面発光レーザフォトニクスの新展開

2009 年度 研究成果報告書

• 研究課題/領域番号: 19206012
• 研究種目: 基盤研究(A)
• 配分区分: 補助金
• 応募区分: 一般
• 研究分野: 応用光学・量子光工学
• 研究機関: 東京工業大学
• 研究代表者: 小山 二三夫 東京工業大学, 精密工学研究所, 教授 (30178397)
• 研究分担者: 坂口 孝浩 東京工業大学, 精密工学研究所, 助教 (70215622) ; 松谷 晃宏 東京工業大学, 技術部, 技術専門員 (40397047)
• 研究期間 (年度): 2007 – 2009
• キーワード: 半導体レーザ / 光通信 / 光集積回路 / 光インターコネクト / マイクロマシン

研究概要

面発光レーザの波長制御技術開拓と面発光レーザ構造を用いた位相制御の光信号処理を柱とし,面発光レーザを基盤とする新しい光デバイス工学を展開することを目的として研究を進め,MEMS構造によるアサーマル面発光レーザとその波長可変動作の実現,テーパ中空導波路による超小型光合波器の実現,面発光レーザ構造による高速光位相シフタの実現,面発光レーザ構造を導波路デバイスに展開するスローライト素子を提案と実証などの成果を得た.

研究成果

• [雑誌論文] Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings (2010)
  • 著者名/発表者名: Vadim Karagodsky, Bala Pesala, Christopher Chase, Werner Hofmann, Fumio Koyama, Connie J. Chang-Hasnain
  • 雑誌名: OPTICS EXPRESS vol.18,no.2 ページ: 694-699
  • 査読あり
• [雑誌論文] Greatly increased fiber transmission distance with an optically injection-locked vertical-cavity surface-emitting laser (2009)
  • 著者名/発表者名: Xiaoxue Zhao, Bo Zhang, Louis Christen, Devang Parekh, Werner Hofmann, Markus C. Amann, Fumio Koyama, Alan E. Willner, Connie J. Chang-Hasnain
  • 雑誌名: Optics Express vol.17,no.16 ページ: 13785-13791
  • 査読あり
• [雑誌論文] Bragg反射鏡導波炉におけるスローライトを用いた光回路 (2009)
  • 著者名/発表者名: 小山二三夫, 淵田歩
  • 雑誌名: レーザー研究 vol.37,no.8 ページ: 591-595
  • 査読あり
• [雑誌論文] Multiple-Wavelength Vertical-Cavity Surface-Emitting Lasers by Grading a Spacer Layer for Short-Reach Wavelength Division Multiplexing Applications (2009)
  • 著者名/発表者名: Padullaparthi Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
  • 雑誌名: Appl. Phys. Exp. vol.2,no.9 ページ: 092501-1-3
  • 査読あり
• [雑誌論文] Smooth and Vertical Profile Dry Etching of Si Using XeF2 Plasma (2009)
  • 著者名/発表者名: Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
  • 雑誌名: Jpn. J. Appl. Phys vol.48,06FE09 ページ: 1-3
  • 査読あり
• [雑誌論文] Proposal of gain-matched VCSELs with a thermally actuated MEMS structure for wide temperature operations (2009)
  • 著者名/発表者名: Hayato Sano, Fumio Koyama
  • 雑誌名: IEICE Electronics Express vol.6,no.12 ページ: 883-888
  • 査読あり
• [雑誌論文] VCSEL Photonics-advances and new challenges- (2009)
  • 著者名/発表者名: Fumio Koyama
  • 雑誌名: IEICE Electronics Express vol.6,no.11 ページ: 651-672
  • 査読あり
• [雑誌論文] Athermal 850nm Vertical Cavity Surface Emitting Lasers with Thermally Actuated Cantilever Structure (2009)
  • 著者名/発表者名: Hayato Sano, Akihiro Matsutani, Fumio Koyama
  • 雑誌名: Appl. Phys. Exp. vol.2 ページ: 07210-1-3
  • 査読あり
• [雑誌論文] Novel Waveguide Optical Switch Using Slow light (2009)
  • 著者名/発表者名: Ayumi Fuchida, Fumio Koyama
  • 雑誌名: Trans. IEICE vol.J92-C,no.3 ページ: 69-74
  • 査読あり
• [雑誌論文] New function of VCSEL-based optical devices (2008)
  • 著者名/発表者名: F. Koyama
  • 雑誌名: Chinese Opt. Lett. vol.6,no.10
  • 査読あり
• [雑誌論文] Tunable optical equalizer using diffraction grating filters (2008)
  • 著者名/発表者名: Xiaoxue Zhao, Koich Hasebe, Takahiro Sakaguchi, Fumio Koyama, Connie J. Chang-Hasnain, Nobuhiko Nishiyama, Catherine Canueau, Chung-En Zah
  • 雑誌名: IEEE Photon. Technol. Lett vol.20,no.18 ページ: 1590
  • 査読あり
• [雑誌論文] Modeling and experiment on tapered hollow waveguide multiplexer for multiwavelength VCSEL array (2008)
  • 著者名/発表者名: Akihiro Imamura, Fumio Koyama
  • 雑誌名: IEICE Electronics Express vol.5,no.12 ページ: 451-456
  • 査読あり
• [雑誌論文] Beam steering and tilt coupling in tunable hollow waveguide (2008)
  • 著者名/発表者名: Akihiro Imamura, Naoto Kitabayashi, Fumio Koyama
  • 雑誌名: IEICE Electronics Express vol.5,no.11 ページ: 405-410
  • 査読あり
• [雑誌論文] Generation of solid-source H2O plasma and its application to dry etching of CaF2 (2008)
  • 著者名/発表者名: Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
  • 雑誌名: Jpn. J. Appl. Phys. Vol.47,no.6 ページ: 5113-5115
  • 査読あり
• [雑誌論文] Proposal of total-internal-reflection optical switch with slowing light in Bragg reflector waveguide (2008)
  • 著者名/発表者名: Ayumi Fuchida, Fumio Koyama
  • 雑誌名: IEICE Electronics Express vol.5,no.9 ページ: 349-353
  • 査読あり
• [雑誌論文] Characterization of H2O-inductively coupled plasma for dry etching (2008)
  • 著者名/発表者名: Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
  • 雑誌名: J. Phys. ページ: 1-4
  • 査読あり
• [雑誌論文] High speed response of nonlinear optical phase-shifter based on vertical micro-cavity saturable absorber (2008)
  • 著者名/発表者名: Satoshi Suda, Fumio Koyama, Nobuhiko Nishiyama, Catherine Caneau, Chung-En Zah
  • 雑誌名: IEICE Electronics Express vol.5,no.4 ページ: 131-135
  • 査読あり
• [雑誌論文] Polarization control of 0. 85μm vertical-cavity surface-emitting lasers integrated with gold nanorod arrays (2007)
  • 著者名/発表者名: Padullaparthi Babu Dayal, Fumio Koyama
  • 雑誌名: Appl. Phys. Lett. vol.91 ページ: 111107
  • 査読あり
• [雑誌論文] Polarization control of 1. 15μm vertical-cavity surface-emitting lasers using autocloned photonic crystal polarizer (2007)
  • 著者名/発表者名: Padullaparthi Babu Dayal, Naoto Kitabayashi, Tomoyuki Miyamoto, Fumio Koyama
  • 雑誌名: Appl. Phys. Lett. vol.91 ページ: 0411110
  • 査読あり
• [学会発表] Wavelength Control of VCSELs (2009)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: The XV International Workshop on the Physics of Semiconductor Devices, IWPSD 2009
  • 発表場所: New Delhi, India
  • 年月日: 2009-12-21
• [学会発表] Advances of VCSEL-related Photonic Devices (2009)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: 12th International Symposium on Microwave and Optical Technology, ISMOT 2009
  • 発表場所: New Delhi, India
  • 年月日: 2009-12-20
• [学会発表] Proposal of Gain-matched VCSELs with a Thermally Actuated Cantilever Structure for Ultra-wide Temperature Operations (2009)
  • 著者名/発表者名: Hayato Sano, Fumio Koyama
  • 学会等名: 15th Microoptics Conference, MOC2009
  • 発表場所: Tokyo, Japan
  • 年月日: 2009-10-30
• [学会発表] Multi-Wavelength VCSEL Array based on High Contrast Sub-Wavelength Grating (2009)
  • 著者名/発表者名: Akihiro Imamura, Vadim Karagodsky, Bala Pesala, Fumio Koyama, Connie J. Chang-Hasnain
  • 学会等名: The 22nd Annual Meeting of the IEEE Photonics Society
  • 発表場所: Turkey, ThX5
  • 年月日: 2009-10-28
• [学会発表] Advances of Surface Emitting Lasers (2009)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: International Symposium of Advanced Photonic Electronics, JSPS2009
  • 発表場所: Tokyo, Japan
  • 年月日: 2009-10-12
• [学会発表] Athermal and Tunable Operations of 850nm VCSEL with Thermally Actuated Cantilever Structure (2009)
  • 著者名/発表者名: Hayato Sano, Akihiro Matsutani, Fumio Koyama
  • 学会等名: 35th European Conference and Exhibition on Optical Communication, ECOC2009
  • 発表場所: Vienna, Austria
  • 年月日: 2009-09-10
• [学会発表] VCSEL Photonics-Tuning, Athermalization and Slowing-down- (2009)
  • 著者名/発表者名: Fumio Koyama, Hayato Sano
  • 学会等名: CLEO/Pacific Rim 2009, CLEO-PR
  • 発表場所: Shanghai, China
  • 年月日: 2009-08-28
• [学会発表] Manipulation of Light in VCSELs and Hollow Waveguides (2009)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: 2009 International Nano-Optoelectronics Workshop, iNOW2009
  • 発表場所: Stockholm, Sweden
  • 年月日: 2009-08-05
• [学会発表] Wavelength control of MEMS VCSELs (2009)
  • 著者名/発表者名: Fumio Koyama, Hayato Sano
  • 学会等名: Opto-Electronics and Communications Conference 2009, OECC2009
  • 発表場所: Hong Kong, China
  • 年月日: 2009-07-12
• [学会発表] New Functions of VCSEL-related Photonic Devices (2009)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: nternational Conference on Materials for Advanced Technologies, ICMAT2009
  • 発表場所: Singapore
  • 年月日: 2009-06-30
• [学会発表] High-Speed Optical Modulation based on Frequency-Modulated VCSELs and Optical Filters (2009)
  • 著者名/発表者名: Koichi Hasebe, Yusuke Mada, Takeru Sakairi, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
  • 学会等名: 2009 International Conference on Indium Phosphide and Related Materials, IPRM2009
  • 発表場所: Newport Beach, USA
  • 年月日: 2009-05-16
• [学会発表] Multiple-Wavelength GaInAs/GaAs VCSELs with Grading a Spacer Layer for Short Reach WDM Applications (2009)
  • 著者名/発表者名: P. Babu Dayal, Akihiro Imamura, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
  • 学会等名: 2009 International Conference on Indium Phosphide and Related Materials, IPRM2009
  • 発表場所: Newport Beach, USA
  • 年月日: 2009-05-15
• [学会発表] Tunable optical equalizer based on 1. 55μm VCSEL for modulation bandwidth enchancement (2008)
  • 著者名/発表者名: Satoshi Suda, Xiaxue Xhao, Fumio Koyama, Connie J. Chang-Hasnain, Nobuhiko Nishiyama, Chung-En Zah
  • 学会等名: 21st IEEE International Semiconductor Laser Conference, ISLC2008
  • 発表場所: Sorrento, Italy
  • 年月日: 20080914-20080918
• [学会発表] Miniature optical gate with VCSEL-based slow light bragg reflector waveguide (2008)
  • 著者名/発表者名: Keisuke Kuroki, Ayumi Fuchida, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
  • 学会等名: 21st IEEE International Semiconductor Laser Conference, ISLC2008
  • 発表場所: Sorrento, Italy
  • 年月日: 20080914-20080918
• [学会発表] Tuning and slowing light in Bragg reflector waveguides (2008)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: iNOW2008
  • 発表場所: Shonan, Japan
  • 年月日: 20080807-20080809
• [学会発表] Recent advances of VCSEL photonics (2008)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: The 2008 Spring Meeting of the German Physical Society
  • 発表場所: Berlin, Germany
  • 年月日: 20080225-20080229
• [学会発表] Low Polarization Dependence of Bragg Reflector Slow Light Waveguides (2008)
  • 著者名/発表者名: Ayumi Fuchida, P. Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
  • 学会等名: 21st Annual Meeting of The IEEE Lasers & Electro-Optics Society, LEOS2008
  • 発表場所: Newport Beach, USA
  • 年月日: 2008-11-12
• [学会発表] Multiple-wavelength VCSEL arrays using surface nano-machining process for WDM applications (2008)
  • 著者名/発表者名: P. Babu Dayal, Jun Nakajima, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
  • 学会等名: 21st Annual Meeting of The IEEE Lasers & Electro-Optics Society, LEOS2008
  • 発表場所: Newport Beach, USA
  • 年月日: 2008-11-11
• [学会発表] VCSELs: their 30 years history and new challenges (2008)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: Asia Pacific Optical Communications, APOC2008
  • 発表場所: Hangzhou, China
  • 年月日: 2008-10-28
• [学会発表] Recent advances of VCSEL photonics (2008)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: MBE2008
  • 発表場所: Hsinchu, Taiwan
  • 年月日: 2008-06-06
• [学会発表] Nano-aperture plasmonic VCSELs (2008)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: 20th Indium Phosphide and Related Materials Conference, IPRM2008
  • 発表場所: Versailles, FRANCE
  • 年月日: 2008-05-27
• [学会発表] Data Inversion and Adjustable Chirp in 10-Gbps Directly-Modulated Injection-Locked 1. 55-μm VCSELs (2008)
  • 著者名/発表者名: Xiaoxue Zhao, Bo Zhang, Louis Christen, Devang Parekh, Fumio Koyama, Werner Hofmann, Markus C. Amann, Alan E. Willner, Connie J. Chang-Hasnain
  • 学会等名: Conference on Lasers and Electro-Optics, CLEO
  • 発表場所: San Jose, USA
  • 年月日: 2008-05-25
• [学会発表] Slow Light Total-Internal-Reflection Optical Switch with 90-Degree Bend (2008)
  • 著者名/発表者名: Ayumi Fuchida, Fumio Koyama
  • 学会等名: Conference on Lasers and Electro-Optics, CLEO
  • 発表場所: San Jose, USA
  • 年月日: 2008-05-07
• [学会発表] Total-Internal-Reflection Optical Switch with Slowing Light in Bragg Reflector Waveguide (2007)
  • 著者名/発表者名: Ayumi Fuchida, Fumio Koyama
  • 学会等名: 20th Annual Meeting of the IEEE Laser and Electro-Optical Society, LEOS2007
  • 発表場所: Florida, USA
  • 年月日: 20071022-20071025
• [学会発表] Slowing Light in Bragg Reflector Waveguide with Tilt Coupling Scheme (2007)
  • 著者名/発表者名: Go Hirano, Fumio Koyama
  • 学会等名: 20th Annual Meeting of the IEEE Laser and Electro-Optical Society, LEOS2007
  • 発表場所: Florida, USA
  • 年月日: 20071022-20071025
• [学会発表] VCSEL Photonics- Athermalization and Slowing Down- (2007)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: Asia Optical Fiber Communication & Optoelectronics Exposition & Conference, AOE 2007
  • 発表場所: Shanghai, China
  • 年月日: 20071017-20071019
• [学会発表] Slow Light Waveguide Detector Slowing Loght in Bragg Reflector Waveguide (2007)
  • 著者名/発表者名: Keisuke Kuroki, Go Hirano, Fumio Koyama, Koichi Hasebe, Takahiro Sakaguchi
  • 学会等名: 33rd European Conference and Exhibition on Optical Communication, ECOC07
  • 発表場所: Berlin, Germany
  • 年月日: 20070916-20070921
• [学会発表] Transient Behavior of Nonlinear Optical Compensator Based on Vertical Micro-Cavity Saturable Absorber (2007)
  • 著者名/発表者名: Satoshi Suda, Fumio Koyama, Nobuhiko Nishiyama, Catherine Caneau, Chung-En Zah
  • 学会等名: 33rd European Conference and Exhibition on Optical Communication, ECOC07
  • 発表場所: Berlin, Germany
  • 年月日: 20070916-20070921
• [学会発表] New Functions and Challenges of VCSEL-related Photonic Devices (2007)
  • 著者名/発表者名: Fumio Koyama
  • 学会等名: International Nano-Optoelectronic Workshop, iNOW2007
  • 発表場所: Beijin and Lanzhou, China
  • 年月日: 20070729-20070811
• [学会発表] Beam steering and coupling in tunable hollow waveguide with narrow air core (2007)
  • 著者名/発表者名: Akihiro Imamura, Fumio Koyama
  • 学会等名: 12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication, OECC/IOOC2007
  • 発表場所: Yokohama, Japan
  • 年月日: 20070709-20070713
• [学会発表] Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array (2007)
  • 著者名/発表者名: Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
  • 学会等名: 12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication, OECC/IOOC2007
  • 発表場所: Yokohama, Japan
  • 年月日: 20070709-20070713
• [学会発表] Recent Advances of VCSEL Technologies (2007)
  • 著者名/発表者名: Fumio Koyama, Tomoyuki Miyamoto
  • 学会等名: International Conference on Indium Phosphide and Related Materials, IPRM2007
  • 発表場所: Matsue, Japan
  • 年月日: 20070514-20070518
• [備考] ホームページ等
  • URL: http://vcsel-www.pi.titech.ac.jp/index-j.html