Development of four component optical interference micro accelerometer for dowohole seismic measurement

2002 Fiscal Year Final Research Report Summary

• Project/Area Number: 13555278
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 展開研究
• Research Field: 資源開発工学
• Research Institution: Tohoku University
• Principal Investigator: NIITSUMA Hiroaki Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (90108473)
• Co-Investigator(Kenkyū-buntansha): MORIYA Hirokazu Tohoku University, Graduate School of Engineering, Tohoku University, Lecturer, 大学院・工学研究科, 講師 (60261591) ; ASANUMA Hiroshi Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (50250717) ; ESASHI Masayoshi Tohoku University, New Industry Creation Hatchery Center, Professor, 未来科学技術共同研究センター, 教授 (20108468)
• Project Period (FY): 2001 – 2002
• Keywords: MEMS / Microsensor / Optical Accelerometer / Accelerometer / FPI / Multiplexing / Downhole seismic measurement / 4C detector

Research Abstract

(a)Design of interference-type accelerometers: The frequency characteristics and sensitivity of the accelerometers were re-investigated and dimensions of the parts were decided.
(b)Fabrication: We have designed a process chart for the microsensor and fabricated the sensor using facilities for micromechanical systems equiooed in VBL, Tohoku University. Morn than 10 sensors with expected interference pattern were fabricated.
(c)Evaluation of the microsensors: The interference pattern, static characteristic and dynamic characteristics of the microsensors were evaluated in Lab. Then the sensors were mounted onto a metal-mount for 4C detector. Its static characteristics was investigated.
(d)Field test: The 4C detector was set at the bottom of borehole in test site on campus. Artificial seismic signals from downhole airgun was detected by the 4C detector, and its in-situ performance was evaluated.