| 研究実績の概要 |
In this year, the development of metamaterial with double layer metallic split ring resonators by a film device was optimized with photo-lithography technique, including the metallic pattern design, film thickness and release process conditions. The film release procedure was checked with several temperature conditions and optimized to a range around 45 degC. Finally, uniform films with size of 30 mm by 30 mm were obtained. The yield of the double layer metallic patterns is close to 100%, so as well the yield of the film devices. The developed devices were measured by THz TDS (THz time domain spectroscopy) to characterize the spectra performance, which well matched with the simulation results. During the optimization on the device process and design, several extreme THz wave phase manipulation devices with double layer metallic pattern by the developed film metamaterial technique were studied and obtained. The effects were addressed to the multiple resonance modes that the metamaterial designs provide. By controlling the coupling of the resonance modes, extreme phase manipulation on THz wave was obtained.
|
