2003 Fiscal Year Annual Research Report

ナノメートルの精度で動く分布型マイクロ・ナノマシン

Research Project

Project/Area Number	13305010
Research Institution	Tohoku University
Principal Investigator	江刺正喜東北大学, 未来科学技術共同研究センター, 教授 (20108468)
Co-Investigator(Kenkyū-buntansha)	田中秀治東北大学, 大学院・工学研究科, 助教授 (00312611) 小野崇人東北大学, 大学院・工学研究科, 助教授 (90282095) 羽根一博東北大学, 大学院・工学研究科, 教授 (50164893) 芳賀洋一東北大学, 大学院・工学研究科, 講師 (00282096)
Keywords	マイクロマシニング / マイクロマシン / ナノマシン / MEMS / センサ / アクチュエータ / データストレージ / 振動子
Research Abstract	半導体微細加工技術をベースとした「マイクロマシニング」によって、センサやアクチュエータを集積化させた分布型マイクロ・ナノマシンを作ることができる。本研究ではナノ駆動機構とその関連技術について、設計、製作、物理現象の解明を行った。具体的には、圧電セラミックス基板を加工して一体型(モノリシック)の6軸ステージを製作した。これは走査プローブ顕微鏡を始め、本研究で進めている各種マルチプローブデータストレージやマルチ鏡筒電子ビーム露光装置、あるいは細胞レベルのMRI装置などに用いることができる。またサブミクロンの間隔で多数の対向電極構造が分布した分布型静電マイクロアクチュエータを製作した。高密度記録で、多数のプローブにより同時に記録や読出ができるマルチプローブデータストレージの開発を行い、ダイアモンドヒータプローブで基板上のポリマ薄膜に熱機械的に記録するもの、ダイアモンドプローブによる強誘電体に記録するもの、また導電性ポリマ薄膜に通電して記録し導電性変化で読み出すものなどを開発した。カーボンナノチューブなどによる電界放射電子源と静電レンズを組み合わせた集束電子ビーム源を多数配列させ、非接触データ記録や並列電子ビーム露光を行う装置に関する基礎実験を行った。この他、静電力によるナノ駆動機構を持つマルチプローブやボータイアンテナ型光プローブ、極薄薄膜の共振周波数変化を用いた高感度センサなどの研究成果も得ており、研究目的を達成した。

Research Products

(38 results)

All Other

All Publications (38 results)

[Publications] J.H.Bae, T.Ono, M.Esashi: "Scanning Probe with an Integrated Diamond Heater Element for Nanolithography"Applied Physics Letters. 82・5. 814-816 (2003)
[Publications] T.Ono, X.Li, H.Miyashita, M.Esashi: "Mass Sensing of Adsorbed Molecules in Sub-picogram Sample with Ultrathin Silicon Resonator"Review of Scientific Instruments. 74・3. 1240-1243 (2003)
[Publications] X.Li, T.Ono, R.Lin, M.Esashi: "Resonance Enhancement of Micromachined Resonators with Strong Mechanical-coupling between two Degrees of Freedom"Microelectronic Engineering. 65. 1-12 (2003)
[Publications] T.Ono, S.Sugumoto, H.Miyashita, M.Esashi: "Mechanical Energy Dissipation of Multiwalled Carbon Nanotube in Ultra high Vacuum"Jpn.J.Appli.Phys.. 42Part2・6B. L683-L684 (2003)
[Publications] T.Ono, C.Konoma, H.Miyashita, Y.Kanamori, M.Esashi: "Pattern Transfer of Self-Ordered Structure with Diamond Mold"Jpn.J.Appli.Phys.. 42Part1・6. 3867-3870 (2003)
[Publications] P.N.Minh, L.T.T.Tuyen, T.Ono, H.Miyashita, Y.Suzuki, H.Miinura, M.Esashi: "Selective Growth of Carbon Nanotubes on Si Microfabricated Tips and Application for Electron Field Emitters"J.Vac.Sci.Technol.B. 21・4. 1705-1709 (2003)
[Publications] T.Ono, S.Yoshida, M.Esashi: "Electrical Modification of a Conductive Polymer Using a Scanning Probe Microscope"Nanotechnology. 14. 1051-1054 (2003)
[Publications] T.Ono, D.F.Wang, M.Esashi: "Time Dependence of Energy Dissipation in Resonating Slicon Cantilevers in Ultrahigh Vacuum"Applied Physics Letters. 83・10. 1950-1952 (2003)
[Publications] X.Li, T.Ono, Y.Wang, M.Esashi: "Ultrathin Single-Crystal-Silicon Cantilever Resonators : Fabrication Technology and Significant Specimen Size Effect on Young's Modulus"Applied Physics Letters. 83・15. 3081-3083 (2003)
[Publications] D.F.Wang, T.Ono, M.Esashi: "Crstallographic Influence on Nanornechanics of (100)-oriented Silicon Resonator"Applied Physics Letters. 83・15. 3189-3191 (2003)
[Publications] T.Ono, M.Esashi: "Magnetic Force and Optical Force Sensing with Ultrathin Silicon Resonator"Review of Scientific Instruments. 74・12. 5141-5146 (2003)
[Publications] D.Zhang, C.Chang, T.Ono, M.Esashi: "A Piezodriven XY-microstage for Multiprobe Nanorecording"Sensors and Actuators, A. 108. 230-233 (2003)
[Publications] T.Abe, X.Li, M.Esashi: "Endpoint Detectable Plating Through Femtosecond Laser Drilled Glass Wafers for Electrical Interconnections"Sensors and Actuators, A. 108. 234-238 (2003)
[Publications] J.H.Bae, T.Ono, M.Esashi: "Boron-doped Diamond Scanning Probe for Thermo-mechanical Nanolithography"Diamond and Related Materials. 12. 2128-2135 (2003)
[Publications] T.Ono, H.Miyashita, M.Esashi: "Nanomechanical Structure with Integrated Carbon Nanotube"Jpn.J.Appl.Phys.. 43・2. 855-859 (2004)
[Publications] 小野崇人, ファンミンゴ, 江刺正喜: "ナノリソグラフィーをめざすマイクロシステム"O Plus E. 25・12. 1362-1368 (2003)
[Publications] H.Miyashita, T.Ono, M.Esashi: "Nanomechanical Structures with an Integrated Carbon Nanotube"Digest of Technical Papers, Transducers'03. 12. 182-185 (2003)
[Publications] D.F.Wang, T.Ono, M.Esashi: "Crystallographic Influence on Nanomechanics of Ultra-Thin Silicon Resonators"Digest of Technical Papers, Transducers'03. 12. 336-339 (2003)
[Publications] K.Iwami, T.Ono, E.Oesterschlze, M.Esashi: "Electrostatic Actuator Integrated Optical Near-Field Probe with Bow-Tie Antenna for High"Digest of Technical Papers, Transducers'03. 12. 548-551 (2003)
[Publications] C.H.Tsai, P.N.Minh, T.Ono, N.Sato, Le T.T.Tuyen, P.H.Khoi, Y.W.Lee, C.Y.Wu, M.Esashi: "Carbon Nanotube Integrated on Silicon Tips for Electron Field Emitter : Tip Apex Patterning and Emission Characterization"Digest of Technical Papers, Transducers'03. 12. 770-773 (2003)
[Publications] J.H.Bae, P.N.Minh, T.Ono, M.Esashi: "Diamond Micro-Schottky Emitter with an Integrated Heating Element"Digest of Technical Papers, Transducers'03. 12. 778-781 (2003)
[Publications] P.N.Minh, T.Ono, N.Sato, H.Mimura, M.Esashi: "Micro Electron Field Emitter Array with Focus Lenses for Multi-Electron Beam Lithography"Digest of Technical Papers, Transducers'03. 12. 1295-1298 (2003)
[Publications] D.Y.Zhang, T.Ono, M.Esashi: "Piezoactuator-Integrated Monolithic Microstage with Six Degrees of Fredom"Digest of Technical Papers, Transducers'03. 12. 1518-1521 (2003)
[Publications] M.Hara, J.Kuypers, T.Abe, M.Esashi: "Aluminium Nitride Based Thin Film Bulk Acoustic Resonator Using Germanium Sacrificial"Digest of Technical Papers, Transducers'03. 12. 1780-1783 (2003)
[Publications] M.Hara, J.Kuypers, T.Abe, M.Esashi: "MEMS Based Thin Film 2GHz Resonator for CMOS Integration"2003 IEEE MTT-S Internl. Microwave Symposium Digest. 1797-1800 (2003)
[Publications] iP.N.Minh, T.Ono, N.Sato, H.Mimura, K.Yokoo, M.Esashi: "From SOI Wafer to Micro Electron Field Emission Device with Focus Lenses"Technical Digest of IVMC2003. 179-180 (2003)
[Publications] S.Sugimoto, P.N.Minh, T.Ono, M.Esashi: "Field Emission from a Single Carbon-Nanocoil"Technical Digest of IVMC2003. 233-234 (2003)
[Publications] J.H.Bae, P.N.Minh, T.Ono, M.Esashi: "A Schottky Emitter Using Boron-Doped Diamond"Technical Digest of IVMC2003. 247-248 (2003)
[Publications] S.Sugimoto, P.N.Minh, T.Ono, M.Esashi: "Field Emission from a Individual Carbon Nanocoil"The Intern. Conf. on the Science and Application of Nanotubes 2003. 183 (2003)
[Publications] K.Iwanii, T.Ono, E.Oesterschulze, M.Esashi: "Adjustable Bow-tie Antenna Optical Near-field Probe with Electrostatic Actuator for High Transmission Efficiency and Resolution"Proc. Of the the 4^<th> Asia-Pasific International Conference on Near-Field Optics(APNFO-4). 4. 55-56 (2003)
[Publications] T.Ono, D.F.Wang, M.Esashi: "Mass Sensing with Resonating Ultrathin Double Beams"Second IEEE Intn. Conf. on Sensors (IEEE Sensors 2003). 2. 825-829 (2003)
[Publications] P.N.Minh, P.N.Hong, T.M.Cuong, T.Ono, M.Esashi: "Utilization of Carbon Nanotube and Diamond Electron Field Emission Devices"Proceeding MEMS' 2004. 17. 430-433 (2003)
[Publications] H.Takahashi, T.Ono, Y.Cho, M.Esashi: "Diamond Probe for Ultra-High-Density Ferroelectric Data Storage Based on Scanning Nonlinear Dielectric Microscopy"Proceeding MEMS' 2004. 17. 536-539 (2003)
[Publications] S.Watanabe, K.Horio, K.Muta, M.Esashi: "Development of Multi-Channel Variable Attenuators Using Electrostatic Comb Dribe Actuator"Proceedings of the 20th Sensor Symposium. 20. 25-28 (2003)
[Publications] Y.Kawai, T.Ono, M.Esashi: "Fabrication of Distributed Silicon Nanomechanical Structure"Proceedings of the 20th Sensor Symposium. 20. 61-64 (2003)
[Publications] S.Yoshida, T.Ono, T.Abe, M.Esashi: "Electrical Modification on Conductive Polymer Using a Scanning Probe Microscope"Proceedings of the 20th Sensor Symposium. 20. 365-370 (2003)
[Publications] M.Esashi, T.Ono: "Micro-Nano Electro Mechanical Systems by Silicon Bulk-Micromachining"Intn. Conf. On Advanced Technology in Experimental Mechanics 2003 (ATEM'03). 113 (2003)
[Publications] M.Esashi, T.Ono, P.N.Minh: "Micro-Nano Electro Mechanical Systems"Korea-Japan Joint Symposium on Nanoengineering 2003. 13-23 (2003)

2003 Fiscal Year Annual Research Report

ナノメートルの精度で動く分布型マイクロ・ナノマシン

Principal Investigator

江刺 正喜 東北大学, 未来科学技術共同研究センター, 教授 (20108468)

Research Products

[Publications] J.H.Bae, T.Ono, M.Esashi: "Scanning Probe with an Integrated Diamond Heater Element for Nanolithography"Applied Physics Letters. 82・5. 814-816 (2003)

[Publications] T.Ono, X.Li, H.Miyashita, M.Esashi: "Mass Sensing of Adsorbed Molecules in Sub-picogram Sample with Ultrathin Silicon Resonator"Review of Scientific Instruments. 74・3. 1240-1243 (2003)

[Publications] X.Li, T.Ono, R.Lin, M.Esashi: "Resonance Enhancement of Micromachined Resonators with Strong Mechanical-coupling between two Degrees of Freedom"Microelectronic Engineering. 65. 1-12 (2003)

[Publications] T.Ono, S.Sugumoto, H.Miyashita, M.Esashi: "Mechanical Energy Dissipation of Multiwalled Carbon Nanotube in Ultra high Vacuum"Jpn.J.Appli.Phys.. 42Part2・6B. L683-L684 (2003)

[Publications] T.Ono, C.Konoma, H.Miyashita, Y.Kanamori, M.Esashi: "Pattern Transfer of Self-Ordered Structure with Diamond Mold"Jpn.J.Appli.Phys.. 42Part1・6. 3867-3870 (2003)

[Publications] P.N.Minh, L.T.T.Tuyen, T.Ono, H.Miyashita, Y.Suzuki, H.Miinura, M.Esashi: "Selective Growth of Carbon Nanotubes on Si Microfabricated Tips and Application for Electron Field Emitters"J.Vac.Sci.Technol.B. 21・4. 1705-1709 (2003)

[Publications] T.Ono, S.Yoshida, M.Esashi: "Electrical Modification of a Conductive Polymer Using a Scanning Probe Microscope"Nanotechnology. 14. 1051-1054 (2003)

[Publications] T.Ono, D.F.Wang, M.Esashi: "Time Dependence of Energy Dissipation in Resonating Slicon Cantilevers in Ultrahigh Vacuum"Applied Physics Letters. 83・10. 1950-1952 (2003)

[Publications] X.Li, T.Ono, Y.Wang, M.Esashi: "Ultrathin Single-Crystal-Silicon Cantilever Resonators : Fabrication Technology and Significant Specimen Size Effect on Young's Modulus"Applied Physics Letters. 83・15. 3081-3083 (2003)

[Publications] D.F.Wang, T.Ono, M.Esashi: "Crstallographic Influence on Nanornechanics of (100)-oriented Silicon Resonator"Applied Physics Letters. 83・15. 3189-3191 (2003)

[Publications] T.Ono, M.Esashi: "Magnetic Force and Optical Force Sensing with Ultrathin Silicon Resonator"Review of Scientific Instruments. 74・12. 5141-5146 (2003)

[Publications] D.Zhang, C.Chang, T.Ono, M.Esashi: "A Piezodriven XY-microstage for Multiprobe Nanorecording"Sensors and Actuators, A. 108. 230-233 (2003)

[Publications] T.Abe, X.Li, M.Esashi: "Endpoint Detectable Plating Through Femtosecond Laser Drilled Glass Wafers for Electrical Interconnections"Sensors and Actuators, A. 108. 234-238 (2003)

[Publications] J.H.Bae, T.Ono, M.Esashi: "Boron-doped Diamond Scanning Probe for Thermo-mechanical Nanolithography"Diamond and Related Materials. 12. 2128-2135 (2003)

[Publications] T.Ono, H.Miyashita, M.Esashi: "Nanomechanical Structure with Integrated Carbon Nanotube"Jpn.J.Appl.Phys.. 43・2. 855-859 (2004)

[Publications] 小野崇人, ファン ミンゴ, 江刺正喜: "ナノリソグラフィーをめざすマイクロシステム"O Plus E. 25・12. 1362-1368 (2003)

[Publications] H.Miyashita, T.Ono, M.Esashi: "Nanomechanical Structures with an Integrated Carbon Nanotube"Digest of Technical Papers, Transducers'03. 12. 182-185 (2003)

[Publications] D.F.Wang, T.Ono, M.Esashi: "Crystallographic Influence on Nanomechanics of Ultra-Thin Silicon Resonators"Digest of Technical Papers, Transducers'03. 12. 336-339 (2003)

[Publications] K.Iwami, T.Ono, E.Oesterschlze, M.Esashi: "Electrostatic Actuator Integrated Optical Near-Field Probe with Bow-Tie Antenna for High"Digest of Technical Papers, Transducers'03. 12. 548-551 (2003)

[Publications] C.H.Tsai, P.N.Minh, T.Ono, N.Sato, Le T.T.Tuyen, P.H.Khoi, Y.W.Lee, C.Y.Wu, M.Esashi: "Carbon Nanotube Integrated on Silicon Tips for Electron Field Emitter : Tip Apex Patterning and Emission Characterization"Digest of Technical Papers, Transducers'03. 12. 770-773 (2003)

[Publications] J.H.Bae, P.N.Minh, T.Ono, M.Esashi: "Diamond Micro-Schottky Emitter with an Integrated Heating Element"Digest of Technical Papers, Transducers'03. 12. 778-781 (2003)

[Publications] P.N.Minh, T.Ono, N.Sato, H.Mimura, M.Esashi: "Micro Electron Field Emitter Array with Focus Lenses for Multi-Electron Beam Lithography"Digest of Technical Papers, Transducers'03. 12. 1295-1298 (2003)

[Publications] D.Y.Zhang, T.Ono, M.Esashi: "Piezoactuator-Integrated Monolithic Microstage with Six Degrees of Fredom"Digest of Technical Papers, Transducers'03. 12. 1518-1521 (2003)

[Publications] M.Hara, J.Kuypers, T.Abe, M.Esashi: "Aluminium Nitride Based Thin Film Bulk Acoustic Resonator Using Germanium Sacrificial"Digest of Technical Papers, Transducers'03. 12. 1780-1783 (2003)

[Publications] M.Hara, J.Kuypers, T.Abe, M.Esashi: "MEMS Based Thin Film 2GHz Resonator for CMOS Integration"2003 IEEE MTT-S Internl. Microwave Symposium Digest. 1797-1800 (2003)

[Publications] iP.N.Minh, T.Ono, N.Sato, H.Mimura, K.Yokoo, M.Esashi: "From SOI Wafer to Micro Electron Field Emission Device with Focus Lenses"Technical Digest of IVMC2003. 179-180 (2003)

[Publications] S.Sugimoto, P.N.Minh, T.Ono, M.Esashi: "Field Emission from a Single Carbon-Nanocoil"Technical Digest of IVMC2003. 233-234 (2003)

[Publications] J.H.Bae, P.N.Minh, T.Ono, M.Esashi: "A Schottky Emitter Using Boron-Doped Diamond"Technical Digest of IVMC2003. 247-248 (2003)

[Publications] S.Sugimoto, P.N.Minh, T.Ono, M.Esashi: "Field Emission from a Individual Carbon Nanocoil"The Intern. Conf. on the Science and Application of Nanotubes 2003. 183 (2003)

[Publications] K.Iwanii, T.Ono, E.Oesterschulze, M.Esashi: "Adjustable Bow-tie Antenna Optical Near-field Probe with Electrostatic Actuator for High Transmission Efficiency and Resolution"Proc. Of the the 4^<th> Asia-Pasific International Conference on Near-Field Optics(APNFO-4). 4. 55-56 (2003)

[Publications] T.Ono, D.F.Wang, M.Esashi: "Mass Sensing with Resonating Ultrathin Double Beams"Second IEEE Intn. Conf. on Sensors (IEEE Sensors 2003). 2. 825-829 (2003)

[Publications] P.N.Minh, P.N.Hong, T.M.Cuong, T.Ono, M.Esashi: "Utilization of Carbon Nanotube and Diamond Electron Field Emission Devices"Proceeding MEMS' 2004. 17. 430-433 (2003)

[Publications] H.Takahashi, T.Ono, Y.Cho, M.Esashi: "Diamond Probe for Ultra-High-Density Ferroelectric Data Storage Based on Scanning Nonlinear Dielectric Microscopy"Proceeding MEMS' 2004. 17. 536-539 (2003)

[Publications] S.Watanabe, K.Horio, K.Muta, M.Esashi: "Development of Multi-Channel Variable Attenuators Using Electrostatic Comb Dribe Actuator"Proceedings of the 20th Sensor Symposium. 20. 25-28 (2003)

[Publications] Y.Kawai, T.Ono, M.Esashi: "Fabrication of Distributed Silicon Nanomechanical Structure"Proceedings of the 20th Sensor Symposium. 20. 61-64 (2003)

[Publications] S.Yoshida, T.Ono, T.Abe, M.Esashi: "Electrical Modification on Conductive Polymer Using a Scanning Probe Microscope"Proceedings of the 20th Sensor Symposium. 20. 365-370 (2003)

[Publications] M.Esashi, T.Ono: "Micro-Nano Electro Mechanical Systems by Silicon Bulk-Micromachining"Intn. Conf. On Advanced Technology in Experimental Mechanics 2003 (ATEM'03). 113 (2003)

[Publications] M.Esashi, T.Ono, P.N.Minh: "Micro-Nano Electro Mechanical Systems"Korea-Japan Joint Symposium on Nanoengineering 2003. 13-23 (2003)

江刺正喜東北大学, 未来科学技術共同研究センター, 教授 (20108468)

[Publications] 小野崇人, ファンミンゴ, 江刺正喜: "ナノリソグラフィーをめざすマイクロシステム"O Plus E. 25・12. 1362-1368 (2003)