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2019 年度 実績報告書

Development of rare-earth oxide based optical amplifiers and lasers integrated on Si by using magnetic light-matter interactions

研究課題

研究課題/領域番号 19H02207
研究機関日本電信電話株式会社NTT物性科学基礎研究所

研究代表者

徐 学俊  日本電信電話株式会社NTT物性科学基礎研究所, 量子光物性研究部, 主任研究員 (80593334)

研究分担者 後藤 秀樹  日本電信電話株式会社NTT物性科学基礎研究所, 量子光物性研究部, 主席研究員 (10393795)
俵 毅彦  日本電信電話株式会社NTT物性科学基礎研究所, 量子光物性研究部, 主幹研究員 (40393798)
尾身 博雄  日本電信電話株式会社NTT物性科学基礎研究所, 量子光物性研究部, 主任研究員 (50257218)
澤野 憲太郎  東京都市大学, 理工学部, 教授 (90409376)
稲葉 智宏  日本電信電話株式会社NTT物性科学基礎研究所, 量子光物性研究部, 研究員 (90839119)
研究期間 (年度) 2019-04-01 – 2022-03-31
キーワード希土類イオン / 光増幅器 / レーザー / シリコンフォトニクス / 光導波路 / ナノ共振器
研究実績の概要

High quality single-crystal rare-earth oxide (REO) thin films, including Er2O3 and compound (ErGd)2O3 with different Er compositions, have been successfully grown on silicon-on-insulator (SOI) substrate. Well-resolved Stark-split photoluminescence (PL) emission peaks in the telecommunication band has been observed in all samples. Specifically, (ErGd)2O3 with Er concentration of 3.3X10^21 cm-3 demonstrates a PL lifetime of ~0.81 ms and a lifetime-concentration product as large as 2.67X10^18 s*cm-3, which is on the same order as other Er-incorporated materials shown to have high optical gain.
A ridge-type horizontal slot waveguide, with large power confinement factor within low refractive index REO and simple fabrication process, has been proposed and demonstrated, as a basic waveguide structure for optical amplifiers. For (ErGd)2O3 based waveguides, a large waveguide modal absorption of 88 dB/cm related to Er3+ ions has been achieved, indicating a large potential optical gain. Strong light emission from the waveguides have also been observed, with a radiation-efficiency on the order of 10-4. Although the waveguide propagation loss is still too large to demonstrate net optical gain in current stage, the main loss mechanism has been identified and the problem can be alleviated through dedicated material and device optimization.
These results suggest that the combination of REO thin film and horizontal slot waveguide is a very promising platform for realizing high performance optical amplifiers and lasers for silicon photonic integrated circuits.

現在までの達成度 (区分)
現在までの達成度 (区分)

2: おおむね順調に進展している

理由

The most important techniques towards realization of optical amplifiers and lasers, including gain material growth and waveguide structure fabrication, have been established in the first year of the project. First, high quality single-crystal Er-incorporated REO thin films with large lifetime-concentration product have been successfully grown on SOI substrate. Second, a promising waveguide structure featuring strong optical confinement and simple fabrication process has been demonstrated, showing ultra-high potential optical gain and light emission efficiency of REO thin films embedded in. For the proposed subwavelength dielectric resonator (SWDR) suggested in the proposal application, it is found that the fabrication process is quite complicated. To solve this problem, an alternative SWDR structure based on nanodisk dimer with enhanced magnetic field as well as much simpler fabrication process has been proposed and being subject to device simulation and design. Furthermore, a peer-reviewed journal paper [X. Xu et al, Opt. Express 28(10), 14448 (2020)] has been published based on experimental results mentioned above. Based on these achievement, we therefore think that the project is generally progressing well as planned.

今後の研究の推進方策

The future work in this project will be organized as follows:
(1) The propagation loss of horizontal slot waveguides will be reduced by optimizing the material growth conditions and device geometric parameters. After that, the optical gain will be characterized by pump-probe measurement method. Theoretical analysis, such as rate-equation modeling, will be performed and compared with experimental results to get insights and guidelines for further increasing optical gain.
(2) A simple subwavelength dielectric resonator (i.e., nanodisk dimer) with strong magnetic field enhancement will be designed and fabricated. Several measurements will be performed on the fabricated device structure, to confirm selective excitation and strong Purcell enhancement for magnetic dipole transitions of Er3+ in REO.
(3) High Q-factor optical resonators by using single nanodisk dimer as a building block, will be designed and fabricated. Once the Q-factor is high enough, lasers will be readily achieved through optical pumping. The lasing behavior will be evidenced through several characterizations.
(4) The laser threshold will be reduced through dedicated material and device optimization. Then, Ge quantum dot based light emitting diodes with significantly improved light output will be integrated with the low threshold optically pumped REO lasers in order to realize electrically driven lasers on Si substrate.

  • 研究成果

    (8件)

すべて 2019

すべて 学会発表 (8件) (うち国際学会 5件)

  • [学会発表] Optical absorption and emission of erbium ions in integrated optical waveguides2019

    • 著者名/発表者名
      Xuejun Xu, Viviana Fili, Tomohiro Inaba, Takehiko Tawara, Hiroo Omi, and Hideki Gotoh
    • 学会等名
      International School and Symposium on Nanoscale Transport and Photonics (ISNTT)
    • 国際学会
  • [学会発表] Improvement of the crystallinity of Gd2O3 on by an interface control2019

    • 著者名/発表者名
      Tomohiro Inaba, Xuejun Xu, Takehiko Tawara, Hiroo Omi, Hideki Yamamoto, and Hideki Gotoh
    • 学会等名
      International School and Symposium on Nanoscale Transport and Photonics (ISNTT)
    • 国際学会
  • [学会発表] Horizontal slot waveguides based on epitaxial rare-earth oxide on Si2019

    • 著者名/発表者名
      Xuejun Xu, Viviana Fili, Tomohiro Inaba, Takehiko Tawara, Hiroo Omi, and Hideki Gotoh
    • 学会等名
      International Conference on Solid State Devices and Materials (SSDM)
    • 国際学会
  • [学会発表] Horizontal slot waveguides with strong optical confinement in low refractive index oxide films2019

    • 著者名/発表者名
      Xuejun Xu, Tomohiro Inaba, Takehiko Tawara, Hiroo Omi, and Hideki Gotoh
    • 学会等名
      Optoelectronics and Communications Conference/International Conferences on Photonics in Switching and Computing (OECC/PSC)
    • 国際学会
  • [学会発表] Suppressing interdiffusion of Si in Er-doped CeO2/Si(111) and its impact on the optical property2019

    • 著者名/発表者名
      Tomohiro Inaba, Xuejun Xu, Takehiko Tawara, Hiroo Omi, Hideki Yamamoto, and Hideki Gotoh
    • 学会等名
      Compound Semiconductor Week (CSW)
    • 国際学会
  • [学会発表] Optical Properties of Er-incorporated rare-earth oxide in horizontal slot waveguide2019

    • 著者名/発表者名
      徐学俊、Viviana Fili、稲葉智宏、俵毅彦、尾身博雄、後藤秀樹
    • 学会等名
      応用物理学会秋季学術講演会
  • [学会発表] Si基板上へのSi/Gd2O3ヘテロ構造のMBE成長2019

    • 著者名/発表者名
      Viviana Fili、Wojciech Szuba、徐学俊、稲葉智宏、俵毅彦、尾身博雄、後藤秀樹
    • 学会等名
      応用物理学会秋季学術講演会
  • [学会発表] Si基板上に成長したGd2O3の高品質化における成長初期表面状態の重要性2019

    • 著者名/発表者名
      稲葉智宏、徐学俊、俵毅彦、尾身博雄、山本秀樹、後藤秀樹
    • 学会等名
      応用物理学会秋季学術講演会

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公開日: 2021-01-27  

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