1999 Fiscal Year Final Research Report Summary
Measurements of Ionic Mobility in Plasma Processing gases
Project/Area Number |
10650324
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Research Category |
Grant-in-Aid for Scientific Research (C)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Electronic materials/Electric materials
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Research Institution | Daido Institute of Technology |
Principal Investigator |
YAMADA Tadahiko Daido Institute of Technology, Department of Electrical Engineering, Associate Professor, 工学部, 助教授 (10075905)
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Project Period (FY) |
1998 – 1999
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Keywords | mobility / drift tube / CFィイD23ィエD2ィイD1+ィエD1 / CCIFィイD22ィエD2ィイD1+ィエD1 |
Research Abstract |
The ionic mobilities of CFィイD23ィエD2ィイD1+ィエD1 in DFィイD24ィエD2have been measured using a selected-ion drift apparatus(SIDA). The mobilities of CCIFィイD22ィエD2ィイD1+ィエD1in Ar and NィイD22ィエD2have been also measured. The momentum-transfer cross sections, the collision rates and the longitudinal diffusion coefficient's ware calculated from the arrival time spectrum of ions. Pressure of neutral gases was 0.1 Torr in the measurements. The ranges of E/N were 100-300 Td for CFィイD23ィエD2ィイD1+ィエD1-CFィイD24ィエD2,25-90 Td for CCIFィイD22ィエD2ィイD1+ィエD1-NィイD22ィエD2 and 50-150 Td for CCIFィイD22ィイD1+ィエD1ィエD2NィイD22ィエD2. It is found that the reduced mobility curve has a peak value with Ko=1.18 cmィイD12ィエD1/V/s at E/N=230 Td in the case of CFィイD23ィエD2ィイD1+ィエD1-CFィイD24ィエD2. In the case of CCIFィイD22ィエD2ィイD1+ィエD1-Ar,the peak value of reduced mobility was Ko=6.43 cmィイD12ィエD1/V/s at E/N=60 Td. There is no peek for CCIFィイD22ィエD2ィイD1+ィエD1-NィイD22ィエD2. The reduced mobility in this case was 16.2-10.2 cmィイD12ィエD1/V/s at E/N value ranging from 25 to 90 TD. The momentum-transfer cross sections ware 5.82-1.98x10ィイD1-16ィエD1 cmィイD12ィエD1 for CFィイD23ィエD2ィイD1+ィエD1-CFィイD24ィエD2, 6.48-4.72x10ィイD1-17ィエD1cmィイD12ィエD1 for CCIFィイD22ィエD2ィイD1+ィエD1-NィイD22ィエD2 and 1.54-1.41x10ィイD1-17ィエD1cmィイD12ィエD1 for CCIFィイD22ィエD2ィイD1+ィエD1-Ar.
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