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1997 Fiscal Year Final Research Report Summary

Study of Visible Luminescence Mechanism in Porous Silicon and Its Devvelopment into Silicon-Based Optoelectronic Integration

Research Project

Project/Area Number 07405016
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

KOSHIDA Nobuyoshi  Tokyo Univ.of A&T,Prof., 工学部, 教授 (50143631)

Co-Investigator(Kenkyū-buntansha) KOYAMA Hideki  Tokyo Univ.of A&T,Res.Assoc., 工学部, 助手 (40234918)
SUDA Yoshiyuki  Tokyo Univ.of A&T,Assoc.Prof., 工学部, 助教授 (10226582)
Project Period (FY) 1995 – 1997
Keywordsporous Si / Si nanocrystallites / quantum confinement / visible luminescence / Si light-emiting diode / Si photonic integration / bistable memory / ballistic electron emission
Research Abstract

To enhance the scientific and teachnological potential of silicon-based optoelectronics, the visible luminescence mechanism of porous silicon(PS)has been studied, including the device physics for monolithic photonic integrataion. Major results are summarized as fofllows.
1. Related issues to luminescence mechanism
(1) Bandgap widening occurs in luminescent PS,while its electronic and lattice structures maintain characteristic features of single-crystal silicon substrates.
(2) Definite correlation exists between bandgap and PL peak energy.
(3) Nanocrystal-related PL model is presented on a basis of spectroscopic analyzes of PL dynamics, polarization memory, and PL excitation process.
(4) PL spestra can be continuously tuned from red to blue simply by post-anodization photochemical etching without any further treatments like thermal oxidation.
(5) PL efficiency and stability can be improved by appropriate control of structure and surface termination of silicon nanocrystals in PS.
2. Fundamentals of integrated photonic devices
(1) By analyzes of electroluminescence (EL) mechanism in PS diodes, efficiency of 0.05% was obtained from diodes with a simple PS layr.
(2) Applicability of PS to optical cavity and three-dimensionally buried waveguide was demonstrated based on monolithic fabricataion technology.
(3) Availabilty of PS for optical logic gate was made clear by making use of non-linear optical effects.
(4) Some useful functions of PS as a confined system were observed in relation to the EL emission. Especially of importances are bistable memory effects and ballistic electron emission.

  • Research Products

    (72 results)

All Other

All Publications (72 results)

  • [Publications] N.Koshida, T.Ozaki, X.Sheng, and H, .Koyama: "Cold Electron Enission from Electroluminescent Porous Silicon Diodes" Jpn.J.Appl.Phys.34. L705-L707 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Koyama and N.Koshida: "Polarization Retention of Photoluminescence from Porous Silicon" Phys.Rev.B. 52. 2649-2655 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsumoto, M.Daimon, H.Mimura, Y.Kanemitstu and N.Koshida: "Optically Induced Absorption in Porous Silicon and Its Application to Logic Gates" J.Electrochem.Soc.142. 3528-3533 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Koyama, T.Ozaki, and N.Koshida: "Decay Dynamics of The Homogeneously Broadened Photoluminescence from Porous Silicon" Phys.Rev.B. 52. R11561-R11564 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tanino, A.Kuprin, Y.Deai, and N.Koshida: "Raman Study of Free-Standing Porous Silicon" Phys.Rev.B. 53. in press (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Araki, H.Koyama, and N.Koshida: "Fabrication and Fundamental Properties of an Edge-Emitting Device with Step-Index Porous Silicon Waveguide" Appl.Phys.Lett. 68. in press (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Araki, H.Koyama, and N.Koshida: "Precisely Tuned Emission from Porous Silicon Vertical Optical Cavity in the Visible Region" J.Appl.Phys.80. 4841-4844 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Koyama, N.Shima, and N.Koshida: "Large and Irregular Shift of Photoluminescence Excitation Spectra Observed in Photochemically Etched Porous Silicon" Phys.Rev.B. 53. 13291-13294 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda, T.Koizumi, K.Obata, Y.Tezuka, S.Shin, and N.Koshida: "Surface Electronic Structures and Luminescence Mechanisms of Porous Si" J.Electrochem.Soc.143. 2502-2507 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Araki, H.Koyama, and N.Koshida: "Controlled Electroluminescence Spectra of Porous sSlicon Diodes with a Vertical Optical Cavity," Appl.Phys.Lett.52. 2956-2958 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Nakagawa, H.Koyama, and N.Koshida: "Control of structure and optical anisotropy of luminescent porous silicon by magnetic-field assisted anodization," Appl.Phys.Lett.69. 3206-3208 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Mizuno, H.Koyama, and N.Koshida: "Oxide-Free Blue Photoluminescence from Photochemicall Etched Porous Silicon" Appl.Phys.Lett.69. 3779-3781 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Oguro, H.Koyama, T.Ozaki, and N.Koshida: "Mechanism of the Electroluminescence from Metal/Porous Si/n-Type Si" J.Appl.Phys.81. 1407-1412 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ueno, H.Koyama, and N.Koshida: "Nonlinear Electrical Functions of Porous Silicon Light-Emitting Diodes" Mat.Res.Soc.Symp.Proc.458(in press). (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Mizuno, H.Koyama, and N.Koshida: "Photo-assisted continuous tuning of photoluminescence spectra of porous silicon," Thin Solid Films. 297. 61-63 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] X.Sheng, H.Koyama, and N.Koshida: "Operation of electroluminescent porous silicon diodes a surface-emitting cold cathodes," Thin Solid Films. 297. 314-316 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsumoto, A.Masumoto, S.Nakajima, and N.Koshida: "Luminescence from deuterium-terminated porous silicon," Thin Solid Films. 297. 31-34 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Araki, H.Koyama, and N.Koshida: "Functional properties of luminescent porous silicon as a component of optoelectronic integration," Superlattices and Microstructures. 22. 365-370 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Oguro, H.Koyama, T.Ozaki, and N.Koshida: "Mechanism of the visible electroluminescence from metal/porous silicon/n-Si devices," J.Appl.Phys.81. 1407-1412 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsumoto, Y.Masumoto, and N.Koshida: "Optical properties of deuterium terminated porous silicon" Mat.Res.Soc.Symp.Proc.452. 449-454 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda, K.Obata, A.Kumagai, and N.Koshida: "Roles of surface termination in photoluminescence mechanisms of porous silicon" Mat.Res.Soc.Symp.Proc.452. 455-460 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Koyama and N.Koshida: "Spectroscopic analysis of blue-green emission from oxidized porous silicon:possible evidence for Si-nanostructure-based mechanism" Solid State Comm.103. 37-41 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsumoto, Y.Masumoto, S.Nakashima, H.Mimura, and N.Koshida: "Coupling effect of surface vibration and quantum confinement carriers in porous silicon" Appl.Surf.Sci.113/114. 140-144 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsumoto, Y.Masumoto, T.Nakagawa, M.Hashimoto, K.Ueno, and N.Koshida: "Electroluminescence from deuterium-terminated porous silicon" Jpn.J.Appl.Phys.36. L1089-L1091 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] X.Sheng, T.Ozaki, H.Koyama, and N.Koshida: "Improved cold electron emission charactersitics of electroluminescent porous silicon diodes," J.Vac.Sci,& Technol.B. 15. 1661-1665 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Nakagawa, H.Koyama, and N.Koshida: "Effects of external magnetic field on the formation and optical properties of porous silicon," Proc.Int.ECS Symp.on Pits and Pores:Formation,Properties and Significance for Advanced Luminesecnt Materials,Ottawa,1997(ECS,Pennington,1997). 235-241 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsumoto, Y.Masumoto, and N.Koshida:"Reduction of luminescence degradation using deuterium-terminated porous silicon," Proc.Int.ECS Symp.on Pits and Pores:Formation,Properties and Significance for Advanced Luminesecnt Materials,Ottawa,1997(ECS,Pennington,1997). 311-318 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Koyama, Y.Matsushita, and N.Koshida: "Activation of blue emission from oxidized porous silicon by annealing in water vapor" J.Appl.Phys.(1998). 82(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] X.Sheng, H.Koyama, and N.Koshida: "Efficient surface-emitting cold cathodes based on electroluminescent porous silicon diodes" J.Vac.Sci.& Technol.B. 16(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ueno and N.Koshida: "Negative-resistance effects in electroluminescent porous silicon diodes" Jpn.J.Appl.Phys.37(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Araki, M.Takahashi, H.Koyama, and N.Koshida: "Performances of Buried-Type Porous Silicon Optical Waveguides" Mat.Res.Soc.Symp.Proc.486(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Matsumoto, Y.Masumoto, and N.Koshida: "Photo-and Electro-luminescence from Deuterium-Terminated Porous Silicon Diodes," Mat.Res.Soc.Symp.Proc.486(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Koshida, E.Takizawa, H.Mizuno, H.Koyama, and T.Sameshima: "Electroluminescent devices based on polycrystalline silicon films for large-area applications" Mat.Res.Soc.Symp.Proc.486(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda, K.Obata, and N.Koshida: "Band dispersions in photoluminescent porous Si" Phys.Rev.Lett.80(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 須田 良幸・越田 信義: "多孔質シリコンの表面電子構造と発光機構" 電気化学会誌. 63. 892-897 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 越田 信義: "シリコンによる光電子集積を目指して" 電気学会誌A. 116. 99-103 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 越田 信義: "ポーラスシリコンの発光-間接・直接遷移の枠を越えて-" 応用物理. 66. 437-443 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Koyama and N.Koshida: "Polarization retention of photoluminescence from porous silicon" Phys.Rev.B. 52. 2649-2655 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Koyama, T.Ozaki and N.Koshida: "Decay dynamics of the homogeneously-broadened photoluminescence from porous silicon" Phys.Rev.B. 52. R11561-R11564 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Matsumoto, M.Daimon, H.Mimura, Y.Kanemitsu and N.Koshida: "Optically induced absorption in porous silicon and its application to logic gates" J.Electrochem Soc.142. 3528-3533 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Tanino, A.Kuprin, Y.Deai and N.Koshida: "Raman study of free-standing porous silicon" Phys.Rev.B. 52. 1937-1947 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Araki, H.Koyoma and N.Koshida: "Optical cavity based on porous silicon superlattice technology" Jpn.J.Appl.Phys.35(2). 1041-1044 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Koyama, N.Shima, and N.Koshida: "Large and irregular shift of photoluminescence excitaion spectra observed in photochemically etched porous silicon" Phys, Rev.B. 53(20). R13291-R13294 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Araki, H,Koyama and N.Koshida: "Fabrication and fundamental properties of an edge-emitting device with step-index porous silicon waveguide" Appl.Phys.Lett.68(21). 2999-3000 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Araki, H.Koyama and N.Koshida: "Precisely tuned emission from porous silicon optical cavity in the visible region" J.Appl.Phys.80. 4841-4844 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda, T.Koizumi, K.Obata, Y.Tezuka, S.Shin and N.Koshida: "Electronic surface structures and photoluminescence mechanisms of porous Si" J.Electrochem.Soc.143. 2502-2507 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Koizumi, Y.Suda, and N.Koshida: "Effects of oxidation on electronic states and phtoluminescence properties of porous silicon" Jpn.J.Appl.Phys.35. L803-L806 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Araki, H.Koyama, and N.Koshida: "Controlled electroluminescence of porous silicon diodes with a vertical optical cafvity" Appl.Phys.Lett.52. 2956-2958 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nakagawa, H.Koyama, and N.Koshida: "Control of structurre and optical anisotropy of luminescent porous silicon by magnetic-field assisted anodization" Appl.Phys.Lett.69. 3206-3208 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Mizuno, H.Koyama, and N.Koshida: "Oxide-free blue photoluminescence from photochemically etched porous silicon" Appl.Phys.Lett.69. 3779-3781 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Mizuno, H.Koyama, and N.Koshida: "Photo-assisted continuous tuning of photoluminescence spectra of porous silicon" Thin Solid Films. 297. 61-67 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Sheng, H.Koyama, and N.Koshida: "Operation of electroluminescent porous silicon diodes a surface-emitting cold cathodes" Thin Solid Films. 297. 314-316 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Matsumoto, A.Masumoto, S.Nakajima, and N.Koshida: "Luminescence from deuterium-terminated porous silicon" Thin Solid Films. 297. 31-34 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Araki, H.Koyama, and N.Koshida: "Functional properties of luminescent porous silicon as a component of optoelectronic integration" Superlattices and Microstructures. 22. 365-370 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Oguro, H.Koyama, Ta.Ozaki, and N.Koshida: "Mechanism of the visible electroluminescence from metal/porous silicon/n-Si devices" J.Appl.Phys.81. 1407-1412 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Matsumoto, Y.Masumoto, and N.Koshida: "Optical properties of deuterium terminated porous silicon" Mat.Res.Soc.Symp.Proc.452. 449-454 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda, K.Obata, A.Kumagai, and N.Koshida: "Roles of surface termination in photoluminescence mechanisms of porous silicon" Mat.Res.Soc.Symp.Proc.452. 455-460 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ueno, H.Koyama, and N.Koshida: "Nolinear electrical functions of porous silicon light-emitting diodes" Mat.Res.Soc.Symp.Proc.452. 699-704 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Koyama and N.Koshida: "Spectroscopic analysis of blue-green emission from oxidized porous silicon : possible evidence for Si-nanostructure-based mechanism" Solid State Comm.103. 37-41 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Matsumoto, Y.Masumoto, S.Nakashima, H.Miura, and N.Koshida: "Coupling effect of surface vibration and quantum confinement carriers in porous silicon" Appl.Surf.Sci.113. 140-144 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Matasumoto, Y.Masumoto, T.Nakagawa, M.Hashimoto, K.Ueno, and N.Koshida: "Electroluminescence from deuterium-terminated porous silicon" Jpn.J.Appl.Phys.36. L1089-L1091 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Sheng, T.Ozaki, H.Koyama, and N.Koshida: "Improved cold electron emission charactersitics of electroluminescent porous silicon diodes" J.Vac.Sci.& Technol.B. 15. 1661-1665 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nakagawa, H.Koyama, and N.Koshida: "Effects of external magnetic field on the formation and optical properties of porous silicon" Proc.Int.ECS Symp.on Pits and Pores : Formation, Properties and Significance for Advanced Luminesent Materials, Ottawa, 1997, ed.P.Schmuki, D.J.Lockwood, H.Isaacs, and A.Bsiesy (ECS,Pennington, 1997). 235-241

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Matsumoto, Y.Masumoto, and N.Koshida: "Reduction of luminescence degradation using deuterium-terminated porous silicon" Proc.Int.ECS Symp.on Pits and Pores : Formation, Properties and Significance for Advanced Luminesent Materials, Ottawa, 1997, ed.P.Schmuki, D.J.Lockwood, H,Isaacs, and A.Bsiesy (ECS,Pennington, 1997). 311-318

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Koyama, Y.Matsushita, and N.Koshida: "Activation of blue emission from oxidized porous silicon by annealing in water vapor" J.Appl.Phys.82(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Sheng, H.Koyama, and N.Koshida: "Efficient surface-emitting cold cathodes based on electroluminescent porous silicon diodes" J.Vac.Sci.& Technol.B. 16(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ueno and N.Koshida: "Negative-resistance effects in electroluminesent porous sillicon diodes" Jpn.J.Appl.Phys.37(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Araki, M.Takahashi, H.Koyama, and N.Koshida: "Performances of Buried-Type Porous Silicon Optical Waveguides" Mat.Res.Soc.Symp.Proc.486(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Matsumoto, Y.Masumoto, and N.Koshida: "Photo-and Electro-luminescence from Deuterium-Terminated Porous Silicon Diodes" Mat.Res.Soc.Symp.Proc.486(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Koshida, E.Takizawa, H.Mizuno, H.Koyama, and T.Sameshima: "Electroluminescent devices based on polycrystalline silicon films for large-area applications" Mat.Res.Soc.Symp.Proc.486(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda, K.Obata, and N.Koshida: "Band dispersions in photoluminescent porous Si" Phys.Rev.Lett.80(in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Sheng and N.Koshida: "Quasi-ballistic electron emission from porous silicon diodes" J.Vac.Sci.& Technol.B. 16(to be published).

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-16  

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