| 研究課題/領域番号 |
25420352
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| 研究機関 | 独立行政法人情報通信研究機構 |
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研究代表者 |
丘 偉 独立行政法人情報通信研究機構, 未来ICT研究所 ナノICT研究室, 研究員 (90535189)
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| 研究期間 (年度) |
2013-04-01 – 2016-03-31
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| キーワード | Superconducting / TiN / Al / CPW / quality factor / dielectri loss |
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| 研究実績の概要 |
We studied the dielectric losses of superconducting microwave resonator by developing aluminum (Al) thin-film coplanar waveguide resonator fabricated by sputtering and thermal evaporation methods. And it only shows limited improvement of the dielectric loss compare to the previously studied NbN resonator. TiN (200) thin-film resonators fabricated on Si substrate with the heated substrate temperature show the quality factor obtained was high as 5.0x10+5 at the temperature of 300 mK.
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| 現在までの達成度 (区分) |
現在までの達成度 (区分)
2: おおむね順調に進展している
理由
Thin-film superconducting CPW resonators have been developed by using both Al- and TiN-based superconducting materials. Al-based resonators were fabricated by both dc-sputtering and thermal evaporation methods and only show limited improvement of dielectric loss compare to NbN-based resonator. TiN (200) thin-film resonator grown on hydrogen-terminated Si substrate show a significant loss improvement from 1x10-3 of NbN-based resonator to 2x10-6 measured at the temperature of 300mK.
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| 今後の研究の推進方策 |
Although the dielectric loss of TiN-based thin-film resonator is very low, it is very difficult to obtain high quality TiN/AlN/TiN Josephson junctions, thus full qubit circuit based on the current available fabrication process of TiN. Future study will be focused on development of trilayer structure process for Josephson junction circuit while maintain the low dielectric loss contribution from base-layer superconducting and substrate materials.
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| 次年度使用額が生じた理由 |
The incurred amount from last fiscal year was due to the cancellation of a scheduled international conference due to the longer than expected visa issue.
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| 次年度使用額の使用計画 |
The incurred amount will be used to cover the extra cost of the international conference in Europe due to the weakness of yen.
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