| 研究実績の概要 |
In this proposal, we aim to develop diamond MEMS magnetic sensors with high reliability above 500oC and high magnetic sensitivity. We developed the heterointegration of magnetostrictive material FeGa on diamond MEMS resonators and created the novel transducer physical concept of on-chip self-sensing enhancing actuation for high-temperature magnetic sensing. In addition, we also developed a facile method to fabricate all-diamond MEMS resonators with ultra-high quality factors over 1 million at room temperature.Eventualy, we achieved diamond MEMS transducers with a high-sensitivity larger than 100 Hz/mT from room temperature to 500oC and a low noise level of ~ nT/Hz^1/2 up to 300oC. The minimum fluctuation of the resonance frequency is 1.9ppm at room temperature and 2.3 ppm at 300oC.
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