microprocessees and Nanotechnology Conference, MNC2008
  • 発表場所: Fukuoka, Japan
  • 年月日: 2008-09-29
• [学会発表] Widely Tunable Mirror Based on 3-D Hollow Waveguide for Tunable Photonic Integrated Circuits (CMG5) (2008)
  • 著者名/発表者名: M. Kumar, T. Sakaguchi, and F. Koyama
  • 学会等名: Conference on Lasers and Electro-Optics, CLEO
  • 発表場所: San Jose, USA
  • 年月日: 2008-05-11
• [学会発表] Nanofabrication of Sub-Wavelength Grating Using Ultra-Fine Nano-Machining Process (JTuA34) (2008)
  • 著者名/発表者名: J. Nakajima and F. Koyama
  • 学会等名: Conference on Lasers and Electro-Optics, CLEO
  • 発表場所: San Jose, USA
  • 年月日: 2008-05-10
• [学会発表] Dry Etching of CaF_2by Solid Source H_2O(ice) Plasma (6A-4-94, pp. 248-249) (2007)
  • 著者名/発表者名: A. Matsutani, H. Ohtsuki and F. Koyama
  • 学会等名: 20th International Microprocesses and Nanotechnology Conference
  • 発表場所: Kyoto, Japan
  • 年月日: 2007-11-15
• [学会発表] Design and Fabrication of 3D Nanostep Ho1low Waveguide for Widely Tunable Photonic Devices (C7, pp. 62-63) (2007)
  • 著者名/発表者名: M. Kumar and F. Koyama
  • 学会等名: 13th Microoptics Conference, MOC '07
  • 発表場所: Kagawa, Japan
  • 年月日: 2007-10-28
• [学会発表] VCSEL Photonics -Athermalization and Slowing Down- (SC2.S5.1, pp.275-277) (2007)
  • 著者名/発表者名: F. Koyama
  • 学会等名: Asia Optical Fiber Communication & Optoelectronics Exposition & Conference, AOE 2007
  • 発表場所: Shanghai, China
  • 年月日: 2007-10-25
• [学会発表] Giant Tuning Characteristics of Tapered Tunable Hollow Waveguide Bragg Reflector (ThK3, pp.769-770) (2007)
  • 著者名/発表者名: T. Takeishi and F. Koyama
  • 学会等名: 20th Annual Meeting of The IEEE Laser and Electro-Optical Society, LEOS2007
  • 発表場所: Florida, USA
  • 年月日: 2007-10-10
• [学会発表] Decreasing of Residual Oxygen by using Si Solid Source in Cl2-ICP Etching of Al (30P-118) (2007)
  • 著者名/発表者名: A. Matsutani, H. Ohtsuki and F. Koyama
  • 学会等名: 18th International Symposium on Plasma Chemistry, ISPC18
  • 発表場所: Kyoto, Japan
  • 年月日: 2007-09-30
• [学会発表] New Functions and Challenges of VCSEL-related Photonic Devices (2007)
  • 著者名/発表者名: F. Koyama
  • 学会等名: International Nano-Optoelectronic Workshop, INOW 2007
  • 発表場所: Beijin and Lanzhou, China
  • 年月日: 2007-08-06
• [学会発表] Polarization-insensitive and Low-loss Tunable 3D Nanostep Hollow Waveguide for Widely Tunable Photonic Devices (P39, pp.188-189) (2007)
  • 著者名/発表者名: M. Kumar and F. Koyama
  • 学会等名: International Nano-Optoelectronic Workshop, INOW 2007
  • 発表場所: Beijin and Lanzhou, China
  • 年月日: 2007-08-05
• [学会発表] Nanoimprint and nano-machinning process for tunable hollow wavegiude devices (TuB4.5, pp.123-124) (2007)
  • 著者名/発表者名: T. Takeishi, S. Suda and F. Koyama
  • 学会等名: IEEE LEOS Summer Topicals
  • 発表場所: Oregon, USA
  • 年月日: 2007-07-20
• [学会発表] Analysis of Large Kink Mechanism in I-L Chracteristics of Tunnel Injection Lasers (13D1-5, pp. 654-655) (2007)
  • 著者名/発表者名: H. Nakajima, T. Miyamoto, T. Iwasaki, Y. Higa and F. Koyama
  • 学会等名: OECC/IOOC2007
  • 発表場所: Yokohama, Japan
  • 年月日: 2007-07-13
• [学会発表] Polarization Insensitive and Low-loss Tunable 3D Hollow Waveguide for Tunable Photonic Devices (13E1-3, pp. 64-685) (2007)
  • 著者名/発表者名: M. Kumar and F. Koyama
  • 学会等名: OECC/IOOC2007
  • 発表場所: Yokohama, Japan
  • 年月日: 2007-07-13
• [学会発表] Beam steering and coupling in tunable hollow waveguide with narrow air core (13E2-3, pp. 694-695) (2007)
  • 著者名/発表者名: A. Imamura and F. Koyama
  • 学会等名: OECC/IOOC2007
  • 発表場所: Yokohama, Japan
  • 年月日: 2007-07-13
• [学会発表] Fabrication and characterization of tunable chromatic dispersion compensator based on hollow waveguide (12E3-3, pp. 442-443) (2007)
  • 著者名/発表者名: T. Takeishi, T. Sakaguchi and F. Koyama
  • 学会等名: OECC/IOOC2007
  • 発表場所: Yokohama, Japan
  • 年月日: 2007-07-12
• [学会発表] Modeling of 3D Curved Hollow Waveguide for Widely Tunable Photonic Devices (F-3, pp.61-62) (2007)
  • 著者名/発表者名: M. Kumar and F. Koyama
  • 学会等名: International Symposium Contemporary Photonics Technology, CPT 2007
  • 発表場所: Tokyo
  • 年月日: 2007-01-15
• [学会発表] Athermal GaInAsP/InP Semiconductor Laser Using Hollow Waveguide Distributed Bragg Reflector (A-2, pp.38-39) (2006)
  • 著者名/発表者名: H. Yamakawa and F. Koyama
  • 学会等名: 12th Microoptics Conference, MOC
  • 発表場所: Seoul, Korea
  • 年月日: 2006-09-15
• [学会発表] VCSEL Integration for Silicon Photonics (ThB4, pp.194-196) (2006)
  • 著者名/発表者名: F. Koyama
  • 学会等名: 2006 3rd IEEE International Conference, IV Photonics
  • 発表場所: Ottawa, Canada
  • 年月日: 2006-09-05
• [学会発表] Tunable Laser with Hollow Waveguide Distributed Bragg Reflector (6C2-2-1) (2006)
  • 著者名/発表者名: H. Yamakawa, T. Serizawa, Y. Sakurai and F. Koyama
  • 学会等名: The 11th Opticalelectoronics and Communications Conference, OECC 2006
  • 発表場所: Kaohsiung, Taiwan
  • 年月日: 2006-07-20
• [学会発表] Hollow Waveguide Distributed Bragg Reflector for Widely Tunable Optical Devices (OtuM4) (2006)
  • 著者名/発表者名: Y. Sakurai, H. Yamakawa, Y. Yokota, A. Matsutani, T. Sakaguchi and F. Koyama
  • 学会等名: Optical Fiber Communications Conference 2006
  • 発表場所: Anaheim, USA
  • 年月日: 2006-03-12
• [学会発表] Solid Source Dry Etching Process for III-V Compound Semiconductors (P-2A-42) (2006)
  • 著者名/発表者名: A. Matsutani, H. Ohtsuki and F. Koyama
  • 学会等名: 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing, ICRP-6/SPP-23
  • 発表場所: Sendai, Japan
  • 年月日: 2006-01-25
• [学会発表] New Functions and Emerging Technologies for VCSEL-related Device (2005)
  • 著者名/発表者名: F. Koyama
  • 学会等名: International Symposium on Asia-Pacific Optical Communications 2005, APOC2005
  • 発表場所: Shanghai, P.R.China
  • 年月日: 2005-11-30
• [学会発表] Proposal of tunable demultiplexer based on tapered hollow waveguide with highly reflective multilayer mirrors (TuL3, pp.272-273) (2005)
  • 著者名/発表者名: T. Miura, Y.Yokota and F. Koyama
  • 学会等名: The 18th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2005
  • 発表場所: Sydeny, Australia
  • 年月日: 2005-11-11
• [学会発表] Air-core Resonator with Widely Tunable Hollow Waveguide Bragg Reflectors (2005)
  • 著者名/発表者名: Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
  • 学会等名: 31st European Conference on Optical Communication, ECOC2005
  • 発表場所: Glasgow, UK
  • 年月日: 2005-10-12
• [学会発表] Widely Tunabble Micromachined Optical Devicesfor Future Photonic Integrated Circuits (pp.24) (2005)
  • 著者名/発表者名: F. Koyama
  • 学会等名: FIS Cobference on future integrated, FIS Cobference on future integrated, Cambridge
  • 発表場所: Cambridge, UK
  • 年月日: 2005-09-12
• [学会発表] Fabrication and Characterization of Hollow Waveguide Optical Switch with Variable Air Core (7E2-5, pp.452-453) (2005)
  • 著者名/発表者名: C.-H. Bae and F. Koyama
  • 学会等名: The 10th Optoelectronics and Communications Conference, OECC2005
  • 発表場所: Seoul, Korea
  • 年月日: 2005-07-11
• [学会発表] Tunable Stop-Band Hollow Waveguide Bragge Reflector with Tapered Air-Core for Adaptive Dispersion-Compensation (Postdeadline Paper, CPDA6, CLEO2005, CMP5) (2005)
  • 著者名/発表者名: Y. Sakurai, A. Matsutani and F. Koyama
  • 学会等名: Conference on Lasers and Electro-Optics
  • 発表場所: Baltimore, USA
  • 年月日: 2005-05-11
• [学会発表] 160nm Continuous Wavelength Tuning of Tunable Hollow Waveguide Bragg Reflector (Postdeadline Paper, CPDA6, CLEO2005, CPDA6) (2005)
  • 著者名/発表者名: Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
  • 学会等名: Conference on Lasers and Electro-Optics
  • 発表場所: Baltimore, USA
  • 年月日: 2005-05-09