2004 Fiscal Year Final Research Report Summary
SMART MICRO CHIP BY SELECTIVE GROWN Si-MICROPROBE ELECTRODE ARRAY ON INTEGRATED CIRCUIT
| Project/Area Number |
14205044
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Toyohashi University of Technology |
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Principal Investigator |
ISHIDA Makoto Toyohashi University of Technology, Faculty of Engineering, Professor, 工学部, 教授 (30126924)
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| Co-Investigator(Kenkyū-buntansha) |
SAWADA Kazuaki Toyohashi University of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (40235461)
TAKAO Hidekuni Toyohashi University of Technology, Faculty of Engineering, Associate, 工学部, 助手 (40314091)
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| Project Period (FY) |
2002 – 2004
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| Keywords | Smart chip / Microprobe electrode / Single crystalline silicon probe array / Vapor-liquid-solid growth / Analysis of neurons / Retina, neuroscience / MOSFET on Si(111) / Micro-Nano technology |
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| Research Abstract |
Study of nervous system by highly complex structures is a key problem in modern neuroscience. Understanding of nervous systems involves analysis of the great number of neurons in the tissue. Here we proposed a new electrode device, which is a high-density penetrating silicon (Si) microprobe electrode array, each with diameter similar to neuron, by selective Si growth using catalytic-gold (Au) and disilane (Si_2H_6) gas source. Diameter, position, and length of the Si probes were controlled. The diameter and density were reduced by 1/10, respectively, compared with previous microelectrodes. Low conductance of the probes was realized, and the mechanical strength of the probe was enough to withstand the neural penetration. In addition, the Si microprobes were fabricated on integrated circuits (IC), improving the performance of the electrode device. We also show the first neural recording demonstrated with a retina of carp (Cyrpinus carpio). Consequently, the Si probes recorded neural signals in the retina. In neuroscience, the Si microprobe array chip becomes an effective technique to provide accurate information from the neurons and allow understanding the mechanism of nervous system.
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Research Products
(62 results)
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[Journal Article] Smart Microchips for Bio-Medical Applications2003
Author(s)
Makoto Ishida
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Journal Title
Second Joint Congress -KENSA 2003- The 43rd Annual Meeting of the Japan Society of Clinical Chemistry (JSCC), The 50th National Congress of the Japanese Society of Laboratory Medicine (JSLM) (Invited)
Pages: 51
Description
「研究成果報告書概要(和文)」より
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[Journal Article] Nano-Micro Si wire array on Si(111) IC chips and Device Applications2003
Author(s)
Makoto Ishida, Takeshi Kawano, Masato Futagawa, Yuji Arai, Hidekuni Takao, Kazuaki Sawada
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Journal Title
Sixth International Conference on New Phenomena in mesoscopic Structures-Fourth International Conference on Surfaces and interfaces of mesoscopic Devices (NPMS-6/SIMD-4), Maui, Hawaii, USA, November 30-December 5
Pages: 141-142
Description
「研究成果報告書概要(欧文)」より
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