| Co-Investigator(Kenkyū-buntansha) |
SHIMIZU Jun IBARAKI UNIV., College of Engineering, RESEARCH ASSOCIATE, 工学部, 助手 (40292479)
EDA Hiroshi IBARAKI UNIV., College of Engineering, PROFESSOR, 工学部, 教授 (60007995)
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| Research Abstract |
Recently micro/nano technology has made it possible to access a single molecule or atom Micro electronic-mechalnical system (MEMS) is the major driving force in making micro components. However, MEMS is based on the photolithography technologies and thereby limits the possible material and structure respectively in silicon and 2D. The electronic and optical industries are looking for multiple principles to access different materials in 3-dimensional manner according to each objective.
Mechanical micro-machining is one of the most promising technologies to fulfill the demands of high integration in electronic and optical applications. The conventional mechanical machining normally requires multi-stage processes for machined parts to meet ultra precision demands. This makes productivity low and cost high, yet risks in positioning errors when the parts is transferred from one machine to another.
This research aims to developing a multifunctional micro-machining system capable of micro- mill
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ing, turning grinding, buffing, polishing, EDM, ECM and laser machining at a single set-up. The multifunction enables to fabricate different materials with the optimal manner, while the single set attains the repeatability which is critical in dealing with the meso/micro components. This report describes the design concept of system and its core technologies, and uses a micro aspherical lens mold as a test vehicle to investigate the multifunctional capability. The results are summarized as follows ;
(1) The developed system is capable of micro- milling turning, grinding, buffing, polishing, EDM, ECM, laser machining and their combinations at a single set-up.
(2) The system offers the optimal machining method to access different kinds of material in 3D manner.
(3) The tool wear becomes relatively severer and no longer negligible as its dimension is smaller. On-line tool compensation is then essential to achieve ultra precision in micro machining.
(4) Both surface roughness and removal rate achievable in EDM are proportional to the discharge. Less
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