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1992 Fiscal Year Final Research Report Summary

Research on the thermal stress and the dislocation in GaAs grown on Si substrates

Research Project

Project/Area Number 03650018
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Applied materials
Research InstitutionThe University of Tokushima

Principal Investigator

SAKAI Shiro  Tokushima University,Electrical and Electronic Engineering Associate Professor, 工学部, 助教授 (20135411)

Project Period (FY) 1991 – 1992
KeywordsGaAs on Si / Thermal stress / Light emitting diodes / Opto-electronic IC / Degradation / dislocation
Research Abstract

The thermal stress which is produced in GaAs grown on Si substrates by the thermal expansion coefficient mismatch between the two materials is known to introduce dislocation into GaAs during the cooling stage after the growth and to degrade lifetime of the light emitting devices on Si.We have proposed the new UCGAS(undercut GaAs on Si)structure to reduce the stress and the stress-induced dislocation.We have found that 1.complete stress relaxation is obtained only in the annealed UCGAS since the as-grown GaAs on Si is plastically deformed,2.the reduction in both the stress and the dislocation is obtained by growing the layer on the UCGAS.
The UCGAS LED(light emitting diodes)and LD(laser diodes)were successfully fabricated,and the LED lifetime is demonstrated to be more than 3000 hours which is the longest lifetime among the GaAs LED's that are ever fabricated on the Si substrates.On the contrarily,the conventional mesa-type LED which contains high stress degrades in 30 minutes. The degradation mechanism is investigated.It was shown that the degradation is caused by the increased density of the dislocation during operation.The thermal stress relaxation is quite essential to suppress the degradation.
The above findings were published in the papers listed in the reverse side of this abstract.

  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] S.Sakai: "Thermal stress and defect reduction in undercut GaAs on Si substrate" Electron.Lett.27. 1371-1372 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Sakai: "Zinc diffusion in AlGaAs grown on Si substrate" Jpn.J.Appl.Phys.30. 1942-1943 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Sakai: "Selective liquid-phase electroepitaxy of GaAs on GaAs-coated Si substrates" J.Appl.Phys.70. 4899-4902 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Wada: "Thermal stress in partially separated GaAs layers grown epitaxially on Si substrates" Proc.of the Mater.Res.Soc.Symp.221. 429-434 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Sakai: "Thermal annealing effects on the defect and stress reduction in undercut GaAs on Si" Inst.Phys.Conf.Ser.120. 113-118 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Yuasa: "AlGaAs/GaAs double-heterostructure optical waveguide on Si substrates" Proc.of the Mater.Res.Soc.Symp.228. 225-230 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Sakai: "Selective growth of GaAs on GaAs-coated Si substrate by liquid phase electro-epitaxy" Proc.of the Mater.Res.Soc.Symp.237. 565-570 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Wada: "Stable operation of AlGaAs/GaAs light-emitting diodes fabricated on Si substrate" Jpn.J.Appl.Phys.31. L78-L81 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Wada: "Photoluminescence-dark-spot-free AlGaAs grown on Si substrate" Appl.Phys,Lett.60. 1354-1356 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Sakai: "Dislocation reduction in the annealed undercut GaAs on Si" Appl.Phys.Lett.60. 1480-1482 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Wada: "Low defect density low stress GaAs grown on undercut GaAs on Si" Extended abstract of the 1992 Int.Conf.on Solid State Devices and Materials. 650-652 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Sakai: "Thermal stress and defect reduction in undercut GaAs on Si substrate" Electron.Lett. Vol.27,No.15. 1371-1372 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Sakai: "Zinc diffusion in AlGaAs grown on Si substrate" Jpn.J.Appl.Phys. Vol.30,No.9A. 1942-1943 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Sakai: "Selective liquid-phase electroepitaxy of GaAs on GaAs-coated Si substrates" J.Appl.Phys. Vol.70,No.9. 4899-4902 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Wada: "Thermal stress in partially separated GaAs layers grown epitaxially on Si substrates" Proc.of the Mater.Res.Soc.Symp. Vol.221. 429-434 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Sakai: "Thermal annealing effects on the defect and stress reduction in undercut GaAs on Si" Inst.Phys.Conf.Ser. No.120. 113-118 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Yuasa: "AlGaAs/GaAs double-heterostructure optical waveguide on Si substrates" Proc.of the Mater.Res.Soc.Symp. Vol.228. 225-230 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Sakai: "Selective growth of GaAs on GaAs-coated Si substrate by liquid phase electro-epitaxy" Proc.of the Mater.Res.Soc.Symp. Vol.237. 565-570 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Wada: "Stable operation of AlGaAs/GaAs light-emitting diodes fabricated on Si substrate" Jpn.J.Appl.Phys. Vol.31 No.2A. L78-L81 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Wada: "Photoluminescence-dark-spot-free AlGaAs grown on Si substrate" Appl.Phys,Lett. Vol.60,No.11. 1354-1356 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Sakai: "Dislocation reduction in the annealed undercut GaAs on Si" Appl.Phys.Lett. Vol.60 No.12. 1480-1482 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Wada: "Low defect density low stress GaAs grown on undercut GaAs on Si" Extended abstract of the 1992 Int.Conf.on Solid State Devices and Materials. 650-652 (1992)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1994-03-24  

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