| 研究実績の概要 |
The main objectives of the project are to integrate novel high-power-figure-of-merit (FoM) piezoelectric nitride films and nonlinearity-operating architecture to create ultra-high performance and environment-friendly micro-energy harvesters (micro-EHs). In this year, the research was achieved as the following:(i) Growing co-doped (Mg,Ta) AlN films;(ii) Tuning the residual stress of the doped AlN films for devices fabrications;(iii) Fabrication and evaluation of the nonlinear energy harvesters exploiting the doped AlN films.
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