| 研究課題/領域番号 |
20J22608
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| 研究機関 | 東京大学 |
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研究代表者 |
GUO RULEI 東京大学, 工学系研究科, 特別研究員(DC1)
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| 研究期間 (年度) |
2020-04-24 – 2023-03-31
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| キーワード | TDTR / TBC / Graphene / Wafer bonding |
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| 研究実績の概要 |
1. Thermal boundary conductance (TBC) measurement of wafer bonding. Wafer bonding is an integral part of the fabrication of MEMS, opto-electronics, and heterogeneous wafer stacks. For those applications, the TBC of the interface plays an important role in its performance, reliability, and lifetime. Therefore, it is necessary to investigate the TBC of the wafer-bonding interface.
2. TBC investigation of the graphene-based gas sensor. The graphene-based gas sensor works at high temperature to get humidity robustness. For this application, the TBC between the graphene sensor and the substrate plays an important role in its power consumption. In this work, a novel method is demonstrated to reduce the TBC by the electron-phonon coupling effect.
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| 現在までの達成度 (区分) |
現在までの達成度 (区分)
2: おおむね順調に進展している
理由
The TDTR/FDTR mapping instrument was used to measure the thermal property of several interesting systems in the past year. One is wafer bonding. With the developed mapping system, not only the value of TBC but also the spatial distribution of TBC was obtained, which provides more detailed and stochastic knowledge about thermal transport at the SiC-Si interface. The other one is graphene-based gas sensor. A very small TBC was found between the graphene and its substrate, which will reduce the power consumption of the graphene-based gas sensor. By doing these projects, I also learnt some micro/nano fabrication technology, such as lithgraphe, PVD, dry etching, wet etching and so on. In the future, these methods can also be used to investigate amorphous hydrogels and ordered hydrogels.
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| 今後の研究の推進方策 |
1. Fabrication of ordered hydrogels. In this step, the ways of fabricating ordered hydrogels will be investigated. Recent works have reported novel highly ordered hydrogels by electric field, magnetic field, mechanical force, self-assembly, and freezing casting. Those works mainly focus on mechanical behavior, but the ways they used to align hydrogels can be learned in order to find suitable fabrication methods for our research.
2. Experimental measurement of the thermal conductivity. In this step, the thermal conductivity of the ordered hydrogels will be measured experimentally by the 3ω method, the hot-wire method or other suitable methods.
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