| 研究実績の概要 |
In this study, a new non-Newtonian sub-aperture polishing process was proposed to enable deterministic polishing of super smooth surfaces in contactless mode. Modelling and simulation were conducted and showed strong correlation between principal stress and removal rate. Experiments and comparisons demonstrated the distinctive performances of the new method with compound slurry (starch and polymer mixed), in obtaining scratch-free surface with optical quality.Scratch free surface is obtained using the new method compared to the generic bonnet polishing. Finally, sub-aperture polishing of a freeform bi-sinusoidal surface was achieved.
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