現在までの達成度 (区分) |
現在までの達成度 (区分)
1: 当初の計画以上に進展している
理由
Our laboratory has around 30 members and discussions on experimental results are hold frequently (one time per week). Under advices of Prof. Takahito Ono, I performed experiences and achieved a good results. I has published 11 Journal papers in 2017 (1st author:7, co-authors: 4)
|
今後の研究の推進方策 |
My previous works related to MACE have been successfully developed. Ultra-high aspect ratio trenches and pillars of 400 and 80, respectively have been achieved. A commercial AFM (atomic force microscopy) cantilever with high aspect ratio nanopillars on its top surface for moisture detection in electronic products was demonstrated. Ion transport by gating voltage to nanopores produced via MACE was reported. In short-term research proposal, MEMS and other high aspect ratio devices, including micro-supercapacitors, gas sensor, capacitive silicon resonator and micro Knudsen pump, will be investigated by using MACE. For long-term direction and carrier planning, opening a way to the mass production based on MACE for high performance devices and low-cost productions will be targeted.
|