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1998 Fiscal Year Final Research Report Summary

Fabnication of Superconductor/Insulator/Superconductor Trilayer Tunnel Junction Devices by Atomic Layer MOCVD

Research Project

Project/Area Number 08555004
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Applied materials science/Crystal engineering
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

ODA Shunri  TOKYO INSTITUTE OF TECHNOLOGY,RESEARCH CENTER FOR QUANTUM EFFECT ELECTRONICS,PROFESSOR, 量子効果エレクトロニクス研究センター, 教授 (50126314)

Co-Investigator(Kenkyū-buntansha) YOSHIDA Jiro  TOSHIBA,RESEARCH AND DEVELOPMENT CENTER,PRINCIPLAL RESEARCHER, 研究開発センター・基礎研究所, 研究主幹
Project Period (FY) 1996 – 1998
KeywordsOxide Superconductors / Superconducting Devices / MOCVD / Atomic Layer Epitaxy / Josephson Junction / Resonant Tunneling / Localized States / In Situ Ellipsometry
Research Abstract

1. Ultrathin films of oxide superconductors and insulator heterostructures were prepared by the atomic layer metalorganic chemical vapor deposition method. Reproducibility of thinfilms fabrication was enhanced by using in situ monitoring based on ultrasonic transducers and spectroscopic ellipsometry.
2. Superconducting field effect was enhanced by the combination of Josephson junctions and planar type devices.
3. Anomolous current voltage characteristics due to intrinsic Josephson junctions were observed in YBCO thinfilm devices fabricated by scanning probe microscopy lithography. IcRn product value of 2.5mV were obtained at 5K.
4. Two possible approaches for realizing overdamped Josephson junctions with a high IcRn product value were investigated. The use of an superconductor-insulator-superconductor structure with a shunt resistor that was formed by quasiparticle current paths via localized states in the tunnel bamer was concluded to be more promising than the use of an superconductor-normal metal-superconductor structure. The physical nature of localized states in PrBa2Cu3O7 (PBCO) and its relevance to transport properties were fully clarified. Ramp-edge-type junctions with a Co-doped PBCO barrier ranging from 6 nm to 10 nm in thickness exhibited excellent Josephson characteristics, and the maximum IcRn product value exceeding 2 mV at 4.2 K has been realized. Preliminary single-flux-quantum logic circuits including an RS- flip flop and a frequency divider have been fabricated and tested. The frequency divider circuit utilizing ramp-edge-type Josephson junctions with a buried groundplane was confirmed to operate correctly up to 200 GHz in frequency at 12 K.

  • Research Products

    (38 results)

All Other

All Publications (38 results)

  • [Publications] S.Yamamoto, A.Kawaguchi and S.Oda: "Preparation of Thin Films of YBa2Cu30x with a Smooth Surface by Atomic Layer MOCVD" Mat.Sci.Eng.B. B41. 87-92 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Yoshida, T.Nagano, and T.Hashimoto: "Current transport and electronic states in a, b-axis oriented YBa2Cu3O7/PrBa2Cu3O7/YBa2Cu3O7 sandwich type junctions" Phys.Rev.B. 54,13. 8623-8631 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Nagano, T.Hashimoto, and J.Yoshida: "A-axis oriented YBa2Cu3Oy thin film grown on novel buffer layers" Physica C. 265,3&4. 214-227 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Yoshida, T.Hashimoto, and T.Nagano: "Transport processes in b-axis oriented PrBa2Cu3Ox thin films" Czech.J.Physics. 46,S3. 1309-1310 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Suzuki and S.Oda: "Proposal of coplanar-type high-Tc superconducting field-effect devices" Physica C. 282-287. 2495-2496 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Yamamoto, A.Kawaguchi, K.Nagata, T.Hattori and S.Oda: "Atomic layer-by-layer epitaxy of oxide superconductors by MOCVD" Applied Surface Science. 112. 30-37 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Yamamoto, T.Watanabe and S.Oda: "Junction Formation in YBaCuO Thin Films bu Scanning Probe" J.Low.Temp.Phys. 106. 423-432 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Oda: "Growth Mechanism of YBOO thin films by MOCVD" Int.Workshop on Superconductivity. 37-42 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Yamamoto, A.Kawaguchi and S.Oda: "Anomalous Current-Voltage Characteristics along the c-Axis in YBaCuO Thin Films Prepared by MOCVD and AFM Lithography" Physica C. 293. 244-248 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Suzuki and S.Oda: "Fabrication of Coplanar-type High-Tc Superconducting Field-Effect Devices" 5th Int.Workshop on High-Temperature Superconducting Electron Devices. 199-201 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Yoshida and T.Nagano: "Tunneling and hopping conduction via localized states in thin PrBa2Cu3O7-x barriers" Phys.Rev.B. 55. 11860-11871 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Yoshida, T.Nagano and T.Hashimoto: "Characterization of localized states in thin PrBa2Cu3O7-x tunnel barriers" J.Low Temp.Phys.106,3/4. 327-332 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 吉田二朗: "全酸化物超電導論理回路技術" 東芝レビュー. 52,5. 98-99 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Suzuki, H.Tobisaka and S.Oda: "Electric Properties of Coplanar High-Tc Superconducting Field Effect Devices" Japanese Journal of Applied Physics. 37. 492-495 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Suzuki, S.Sugai and S.Oda: "Electric Field-effect Enhancement by a Combination of Coplanar High-Tc Superconducting Devices with Step Edge Junctions" Japanese Journal of Applied Physics. 37. L784-L786 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Nagano, S.Inoue, T.Hashimoto and J.Yoshida: "Interface fabrication of YBa2Cu3Oy ramp-edge junctions with PrBa2 (Cu1-xCox) Oy barrier layer in enhanced oxidizing atmosphere" Physica C. 303,3/4. 231-245 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 吉田二朗: "高温超電導デバイス技術" 東芝レビュー. 53,1. 61-64 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 吉田二朗: "単一磁束量子素子を用いた論理回路技術" 応用物理. 67,4. 410-416 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 吉田二朗: "デバイス化のための薄膜積層技術" 電気学会誌. 118,12. 765-767 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashimoto, S.Inoue, T.Nagano and J.Yoshida: "Design and fabrication of a voltage divider utilizing high-Tc ramp-edge Josephson junctions with a ground plane T.Hashimoto, S.Inoue, T.Nagano and J.Yoshida" IEEE Trans.Appl.Supercond. in press. (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Yoshida, S.Inoue, T.Hashimoto and T.Nagano: "Characterization of ramp-type Josephson junctions with a Co-doped PrBaCuO barrier" IEEE Trans.Appl.Supercond.in press. (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Oda, S.Yamamoto, Z.Wang, H.Tobisaka and K.Nagata: "High-Temperature Superconductors and Novel Inorganic Materials, NATO ASI Series 3 vol.62 (eds.by G.Van Tendeloo, EV.Antipov and S.N.Putilin, Kluwer Academic, Dordorecht)" Atomic Layer MOCVD of Oxide Superconductors and Dielectrics, (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Yamamoto, A.Kawaguchi and S.Oda: ""Preparation of Thin Films of YBa2Cu30x with a Smooth Surface by Atomic Layer MOCVD"" Mat.Sci.Eng.B. 41. 87-92 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Yoshida, T.Nagano and T.Hashimoto: ""Current transport and electronic states in a, b-axis-oriented YBa2Cu3O7/PrBa2Cu3O7/YBa2Cu3O7 sandwich type junctions"" Phys.Rev.B. 53-13. 8623-8631 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nagano, T.Hashimoto and J.Yoshida: ""A-axis orineted YBa2Cu3Oy thin film grown on novel buffer layers"" Physica C. 265-3&4. 214-227 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Yoshida, T.Hashimoto and T.Nagano: ""Transport processes in b-axis oriented PrBa2Cu3O7-x thin films"" Czech.J.Physics.46-Suppl.S3. 1309-1310 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Yamamoto, A.Kawaguchi, K.Nagata, T.Hattori and S.Oda: ""Atomic layer-by-layer epitaxy of oxide superconductors by MOCVD"" Applied Surface Science. 112. 30-37 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Yamamoto, T.Watanabe and S.Oda: ""Junction Formation in YBaCuO Thin Films by Scanning Probe"" J.Low.Temp.Phys.106. 423-432 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Suzuki and S.Oda: ""Proposal of coplanar-type high-Tc superconducting field-effect devices"" Physica C. 282-287. 2495-2496 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Yamamoto, A.Kawaguchi and S.Oda: ""Anomalous Current-Voltage Characteristics along the c-Axis in YBaCuO Thin Films Prepared by MOCVD and AFM Lithography"" Physica C. 293. 244-248 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Yoshida, T.Nagano and T.Hashimoto: ""Characterization of localized states in thin PrBa2Cu3O7-x tunnel barriers"" J.Low Temp.Phys.106-3/4. 327-332 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Yoshida and T.Nagano: ""Tunneling and hopping conduction via localized states in thin PrBa2Cu3O7-x barriers"" Phys.Rev.B. 55-17. 11860-11871 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Suzuki, H.Tobisaka and S.Oda: ""Electric Properties of Coplanar High-Tc Superconducting Field^Effect Devices"" Japanese Journal of Applied Physics. 37. 492-495 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Suzuki, S.Sugai and S.Oda: ""Electric Field-effect Enhancement by a Combination of Coplanar High-Tc Superconducting Devices with Step Edge Junctions"" Japanese Journal of Applied Physics. 37. L784-L786 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nagano, S.Inoue, T.Hashimoto and J.Yoshida: ""Interface fabrication of YBa2Cu3Oy ramp-edge junctions with PrBa2(Cu1-xCox)Oy barrier layer in enhanced oxidizing atmosphere"" Physica C. 303-3&4. 231-245 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashimoto, S.Inoue, T.Nagano and J.Yoshida: ""Design and fabrication of a voltage divider utilizing high-Tc ramp-edge Josephson junctions with a ground plane"" IEEE Trans.Appl.Supercond.(to be published). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Yoshida, S.Inoue, T.Hashimoto and T.Nagano: ""Characterization of ramp-type Josephson junctions with a Co-doped PrBaCuO barrier"" IEEE Trans.Appl.Supercond.(to be published). (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Oda, S.Yamamoto, Z.Wang, H.Tobisaka and K.Nagata: ""Atomic Layer MOCVD of Oxide Superconductors and Dielectrics"" High-Temperature Superconductors and Novel Inorganic Materials, NATO ASI Series 3 vol.62 (eds.by G.Van Tendeloo, E.V.Antipov and S.N.Putilin, Kluwer Academic, Dordorecht). (1999)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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