| 研究実績の概要 |
We could fabricate wrinkled structures of arbitrary shape starting from nanocrystalline diamond films deposited on glass substrates. This was done using direct femtosecond laser writing and wet etching. With laser writing, patterns were made in the films, and wet etching was carried out to etch the substrate partially. The model for describing the wrinkling patterns is under development.
We found that laser writing can produce nanochannels between the glass substrate and the diamond film. Consequently, we fabricated a nanofluidic device based on our etching technology to demonstrate that the nanochannels can conduct water. The film patterning mechanism was investigated in depth. Our work has been published in the journal Carbon, and a patent application has been filed.
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