Micro/nano-machining using metal assisted chemical etching for micro/nano systems

2018 年度 実績報告書

• 研究課題/領域番号: 17K14095
• 研究機関: 東北大学
• 研究代表者: グエン・ヴァン トゥアン 東北大学, マイクロシステム融合研究開発センター, 特任助教 (30795117)
• 研究期間 (年度): 2017-04-01 – 2019-03-31
• キーワード: MACE / Nano-pillars / Nanopores

研究実績の概要

This research focuses on metal-assisted chemical etching method for micro/nano device fabrication. Research achievements can be summarized, as following: 1. High aspect ratio silicon structures produced via metal assisted chemical etching and assembly technology for cantilever fabrication. 2. Cantilever with high aspect ratio nano pillars on its surface for moisture detection in electronic products. 3. Ion transportation by gating voltage to nanopores produced via metal assisted chemical etching method. 4. Low cost and high-aspect ratio micro/nano device fabrication by using innovative metal-assisted chemical etching method.

研究成果

• [雑誌論文] Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method (2018)
  • 著者名/発表者名: Van Toan Nguyen、Inomata Naoki、Toda Masaya、Ono Takahito
  • 雑誌名: Nanotechnology 巻: 29 ページ: 195301～195301
  • DOI: 10.1088/1361-6528/aab1d3
  • 査読あり / 国際共著
• [雑誌論文] Logic gates based on electrically driven nanoelectromechanical switches (2018)
  • 著者名/発表者名: Van Toan Nguyen、Zhao Dong、Inomata Naoki、Ono Takahito
  • 雑誌名: IEEJ Transactions on Electrical and Electronic Engineering 巻: 14 ページ: 335～336
  • DOI: 10.1002/tee.22814
  • 査読あり / 国際共著
• [雑誌論文] Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping (2018)
  • 著者名/発表者名: Van Toan Nguyen、Inomata Naoki、Trung Nguyen Huu、Ono Takahito
  • 雑誌名: Journal of Micromechanics and Microengineering 巻: 28 ページ: 055001～055001
  • DOI: https://doi.org/10.1088/1361-6439/aaae26
  • 査読あり / 国際共著
• [学会発表] Electrolyte based thermal to electric energy conversion utilising on 10 nm diameter of Al2O3 nanochannles (2019)
  • 著者名/発表者名: Nguyen Van Toan, Megat Muhammad Ikhsan Megat Hasnan, Daiki Udagawa, Naoki Inomata, Masaya Toda, Suhana Mohd Said, Mohd Faizul Mohd Sabri, and Takahito Ono
  • 学会等名: The 32nd IEEE international conference on Micro Electro Mechanical Systems
  • 国際学会
• [学会発表] Metal-assisted chemical etching method subjected to Micro/Nano device fabrication (2019)
  • 著者名/発表者名: Nguyen Van Toan, Xiaoyue Wang, Naoki Inomata, Masaya Toda, Ioana Voiculescu and Takahito Ono
  • 学会等名: The 20th International conference on solid-state sensors, actuators and microsystems
  • 国際学会
• [学会発表] Nanoelectromechanical logical gates utilising selective tungsten chemical vapor deposition (2019)
  • 著者名/発表者名: Nguyen Van Toan, Dong Zhao, Naoki Inomata, Masaya Toda, Yunheub Song, and Takahito Ono
  • 学会等名: The 20th International conference on solid-state sensors, actuators and microsystems
  • 国際学会
• [学会発表] Capacitive silicon nanomechanical resonators capable of selective vibration of high-order mode (2018)
  • 著者名/発表者名: Nguyen Van Toan, Tsuyoshi Shimazaki, Naoki Inomata, Masaya Toda and Takahito Ono
  • 学会等名: Asia-Pacific Conference of Transducers and Micro-Nano Technology
  • 国際学会
• [図書] Advances in Glass Science and Technology (2018)
  • 著者名/発表者名: Nguyen Van Toan, Naoki Inomata, Masaya Toda and Takahito Ono
  • 総ページ数: 22
  • 出版者: Intechopen
  • ISBN: 978-1-78923-177-9