2002 Fiscal Year Annual Research Report

低温CVD薄膜形成における自己組織膜を用いた結晶成長制御とサイト選択成長

Research Project

Project/Area Number	14655239
Research Institution	Nagoya University
Principal Investigator	増田佳丈名古屋大学, 大学院・工学研究科, 助手 (20324460)
Keywords	気相加水分解法 / 二酸化チタン / 自己組織膜 / 薄膜 / ゲート酸化膜 / 誘電体 / MOS-FET / パターニング
Research Abstract	本研究ではMOS-FETのゲート酸化膜(誘電体膜)の代替材料として期待されるTiO_2薄膜を、金属アルコキシドの加水分解性と揮発性を利用した気相加水分解法により、常温・常圧下で作製し、その特性を評価することにより、新規合成プロセス開発を行った。原料のTitanium(IV) isopropoxideと蒸留水をキャリアガス(N_2)によって気体として輸送し、両者を気相中で混合し加水分解反応によって生成するTiO_2をSi基板上に薄膜として析出させた。また、原料ガスにTetraethoxysilaneを混合することで、TiO_2-SiO_2複合膜を析出させ、キャリアガスの流量によって組成比を変化させた。XRDによる結晶化温度の決定、XPSによる組成分析を行った。また電極をつないだMOS構造でのC-V曲線とAFMによる膜厚測定から誘電率を計算し、I-V測定からリーク電流密度を測定、評価した。常圧・室温条件でSi基板上にTiO_2薄膜が形成された。XRD測定から、アモルファス相であることが確認され、400℃・1時間の加熱処理によって結晶化し、アナターゼ相を示した。AFMでは目立った粒界は確認されず、XPSでは残留炭素の存在が示された。TiO_2-SiO_2薄膜も同様にSi基板上に析出し、XPS測定の結果からキャリアガスの流量比を変えることで組成比を制御できることが示された。TiO_2-SiO_2(52/48)薄膜はTiO_2薄膜が結晶化する400℃においても結晶化を抑制することに成功し、700℃で初めてアナターゼ相へ相転移した。MOS構造における電気測定から、TiO_2薄膜の誘電率は40程度、TiO_2-SiO_2(52/48)薄膜は20程度という値が得られた。また、本研究に関しての受賞、新聞発表、招待講演等を下記に記す。日韓セラミックス国際セミナー奨励賞 (2002年11月、増田) 新聞発表日本工業新聞 2002年4月3日(水曜日) 2面招待講演 Yoshitake Masuda, and Kunihito Koumoto Third International Symposium on Biomimetic Materials Processing (BMMP-3), Nagoya, Japan, January 27-29, (2003)

Research Products

(19 results)

All Other

All Publications (19 results)

[Publications] Y.Masuda, M.Itoh, T.Yonezawa, K.Koumoto: "Low-Dimensional Arrangement of SiO_2 Particles"Langmuir. 18(10). 4155-4159 (2002)
[Publications] Y.Masuda, Y.Jinbo, T.Yonezawa, K.Koumoto: "Templated Site-Selective Deposition of Titanium Dioxide on Self-Assembled Monolayers"Chemistry of Materials. 14(3). 1236-1241 (2002)
[Publications] Y.Masuda, T.Sugiyama, K.Koumoto: "Micropattening of anatase TiO_2 thin films from an aqueous solution by site-selective immersion method"J. Mater. Chem.. 12(9). 2643-2647 (2002)
[Publications] Y.Masuda, D.J.Wang, T.Yonezawa, K.Koumoto: "Site-Selective Deposition of TiO_2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Propeties"Key Engineering Materials. 228-229. 125-130 (2002)
[Publications] Y.Masuda, D.J.Wang, W.S.Seo, K.Koumoto: "Fabrication of Micropatterned Dielectric Thin Films on Self-Assembled Monolayers"Key Engineering Materials. 214. 157-162 (2002)
[Publications] Yanfeng Gao, Yoshitake Masuda, Tetsu Yonezawa, Kunihito Koumoto: "Site-Selective Deposition and Micropatterning of SrTiO_3 Thin Film on Self-Assembled Monolayers by the Liquid Phase Deposition Method"Chemistry of Materials. 14. 5006-5014 (2002)
[Publications] Naoto Shirahata, Yoshitake Masuda, Tetsu Yonezawa, Kunihito Koumoto: "Control over Film Thickness of SnO_2 Ultrathin Film Selectively Deposited on a Patterned Self-Assembled Monolayer"Langmuir. 18(26). 10379-10385 (2002)
[Publications] Yanfeng Gao, Yoshitake Masuda, Tetsu Yonezawa, Kunihito Koumoto: "Site-Selective Deposition and Micropatterning of Zirconia Thin Films on Templates of Self-Assembled Monolayers"J. Ceram. Soc. Jpn. 110(5). 379-385 (2002)
[Publications] Yanfeng Gao, Yoshitake Masuda, Zifei Peng, Tetsu Yonezawa, Kunihito Koumoto: "Room Temperature Deposition of a TiO2 thin film from aqueous peroxotitanate solution"J. Matrials Chemistry. 13. 608-613 (2003)
[Publications] K.Koumoto, Y.Masuda, D.J.Wang: "Biomimetic Micropatterning of Titanium Dioxide Thin Films for Gate Dielectrics"Int. J. Soc. Mater. Eng. Resour.. 10(1). 49-52 (2002)
[Publications] D.J.Wang, Y.Masuda, W.S.Seo, K.Koumoto: "Metal-Oxide-Semiconductor (MOS) Devices Composed of Biomimetically Synthesized TiO_2 Dielectric Thin Films"Key Engineering Materials. 214. 163-170 (2002)
[Publications] Daisuke Nagahama, Yoshitake Masuda, Tetsu Yonezawa, Kunihito Koumoto: "Thermoelectric Properties of Textured Ceramics of Co-Containing Layer-Structured Oxide"Key Eng. Mater.. 228-229. 155-160 (2002)
[Publications] Shinya Isobe, Yoshitake Masuda, Shingo Hirano, Toshihiko Tani, Kunihito Koumoto: "Thermoelectric Properties of Highly Textured Zn-In-O Ceramics"Key Eng. Mater.. 228-229. 161-166 (2002)
[Publications] Shinya Isobe, Toshihiko Tani, Yoshitake Masuda, Won-Seon Seo, Kunihito Koumoto: "Thermoelectric Performance of Yttrium-substituted (ZnO)_5In_2O_3 Improved through Ceramic Texturing"Jpn J. Appl. Phys.. 41. 731-732 (2002)
[Publications] Yoshitake Masuda, Shinji Ieda, Kunihito Koumoto: "Site-selective deposition of anatase TiO_2 in an aqueous solution using a seed layer"Langmuir. (in press). (2003)
[Publications] Yoshitake Masuda, Takahiro Koumura, Takashi Ohkawa, Kunihito Koumoto: "Micropatterning of Ni particles on a BaTiO_3 green sheet using a self-assembled monolayer"J. Colloid and Interface Science. (in press). (2003)
[Publications] Yoshitake Masuda, Daisuke Nagahama, Hiroshi Itahara, Toshihiko Tani, Won Seon Seo, Kunihito Koumoto: "Thermoelectric Performance of Bi-and Na-substituted Ca_3Co_4O_9 Improved through Ceramic Texturing"J. Matrials Chemistry. (in press). (2003)
[Publications] 増田佳丈, 斎藤紀子, 河本邦仁: "分子集合体表面局所場を利用したマイクロデバイス"セラミックス. 37(8). 615-620 (2002)
[Publications] 平野晋吾, 磯部真也, 谷俊彦, 増田佳丈, 河本邦仁: "高温熱電変換材料の新展開"Ceramic Data Book 2002. 30. 80-82 (2002)

2002 Fiscal Year Annual Research Report

低温CVD薄膜形成における自己組織膜を用いた結晶成長制御とサイト選択成長

Principal Investigator

増田 佳丈 名古屋大学, 大学院・工学研究科, 助手 (20324460)

Research Products

[Publications] Y.Masuda, M.Itoh, T.Yonezawa, K.Koumoto: "Low-Dimensional Arrangement of SiO_2 Particles"Langmuir. 18(10). 4155-4159 (2002)

[Publications] Y.Masuda, Y.Jinbo, T.Yonezawa, K.Koumoto: "Templated Site-Selective Deposition of Titanium Dioxide on Self-Assembled Monolayers"Chemistry of Materials. 14(3). 1236-1241 (2002)

[Publications] Y.Masuda, T.Sugiyama, K.Koumoto: "Micropattening of anatase TiO_2 thin films from an aqueous solution by site-selective immersion method"J. Mater. Chem.. 12(9). 2643-2647 (2002)

[Publications] Y.Masuda, D.J.Wang, T.Yonezawa, K.Koumoto: "Site-Selective Deposition of TiO_2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Propeties"Key Engineering Materials. 228-229. 125-130 (2002)

[Publications] Y.Masuda, D.J.Wang, W.S.Seo, K.Koumoto: "Fabrication of Micropatterned Dielectric Thin Films on Self-Assembled Monolayers"Key Engineering Materials. 214. 157-162 (2002)

[Publications] Yanfeng Gao, Yoshitake Masuda, Tetsu Yonezawa, Kunihito Koumoto: "Site-Selective Deposition and Micropatterning of SrTiO_3 Thin Film on Self-Assembled Monolayers by the Liquid Phase Deposition Method"Chemistry of Materials. 14. 5006-5014 (2002)

[Publications] Naoto Shirahata, Yoshitake Masuda, Tetsu Yonezawa, Kunihito Koumoto: "Control over Film Thickness of SnO_2 Ultrathin Film Selectively Deposited on a Patterned Self-Assembled Monolayer"Langmuir. 18(26). 10379-10385 (2002)

[Publications] Yanfeng Gao, Yoshitake Masuda, Tetsu Yonezawa, Kunihito Koumoto: "Site-Selective Deposition and Micropatterning of Zirconia Thin Films on Templates of Self-Assembled Monolayers"J. Ceram. Soc. Jpn. 110(5). 379-385 (2002)

[Publications] Yanfeng Gao, Yoshitake Masuda, Zifei Peng, Tetsu Yonezawa, Kunihito Koumoto: "Room Temperature Deposition of a TiO2 thin film from aqueous peroxotitanate solution"J. Matrials Chemistry. 13. 608-613 (2003)

[Publications] K.Koumoto, Y.Masuda, D.J.Wang: "Biomimetic Micropatterning of Titanium Dioxide Thin Films for Gate Dielectrics"Int. J. Soc. Mater. Eng. Resour.. 10(1). 49-52 (2002)

[Publications] D.J.Wang, Y.Masuda, W.S.Seo, K.Koumoto: "Metal-Oxide-Semiconductor (MOS) Devices Composed of Biomimetically Synthesized TiO_2 Dielectric Thin Films"Key Engineering Materials. 214. 163-170 (2002)

[Publications] Daisuke Nagahama, Yoshitake Masuda, Tetsu Yonezawa, Kunihito Koumoto: "Thermoelectric Properties of Textured Ceramics of Co-Containing Layer-Structured Oxide"Key Eng. Mater.. 228-229. 155-160 (2002)

[Publications] Shinya Isobe, Yoshitake Masuda, Shingo Hirano, Toshihiko Tani, Kunihito Koumoto: "Thermoelectric Properties of Highly Textured Zn-In-O Ceramics"Key Eng. Mater.. 228-229. 161-166 (2002)

[Publications] Shinya Isobe, Toshihiko Tani, Yoshitake Masuda, Won-Seon Seo, Kunihito Koumoto: "Thermoelectric Performance of Yttrium-substituted (ZnO)_5In_2O_3 Improved through Ceramic Texturing"Jpn J. Appl. Phys.. 41. 731-732 (2002)

[Publications] Yoshitake Masuda, Shinji Ieda, Kunihito Koumoto: "Site-selective deposition of anatase TiO_2 in an aqueous solution using a seed layer"Langmuir. (in press). (2003)

[Publications] Yoshitake Masuda, Takahiro Koumura, Takashi Ohkawa, Kunihito Koumoto: "Micropatterning of Ni particles on a BaTiO_3 green sheet using a self-assembled monolayer"J. Colloid and Interface Science. (in press). (2003)

[Publications] Yoshitake Masuda, Daisuke Nagahama, Hiroshi Itahara, Toshihiko Tani, Won Seon Seo, Kunihito Koumoto: "Thermoelectric Performance of Bi-and Na-substituted Ca_3Co_4O_9 Improved through Ceramic Texturing"J. Matrials Chemistry. (in press). (2003)

[Publications] 増田 佳丈, 斎藤 紀子, 河本 邦仁: "分子集合体表面局所場を利用したマイクロデバイス"セラミックス. 37(8). 615-620 (2002)

[Publications] 平野 晋吾, 磯部 真也, 谷 俊彦, 増田 佳丈, 河本 邦仁: "高温熱電変換材料の新展開"Ceramic Data Book 2002. 30. 80-82 (2002)

増田佳丈名古屋大学, 大学院・工学研究科, 助手 (20324460)

[Publications] 増田佳丈, 斎藤紀子, 河本邦仁: "分子集合体表面局所場を利用したマイクロデバイス"セラミックス. 37(8). 615-620 (2002)

[Publications] 平野晋吾, 磯部真也, 谷俊彦, 増田佳丈, 河本邦仁: "高温熱電変換材料の新展開"Ceramic Data Book 2002. 30. 80-82 (2002)