2003 Fiscal Year Final Research Report Summary
The control of the flow in the micro channel with the nano-flow sensors
| Project/Area Number |
14550228
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | The University of Tokyo |
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Principal Investigator |
ICHIKAWA Yasumasa The University of Tokyo, Graduate School of Information Science and Technology, Professor, 大学院・情報理工学系研究科, 助手 (40134473)
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| Co-Investigator(Kenkyū-buntansha) |
HOSHINO Kazunori The University of Tokyo, Graduate School of Information Science and Technology, Lecturer, 大学院・情報理工学系研究科, 講師 (30361546)
MATSUMOTO Kiyoshi The University of Tokyo, Graduate School of Information Science and Technology, Associate Professor, 大学院・情報理工学系研究科, 助教授 (10282675)
SHIMOYAMA Isao The University of Tokyo, Graduate School of Information Science and Technology, Professor, 大学院・情報理工学系研究科, 教授 (60154332)
FUKUDA Katsumi The University of Tokyo, Graduate School of Information Science and Technology, Research Associate, 大学院・情報理工学系研究科, 助手 (20134471)
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| Project Period (FY) |
2002 – 2003
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| Keywords | MEMS / Micro Fluidics / Micro Channel / Mass Flow Rate / Surface Tension / Hot Wire / Micro Venturi / PDMS |
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| Research Abstract |
In the research program for 2 years, we had 3 projects which are the trial manufacture of the channel for the calibration, the development of the flow sensor chip and the performance evaluation of the micro channel which built in the nano flow sensor. With this plan, we have constructed the micro channels which have 100icro meter width and 80micro meter dips with the venture structure, and the performance evaluation was done in 2002. We have some result for the developments of micro fluidics sensor in the experimental research such as the dissolution of the gas to the liquid phase can not be disregarded in the pump and the pressure gage using the difference in gas-liquid interface, methods of the micro channel design and so on. In 2003, we have constructed the micro-pumps with the electro osmotic flow and we have obtained the basic knowledge on the carbon nano-tube flow sensor. We succeeded in carrying out the experiment in which the carbon nano-tube is made to grow in the micro structure on silicon wafer, and bridged with the nanotube between the micro structures interval of about 10micro meter.
The possibility of flow velocity distribution in the sub micron region was shown by these experiments.
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Research Products
(10 results)
