| 研究実績の概要 |
1.The building of the time-domain thermoreflectance (TDTR) thermal property measurement system. Thermal property measurement is essential for understanding the transport and interaction processes of heat carriers and developing novel materials with desired thermal properties. Among the numerous measurement methods, TDTR offers unique advantages, including easy sample preparation, non-contact measurement, wide applicability, specific suitability for ultrathin films, thermal boundary conductance (TBC) measurement, and probing the ultrafast transport process. A TDTR measurement system with controll and data process programm has been developed with some new features, such as multiple objective lenses, wide range of modulation frequency, mapping sample stage, TDTR and TR-MOKE dual detectors.
2.The TBC measurement of wafer bonding. In recent years, thermal management has become increasingly important for large-scale integrated circuits with the rising density of FETs integrated both horizontally and vertically in a limited space (3D ICs). Wafer bonding technology, which connects the device layer to a substrate with high thermal conductivity, holds promise for solving this issue. In that case, the thermal boundary conductance (TBC) of the interface between the two bonded wafers plays a vital role in thermal management performance. In this study, we developed a mapping system to obtain not only the value of TBC but also the spatial distribution of TBC of the Si-SiC sample, providing more detailed and stochastic knowledge about thermal transport at the interface.
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