| 研究課題/領域番号 |
22K18940
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| 研究機関 | 北陸先端科学技術大学院大学 |
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研究代表者 |
フロランス アントワーヌ 北陸先端科学技術大学院大学, 先端科学技術研究科, 講師 (30628821)
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| 研究期間 (年度) |
2022-06-30 – 2025-03-31
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| キーワード | silicene / exfoliation / h-BN / free-standing / teflon tape |
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| 研究実績の概要 |
The patterning of zirconium diboride thin film by e-beam lithography was investigated by means of various techniques.
These characterizations pointed out that phosphoric acid (H3PO4) is a suitable etchant compared to other usual etchants like HF. However etching
at room temperature was found to be slow and to give rise to overetching below the edges of the photoresist. This investigation demonstrates that good quality silicene can be produced after this process. It gives precious
insights into the dimensions and the aspect ratio of the silicene pieces that can be produced by this proposed electron beam-based lithography method.
The investigations of methods for the exfoliation and the transfer of SOI membranes from tape to tape without causing contamination were also succesfully conducted.
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| 現在までの達成度 (区分) |
現在までの達成度 (区分)
3: やや遅れている
理由
The project did not progress as initially planned, though this will have no consequence on the realization of the project. I had to give priority to the finalization of previous research projects and to job hunting. My contract in my current affiliation will eventually come to an end and the success of the project implies finding a position in a research institution.
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| 今後の研究の推進方策 |
The objective of the next year is to establish the conditions permitting the fabrication of silicene sheets sandwiched between two h-BN sheets.
This includes the implementation of the nitrogen plasma source on the ultra high vacuum system dedicated to the growth of zirconium diboride thin films in order to realize large scale h-BN-encapsulated silicene sheets that can be transfered to tape.
Etching conditions of the silicon membrane of SOI substrates and of the ZrB2 thin films grown on the membranes will also be investigated next year. These two steps are required to chemically exfoliate h-BN-encapsulated silicene sheets grown on ZrB2.
Commercial h-BN sheets on cupper foils will be purchased, and their exfoliation in a vacuum glove box through taping on teflon tape will be attempted.
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| 次年度使用額が生じた理由 |
The money will be used to buy equipments wich are required for the project but were not needed in its very beginning. These equipments include ultra high vacuum parts to be used to fabricate large-scale h-BN-encapsulated silicene sheets on zirconium diboride thin films grown on SOI substrates. SOI substrates and h-BN on Cu foils will also be purchased together with various consumables including chemical etchants.
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