| Research Abstract |
This research project was carried out in order to establish basic technologies for creating the healthcare chips that will enable us to collect various, physiologic information promptly from the analysis of the body fluid such as a small amount of blood and urine. The healthcare chip is a kind of the integrated and miniaturized biochemical analysis system that might be called micro TAS or Lab-on-a-chip. Since microchips for the biochemical analysis often function by the combination with an optical measurement or the observation system, not silicon as often used in LSI and/or MEMS but the transparent glass and plastic are often adopted as the substrate material. Therefore, at first this research started from the development of microfabrication and the assembly technology of the glass substrate, and then advanced to the development of new micro analysis chips by applying these technologies. Major research results obtained in this projects are (1) application of quartz etching technology
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to the fabrication of microcapillary electrophoresis chips, (2) deep etching of borosilcate glass in high density fluorine-based plasmas, (3) fabrication of microcapillary electrophoresis devices on borosilicate glass and evaluation of their operation characteristics, (4) fabrication of multilayer microfluidic devices using anodic bonding, (5) surface treatment in microfluidic device for the detection of living body sample by impedance spectroscopy, (6) detection of simple cells by impedance spectroscopy on a microcapillary chip with completely buried microelectrodes, (7) on chip separation and operation technology of blood cells using dielectrophoresis, (8) immunoelectrophoresis of blood cells on a microcapillary electrophoresis chip, (9) development of cell sorter chips using repulsive dielectrophoretic force, (10) microelectrode integration to microfluidic devices by impurity doping into polycrystalline silicon films, and (11) fabrication of nano sorter chips by self-aligned electrode formation process. Less
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