2002 Fiscal Year Annual Research Report

高圧力・高密度マイクロ波プラズマ源の開発とその大面積薄膜プロセスへの応用

Research Project

Project/Area Number	14580516
Research Institution	Shizuoka University
Principal Investigator	永津雅章静岡大学, 工学部, 教授 (20155948)
Co-Investigator(Kenkyū-buntansha)	菅井秀郎名古屋大学, 工学研究科, 教授 (40005517)
Keywords	マイクロ波プラズマ / 大面積プラズマCVD / カーボン系薄膜 / ダイヤモンド薄膜 / カーボンナノチューブ / 時間差分法 / 電磁界解析
Research Abstract	平成14年度では大面積液晶ディスプレイ(LCD)パネルのアッシング、あるいは大面積結晶性ダイヤモンドやダイヤモンド状炭素(DLC)薄膜成膜等への応用を目指した大面積・高密度プラズマ装置の開発を行うことを目的とし、以下の研究項目を実施した。 (1)大面積実験装置の試作:大面積プロセスに適応可能な容器断面(口径60cm)をもつステンレス製円筒形真空容器を新規設備備品として設計・製作した。 (2)プラズマ励起方式の検討:従来から研究を行ってきたスロットアンテナ方式と異なる内挿型平板状マイクロ波ランチャーを試作し、大面積プラズマ生成に成功した。この新しいマイクロはランチャーを用いたプラズマ生成方法および装置について特許出願を行った。 (3)プラズマ特性の診断:ヘリウムプラズマあるいはアルゴンプラズマを用い、上記の内挿型平板状マイクロ波ランチヤーにより生成されたプラズマの空間分布をラングミュアプローブにより測定し、プラズマ大面積化及び高密度化のためのアンテナ形状の比較検討を行った。 (4)理論的解析:2.45GHzマイクロ波プラズマの電磁界分布およびプラズマ分布を理論的に解釈するため、Finite Difference Time Domain(FDTD)法を用いた計算機シミュレーションコードを開発し、各種ランチャー構造における電磁界分布解析およびプラズマ生成への影響について調べた。 (5)大面積カーボン系薄膜の成膜実験:圧力10Torrにおいて生成したマイクロ波プラズマを用い、大面積カーボンナノチューブ薄膜の成膜実験を行い、膜厚分布、成膜速度、膜質などの評価を行った。 (6)研究の成果発表:研究成果は、学術論文に3件、国内開催の学会、研究会に19件、国際会議に7件発表し、特許出願2件を行った。

Research Products

(16 results)

All Other

All Publications (16 results)

[Publications] M.Nagatsu: "Characteristics of Hydrogenated Amorphous Carbon Films Deposited by Large-Area Planar Surface Wave Plasma"Diamond Related Materials. Vol.11/3-6. 976-979 (2002)
[Publications] M.Nagatsu: "Diagnostics of Plasma Ball Formed in High Pressure Microwave Plasma For Diamond Film Synthesis"Diamond Related Materials. Vol.11/3-6. 562-566 (2002)
[Publications] M.Nagatsu: "High-energy electrons near the dielectric-plasma boundary in a large-area surface-wave plasma excited at 915 MHz"Appl.Phys.Lett.. Vol.81 No11. 1966-1968 (2002)
[Publications] M.Nagatsu: "Measurements of Electrostatic Density Fluctuations Localized Near Dielectric Window Plate in a Planar Surface-Wave Plasma"Conf.Proc.of 16th European Conf.on Atomic and Molecular Phys.of Ionized Gases/5th Int'l.Conf.on Reactive Plasmas. Vol.2. 287-288 (2002)
[Publications] M.Nagatsu: "Effect of Catalytic Metal Composition on Characteristics of Amorphous Carbon Films Prepared with Microwave Plasma CVD"Conf.Proc.of 16th European Conf.on Atomic and Molecular Phys.of Ionized Gases/5th Int'l.Conf.on Reactive Plasmas. Vol.1. 339-340 (2002)
[Publications] M.Nagatsu: "FDTD Field Analysis of High-Pressure Microwave Plasma Source for Diamond Film Synthesis and Its Application to Device Enlargement"Conf.Proc.of 16th European Conf.on Atomic and Molecular Phys.of Ionized Gases/5th Int'l.Conf.on Reactive Plasmas. Vol.1. 341-342 (2002)
[Publications] 永津雅章: "ダイヤモンド成膜用マイクロ波プラズマ装置における電磁界解析"マイクロ波効果・応用国際シンポジウム講演要旨集. 134-135 (2002)
[Publications] 永津雅章: "マイクロ波励起大面積表面波プラズマを用いたカーボン系薄膜の形成"マイクロ波効果・応用国際シンポジウム講演要旨集. 124-125 (2002)
[Publications] M.Nagatsu: "FDTD Field Analysis of Two-Oscillators Microwave Plasma CVD System for Large-Area Diamond Film Synthesis"Abstract of 13th European Conf.on Diamond, Diamond-like Materials, Carbon Nanotube, Nitrides & Silicon Carbides. 23-24 (2002)
[Publications] M.Nagatsu: "Characteristics of Metal-composite Amorphous Carbon Films Deposited by Large Area Planar Surface Wave Plasma"Abstract of 13th European Conf.on Diamond, Diamond-like Materials, Carbon Nanotube, Nitrides & Silicon Carbides. 91-92 (2002)
[Publications] M.Nagatsu: "Experimental Study of Electron Energy Distribution Function in Large-Area Surface Wave Plasma"Proc.of 7th JICAST. Vol.1. 203-206 (2002)
[Publications] S.Kurita: "Characteristics of Metal Composited Amorphous Carbon Films Prepared with Surface Wave Plasma"Proc.of 7th JICAST. Vol.1. 372-375 (2002)
[Publications] J.Maeda: "Electromagnetic Field Analysis of Microwave Plasma Device Using Finite Difference Time Domain Method"Proc.of 7th JICAST. 376-379 (2002)
[Publications] S.Kurita: "Production of Metal Catalyst Carbon Films Using Large-area Surface-Wave Plasma"Proc.of 20th Symposium of Plasma Processing. 295-296 (2003)
[Publications] M.Nagatsu: "Low-Temperature Sterilization Using Surface-Wave Plasma"Proc.of 20th Symposium of Plasma Processing. 35-36 (2003)
[Publications] J.Maeda: "Effect of Microwave Superposition in Microwave Plasma Device for Diamond Film Growth"Proc.of 20th Symposium of Plasma Processing. 297-298 (2003)

2002 Fiscal Year Annual Research Report

高圧力・高密度マイクロ波プラズマ源の開発とその大面積薄膜プロセスへの応用

Principal Investigator

永津 雅章 静岡大学, 工学部, 教授 (20155948)

Research Products

[Publications] M.Nagatsu: "Characteristics of Hydrogenated Amorphous Carbon Films Deposited by Large-Area Planar Surface Wave Plasma"Diamond Related Materials. Vol.11/3-6. 976-979 (2002)

[Publications] M.Nagatsu: "Diagnostics of Plasma Ball Formed in High Pressure Microwave Plasma For Diamond Film Synthesis"Diamond Related Materials. Vol.11/3-6. 562-566 (2002)

[Publications] M.Nagatsu: "High-energy electrons near the dielectric-plasma boundary in a large-area surface-wave plasma excited at 915 MHz"Appl.Phys.Lett.. Vol.81 No11. 1966-1968 (2002)

[Publications] M.Nagatsu: "Measurements of Electrostatic Density Fluctuations Localized Near Dielectric Window Plate in a Planar Surface-Wave Plasma"Conf.Proc.of 16th European Conf.on Atomic and Molecular Phys.of Ionized Gases/5th Int'l.Conf.on Reactive Plasmas. Vol.2. 287-288 (2002)

[Publications] M.Nagatsu: "Effect of Catalytic Metal Composition on Characteristics of Amorphous Carbon Films Prepared with Microwave Plasma CVD"Conf.Proc.of 16th European Conf.on Atomic and Molecular Phys.of Ionized Gases/5th Int'l.Conf.on Reactive Plasmas. Vol.1. 339-340 (2002)

[Publications] M.Nagatsu: "FDTD Field Analysis of High-Pressure Microwave Plasma Source for Diamond Film Synthesis and Its Application to Device Enlargement"Conf.Proc.of 16th European Conf.on Atomic and Molecular Phys.of Ionized Gases/5th Int'l.Conf.on Reactive Plasmas. Vol.1. 341-342 (2002)

[Publications] 永津雅章: "ダイヤモンド成膜用マイクロ波プラズマ装置における電磁界解析"マイクロ波効果・応用国際シンポジウム講演要旨集. 134-135 (2002)

[Publications] 永津雅章: "マイクロ波励起大面積表面波プラズマを用いたカーボン系薄膜の形成"マイクロ波効果・応用国際シンポジウム講演要旨集. 124-125 (2002)

[Publications] M.Nagatsu: "FDTD Field Analysis of Two-Oscillators Microwave Plasma CVD System for Large-Area Diamond Film Synthesis"Abstract of 13th European Conf.on Diamond, Diamond-like Materials, Carbon Nanotube, Nitrides & Silicon Carbides. 23-24 (2002)

[Publications] M.Nagatsu: "Characteristics of Metal-composite Amorphous Carbon Films Deposited by Large Area Planar Surface Wave Plasma"Abstract of 13th European Conf.on Diamond, Diamond-like Materials, Carbon Nanotube, Nitrides & Silicon Carbides. 91-92 (2002)

[Publications] M.Nagatsu: "Experimental Study of Electron Energy Distribution Function in Large-Area Surface Wave Plasma"Proc.of 7th JICAST. Vol.1. 203-206 (2002)

[Publications] S.Kurita: "Characteristics of Metal Composited Amorphous Carbon Films Prepared with Surface Wave Plasma"Proc.of 7th JICAST. Vol.1. 372-375 (2002)

[Publications] J.Maeda: "Electromagnetic Field Analysis of Microwave Plasma Device Using Finite Difference Time Domain Method"Proc.of 7th JICAST. 376-379 (2002)

[Publications] S.Kurita: "Production of Metal Catalyst Carbon Films Using Large-area Surface-Wave Plasma"Proc.of 20th Symposium of Plasma Processing. 295-296 (2003)

[Publications] M.Nagatsu: "Low-Temperature Sterilization Using Surface-Wave Plasma"Proc.of 20th Symposium of Plasma Processing. 35-36 (2003)

[Publications] J.Maeda: "Effect of Microwave Superposition in Microwave Plasma Device for Diamond Film Growth"Proc.of 20th Symposium of Plasma Processing. 297-298 (2003)

永津雅章静岡大学, 工学部, 教授 (20155948)