| 研究実績の概要 |
Resistance Versus time measurements was performed in a vacuum of 6 mTorr, and oxygen was introduced at a rate of 100 sccm in the chamber. It was noticed that the noise increases as Oxygen are introduced, which can be confirmed by looking at the standard deviation in windows of 10 seconds, as a function of time. A sudden increase in the standard deviation around 250 seconds (equivalent to a pressure of 370 Torr) was noticed. By comparing the time series in a vacuum (6 mTorr) and in an oxygen environment (400 Torr), it becomes clear that the increase in noise is caused by the emergence of random telegraphy signal (RTS), where the resistance randomly oscillates between a state with higher resistance (up-state) and one with lower resistance (down state).
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