2001 Fiscal Year Final Research Report Summary
Adsorption and desorption of active gases on Si(111) surfaces with ultra-thin Ag films
| Project/Area Number |
12640313
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
固体物性Ⅰ(光物性・半導体・誘電体)
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| Research Institution | NARA INSTITUTE OF SCIENCE AND TECHNOLOGY |
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Principal Investigator |
HATTORI Ken NARA INSTITUTE OF SCIENCE AND TECHNOLOGY, Materials Science, Assistant Professor, 物質創成科学研究科, 助教授 (00222216)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUI Fumihiko NARA INSTITUTE OF SCIENCE AND TECHNOLOGY, Materials Science, Research Associate, 物質創成科学研究科, 助手 (60324977)
TAKEDA Sakura NARA INSTITUTE OF SCIENCE AND TECHNOLOGY, Materials Science, Research Associate, 物質創成科学研究科, 助手 (30314537)
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| Project Period (FY) |
2000 – 2001
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| Keywords | Thermal desorption / silicon(111) / silver / thin films / nitric monoxide / nitrogen / oxygen / dinitrogen monoxide |
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| Research Abstract |
We have measured thermal desorption spectrum (approximately 120-1000 K) from nitric monoxide adsorbed Si(111) surfaces with ultra-thin silver films displaying different surface structures at low temperature. We obtained the following Interesting results.
1. Si(111) 7x7 clean surface
Desorption of NO at 161 K, and 0_2, N_2 and N_2O at 168 Kwas measured. According to the other group, the desorption of N_2, NO and N_2O was reported at 〜150 K However, our work found (i) the desorption of O_2 also, and (ii) the existence of two different desorption processes because of two different desorption peaks. The different peak temperatures between our results and the previous report arise from the differences of temperature monitoring position, coverage of NO, and temperature increasing speed. Thus, the following results can be comparable at relative temperatures.
2. Si(111) √<3x>√<3> -Ag surface
The shape of the desorption spectrum was similar to that of the dean surface, however, the desorption yield from the former was 〜1/10 of that from the latter. The result indicates that NO gases hardly adsorb and desorb on the √<3>-Ag surface, and it has very different characters from silicon or silver surfaces.
3. Ag(111) islands with a few atomic monolayers/Si(111) surface
Desorption of N_2 at 146 K, N_2O at 210 K, and NO at 325 K, was measured. On the single crystal Ag (111) surface the desorption of N_2O at 180 K, and NO at 380 K. We found the reduction reaction as N_2 desorption, which never proceeds on the single crystal surface, instead, at Ag(111) nano-crystalline islands.
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