2001 Fiscal Year Final Research Report Summary
Formation of Diamond-Like Carbon Film by Electrostatic Microparticle-Impact-Deposition Using Assistance of Ion Beam and Plasma
| Project/Area Number |
12650716
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | Ehime University |
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Principal Investigator |
IDE Takashi Faculty of Engineering, Department of Engineering, Ehime University, Professor, 工学部, 教授 (20029276)
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| Co-Investigator(Kenkyū-buntansha) |
TOYOTA Hiromichi Faculty of Engineering, Department of Mechanical Engineering, Ehime University, Instructor, 工学部, 助手 (00217572)
YAGI Hidetsugu Faculty of Engineering, Department of Mechanical Engineering, Ehime University, Associate Professor, 工学部, 助教授 (40036471)
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| Project Period (FY) |
2000 – 2001
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| Keywords | Diamond-like Carbon Film / Carbon Ultra-fine Particle / Electrostatic Acceleration / Assistance of Magnetic and RF Electric Field / Film Growth Rate / Characteristic of Boundary Friction / Effect of Mapnetron Sputtering / Hopping Conduction |
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| Research Abstract |
(1) Effect of assistance of the magnetic and rf electric fields, and characteristics of the deposited DLC film in microparticle impact coating
(a) When assisted with only magnetic field, the film growth rate increased by about 11.3 times compared with the present dc method. In addition of rf field, it increased by about as much as 14.7 times.
(b) The resistivity of the DLC film and its temperature coefficient increased by applying of electromagnetic field, though the film growth rate decreased. This suggests microstructure of the film changed into an amorphous phase.
(c) As for the relation between the microstructure and the boundary friction characteristic of the film, the behavior of the boundary friction appears strongly in the DLC film with a high content of amorphous phase, which may be due to the high heat of adsorption of adsorbed gas molecule.
(2) Effect of assistance of ion beam in the microparticle beam processing method, and the research on film formation mechanism
(a) The experimental method to clarify the charging phenomenon of microparticle was examined for evaluating of microparticle impact energy, the electron beam irradiation device having a large stable current output was designed and manufactured.
(b) As for the method for making aggromerated microparticles minute and supplying to the charging device, the electrostatic pulverizing method may be used for the charging experiment.
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