• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

2013 Fiscal Year Final Research Report

Fundamental studies on the low-cost production of high-density BN films by laser-plasma synchronous vapor deposition methods for the next-generation transparent wide bandgap semiconductor materials

Planned Research

  • PDF
Project AreaCreation of Science of Plasma Nano-Interface Interactions
Project/Area Number 21110011
Research Category

Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionNational Institute for Materials Science

Principal Investigator

KOMATSU Shojiro  独立行政法人物質・材料研究機構, 光・電子材料ユニット, グループリーダー (60183810)

Co-Investigator(Kenkyū-buntansha) KOBAYASHI Kazuaki  物質・材料研究機構, 理論計算ユニット, 主幹研究員 (00354150)
CHIKYO Toyohiro  物質・材料研究機構, ナノエレクトロニクス材料ユニット, ユニット長 (10354333)
Project Period (FY) 2009-07-23 – 2014-03-31
Keywords窒化ホウ素 / 薄膜 / プラズマ / レーザー / 結晶化学 / 自己組織化
Research Abstract

In this study, we utilized the effects caused by the interaction between plasma and nano-interface of materials. We pursued this subject from the stand point of view of materials science. The structural analyses of obtained materials by using x-ray diffraction played an important role, and which led to discoveries of new polytypes of sp3- bonded BN. In order to understand their nature in terms of inorganic chemistry, we newly introduced Komatsu diagram, in which crystallographic indices such as hexagonality, close-packing index, metastable energy, and iconicity are found to be related systematically. As to the growth mechanism of the metastable polytypic forms, we found a consistent relationship between the B-N bond lengths and preferably grown structures. This led us to find the Bond-Strength Initiative Rule in the CVD growth of metastable structures.

  • Research Products

    (22 results)

All 2014 2013 2012 2011 2010 2009

All Journal Article (12 results) (of which Peer Reviewed: 12 results) Presentation (9 results) (of which Invited: 9 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp3-bonded BN films2014

    • Author(s)
      Shojiro Komatsu, Masaharu Shiratani
    • Journal Title

      J. Mater. Res

      Volume: 29 Pages: 485-491

    • Peer Reviewed
  • [Journal Article] Self-organized formation of hierarchically-ordered structures in laser-activated plasma CVD of sp3-bonded BN films2014

    • Author(s)
      Shojiro Komatsu, Masaharu Shiratani
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 53 Pages: 010202(1-6)

    • Peer Reviewed
  • [Journal Article] First-Principles Study of AlBN and related polytypes2013

    • Author(s)
      K.Kobayashi and S.Komatsu
    • Journal Title

      Trans. Mat. Res. Soc. Jpn

      Volume: 38 Pages: 485-492

    • Peer Reviewed
  • [Journal Article] First-Principles Study of 8H-, 10H-, 12H-, and 18H-SiC Polytypes2012

    • Author(s)
      Kazuaki KOBAYASHI and Shojiro KOMATSU
    • Journal Title

      Journal of the Physical Society of Japan

      Volume: 81 Pages: 024714-11,13

    • DOI

      10.1143/JPSJ.81.024714

    • Peer Reviewed
  • [Journal Article] ELECTRON FIELD EMISSION FROM sp3-BONDED BN MICROCONES AS A NONLINEAR COOPERATIVE PHENOMENON2012

    • Author(s)
      Shojiro Komatsu and Masaharu Shiratani
    • Journal Title

      Far East Journal of Dynamical Systems

      Volume: 18 Pages: 33-52

    • Peer Reviewed
  • [Journal Article] First-Principles Study of Various BN, SiC, and AlN polytypes2012

    • Author(s)
      K.Kobayashi and S.Komatsu
    • Journal Title

      Trans. Mat. Res. Soc. Jpn

      Volume: 37 Pages: 583-588

    • Peer Reviewed
  • [Journal Article] New Phases of sp3-bonded Boron Nitride Prepared by Photo-Assisted Plasma Processing Methods : The Fundamentals and Applications to Electronic Devices2011

    • Author(s)
      Shojiro Komatsu, Kazuaki Kobayashi, Takahiro Nagata, and Toyohiro Chikyo
    • Journal Title

      AIP Conf. Proc.

      Volume: 1393 Pages: 31-33

    • DOI

      10.1063/1.3653601

    • Peer Reviewed
  • [Journal Article] Photoinduced Phase Transformations in Boron Nitride : New Polytypic Forms of sp3-Bonded (6H- and 30H-)BN2010

    • Author(s)
      S.Komatsu, K.Kobayashi, Y.Sato, D.Hirano, T.Nakamura, T.Nagata,T.Chikyo, T.Watanabe, T.Takizawa, K.Nakamura, T.Hashimoto
    • Journal Title

      J. Phys. Chem

      Volume: C114 Pages: 13176-13186

    • Peer Reviewed
  • [Journal Article] First-Principles Study of 30H-BN Polytypes2010

    • Author(s)
      Kazuaki Kobayashi and Shojiro Komatsu
    • Journal Title

      Materials Transactions

      Volume: 51 Pages: 1497-1503

    • Peer Reviewed
  • [Journal Article] First-principles study of 6H-AlN under various pressure conditions2010

    • Author(s)
      Kazuaki Kobayashi and Shojiro Komatsu
    • Journal Title

      Journal of Physics : Conference Series

      Volume: 215 Pages: 012111(9)

    • Peer Reviewed
  • [Journal Article] P-type sp3-bonded BN/n-type Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method2009

    • Author(s)
      S.Komatsu, Y.Sato, D.Hirano, T.Nakamura, K.Koga, A.Yamamoto, T.Nagata, T.Chikyo, T.Watanabe, T.Takizawa, K.Nakamura, T.Hashimoto, M.Shiratani
    • Journal Title

      J. Phys. D : Appl. Phys.

      Volume: 42 Pages: 225107(6)

    • Peer Reviewed
  • [Journal Article] First-Principles Study of 10H-BN and 10H-AlN2009

    • Author(s)
      K.Kobayashi and S.Komatsu
    • Journal Title

      Journal of the Physical Society of Japan

      Volume: 78 Pages: 044706(8)

    • Peer Reviewed
  • [Presentation] Gigantic polytypes of sp3-bonded boron nitride prepared by plasma-laser hybridized CVD2012

    • Author(s)
      小松正二郎, 小林一昭
    • Organizer
      iPlasma Nano-III
    • Place of Presentation
      Pulay Desau, Malaysia
    • Year and Date
      20120227-0301
    • Invited
  • [Presentation] New semiconducting BN films with sp3-bonded polytypic structures and functional morphologies prepared by laser-plasma synergetic deposition methods2011

    • Author(s)
      小松正二郎,小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      2nd International Workshop on Plasma Nano-Interfaces
    • Place of Presentation
      Slovenia, Krvavcem
    • Year and Date
      20110301-04
    • Invited
  • [Presentation] New phases of sp3-bonded boron nitride prepared by photo-assisted plasma processing methods : the fundamentals and applications to electronic devices2011

    • Author(s)
      小松正二郎,小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      ICACNM-2011
    • Place of Presentation
      Chandigarh, Panjab University
    • Year and Date
      20110223-26
    • Invited
  • [Presentation] New semiconducting BN films with sp3-bonded polytypic structures and functional morphologies prepared by laser-plasma synergetic deposition methods2011

    • Author(s)
      小松正二郎,小林一昭, 長田貴弘, 知京豊裕
    • Organizer
      ICNC 2011
    • Place of Presentation
      India, Kottayam, Mahatma Gandhi University
    • Year and Date
      20110107-09
    • Invited
  • [Presentation] Fabrication of photovoltaic devices based on sp3-bonded BN by laser-plasma hybrid CVD method and some related matters2011

    • Author(s)
      小松正二郎
    • Organizer
      Topical workshop on Green plasma-nano technology
    • Place of Presentation
      Suwon, Korea
    • Year and Date
      2011-10-18
    • Invited
  • [Presentation] Laser-plasma hybrid processing of new BN crystalline films ; basic ideas behind their growth and applications2011

    • Author(s)
      小松正二郎
    • Organizer
      レーザー学会代418回研究会「レーザー応用」
    • Place of Presentation
      阿蘇ファームランド (Phys. 42, 225107(2009))
    • Year and Date
      2011-09-12
    • Invited
  • [Presentation] Photo-assisted CVD of dense BN : the growth mechanism and applications2010

    • Author(s)
      小松正二郎
    • Organizer
      九州表面・真空研究会2010(兼)第15回九州薄膜表面研究会
    • Place of Presentation
      九州大学 伊都キャンパス
    • Year and Date
      2010-06-12
    • Invited
  • [Presentation] BN/Si ヘテロ接合太陽電池 / BN/Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method2010

    • Author(s)
      小松正二郎
    • Organizer
      第3回電気電子工学セミナー
    • Place of Presentation
      九州大学システム情報科学研究院
    • Year and Date
      2010-03-23
    • Invited
  • [Presentation] 高密度BN 薄膜のプラズマ・レーザプロセスによる成長原理と半導体化/growth mechanism and doping of dense-phase BN prelaved by plasma-laser synchronous processing2010

    • Author(s)
      小松正二郎
    • Organizer
      仙台プラズマフォーラム・プラズマナノバイオニクスの基礎研究
    • Place of Presentation
      東北大学
    • Year and Date
      2010-03-13
    • Invited
  • [Patent(Industrial Property Rights)] 電界電子放出特性を利する自己造形的表面形状を有するSP3結合性窒化ホウ素薄膜とそほ製造方法及びその用途2012

    • Inventor(s)
      小松正二郎, 他
    • Industrial Property Rights Holder
      物材機構
    • Industrial Property Rights Type
      韓国特許
    • Industrial Property Number
      10-1159047
    • Acquisition Date
      2012-02-28
    • Overseas

URL: 

Published: 2015-06-25  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi