| 研究課題/領域番号 |
21K04151
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| 研究機関 | 東京農工大学 |
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研究代表者 |
張 亜 東京農工大学, 工学(系)研究科(研究院), 准教授 (80779637)
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| 研究期間 (年度) |
2021-04-01 – 2024-03-31
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| キーワード | MEMS resonantor / nonlinearity / internal mode coupling / MEMS sensor / terahertz sensor / nonlinear dynamics |
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| 研究実績の概要 |
The objective of this study is to clarify the mode coupling effect in MEMS beam resonators and explore its possible application in high sensitivity terahertz sensing. In the research of this year, we continued investigating the physical origin of the mode coupling effect by measuring the thermally modulated mode coupling strength.
The mode coupling strength is determined by the resonance frequency shift when the coupled high frequency mode is excited simultaneously with the lower mode. As an input heat is applied to the MEMS beam, the MEMS beam is heated up to the buckling condition, which changes the mode coupling strength, as well as the mechanical nonlinearity of the MEMS beam. We have found that the mode coupling strength change has a very similar trend with the mechanical nonlinearity, indicating that these two effects may have the same origin. In addition, we have demonstrated that the mechanical nonlinearity mainly comes from the extended beam length during the mechanical oscillation, and can be controlled by the internal strain in the beam. This has been verified by inputting heat or introducing lattice mismatch in the MEMS beam. These results are very useful for understanding the fundamental physics in MEMS beam resonators, and hence are useful for designing highly sensitive MEMS detectors.
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| 現在までの達成度 (区分) |
現在までの達成度 (区分)
2: おおむね順調に進展している
理由
This research goes very smoothly up to now. We have been very closed to fully clarify the mode coupling effect, and understand the relation between mode coupling effect and nonlinearity in MEMS beam resonators, by performing both experimental and theoretical research. In addition, the method we developed for tunning the mechanical nonlinearity of MEMS resonator has been published on high quality journal, indicating that our theoretical model and experimental result are convincing. These results forms a solid fundamental for design highly sensitive terahertz sensor with the mode coupling effect in MEMS resonators.
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| 今後の研究の推進方策 |
The research plan for this year is as follows.
1. We will first complete the modeling of the mode coupling effect, and compare the theoretical and experimental results, to provide a clear explanation to the mode coupling effect.
2. We will perform thermal sensing measurement by using the mode coupling effect to verify the improved thermal sensitivity.
3. We will actively attend international conference and publish the achievements on high-quality journals.
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| 次年度使用額が生じた理由 |
Owing to the COVID-19, it was difficult to attend the planed international conference. Therefore, the planed international travel expense has not used.
The remain amount will be used for purchasing necessary consumers, and also optical components to speedup the optical detections by using MEMS resonators.
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