2003 Fiscal Year Annual Research Report

非平衡透明酸化物のパラレル合成による光・電子・磁気機能の高効率探索とデバイス実証

Research Project

Project/Area Number	14GS0204
Research Institution	Tohoku University
Principal Investigator	川崎雅司東北大学, 金属材料研究所, 教授 (90211862)
Co-Investigator(Kenkyū-buntansha)	阿藤敏行東北大学, 金属材料研究所, 助手 (40241567) 松倉文礼東北大学, 電気通信研究所, 助手 (50261574) 川添良幸東北大学, 金属材料研究所, 教授 (30091672) 大谷啓太東北大学, 電気通信研究所, 助手 (40333893) 福村知昭東北大学, 金属材料研究所, 助手 (90333880)
Keywords	結晶工学 / ワイドギャップ光学体 / 酸化物半導体 / トランジスタ / スピントロニクス / セラミックス / 光物性 / コンビナトリアル
Research Abstract	本研究では、透明酸化物新材料やデバイズ構造をパラレル合成し、物性やデバイス特性の高速評価を通じて、透明酸化物群を用いた新規な光・電子・磁気デバイスを構築することを目標としている。今年度は、既に見出した機能の発展と新たな機能の探索を両輪に研究を進めた。 (1)磁気機能開発:CoドープTiO_2において、異常ホール効果の観測に初めて成功し、昨年度の強磁性的な磁気光学効果の成果とあわせて、キャリア誘起強磁性半導体である証拠を揃えることができた。本系では測定温度や酸素欠損量の制御で4桁にわたるキャリア濃度の変調が可能であり、異常ホール伝導度が7桁に渡ってスケールすることを見出した。異常ホール効果の出現に対してユニバーザルな機構解明を行うのに適した系であり、今後の理論解明などが望まれる。 (2)電界効果デバイス:実用液晶ディスプレーに使われている非晶質シリコン薄膜トランジスタと同じデザインルールで作製した透明トランジスタについて、閾値電圧やヒステリシスを制御するパラメータを整理した。ZnOへの窒素の添加や、好適なバッファー層の開発で実用レベルに匹敵する制御性を明らかにした。 (3)発光デバイス:昨年度開発した自己バッファーによる超高品質薄膜の光物性を調べ、高次励起子や励起子分子の観測に成功した。p型ZnOの実現に向け、高品質結晶薄膜への効率的な窒素の添加方法(基盤温度変調法)を開発した。高い結晶性を確保したまま高い窒素濃度を確保する手法を確立した。

Research Products

(33 results)

All Other

All Publications (33 results)

[Publications] V.Z.Mordkovich: "Discovery and Optimization of New ZnO-Based Phosphors by Combinatorial Method"Adv.Funct.Mater.. 13. 519-524 (2003)
[Publications] Y.-Z.Yoo: "45° rotational epitaxy of SrTiO_3 thin films on sulfide-buffered Si"Appl.Phys.Lett.. 82. 4125-4127 (2003)
[Publications] K.Ueno: "Field-effect Transistor on SrTiO_3 with Sputtered Al_2O_3 Gate Insulator"Appl.Phys.Lett.. 83. 1755-1757 (2003)
[Publications] A.Tsukazaki: "Layer-by-layer growth of high-optical-quality ZnO film on atomically smooth and lattice relaxed ZnO buffer layer"Appl.Phys.Lett.. 83. 2784-2786 (2003)
[Publications] T.Makino: "Temperature Quenching of Exciton Luminescence Intensity in ZnO/(Mg,Zn)O Nultiple"J.Appl.Phys. 93. 5929-5933 (2003)
[Publications] Faruque M. Hossain: "Modeling and simulation of polycrystalline ZnO thin film transistors"J.Appl.Phys. 94. 7768-7777 (2003)
[Publications] X.Q.Zhang: "Resonant exciton second-harmonic generation in self-assembled ZnO microcrystallite thin films"J.Phys.-Condens.Matter. 15. 5191-5196 (2003)
[Publications] T.Makino: "Temperature Dependence of Absorption Spectra in Anatase TiO_2 Epilayers"J.Phys.Soc.Jpn.. 72. 2696-2697 (2003)
[Publications] K.Tamura: "Donor-acceptor pair luminescence in nitrogen-doped ZnO films grown on lattice-matched ScAlMgO_4 (0001) substrates"Solid State Comum.. 127. 265-269 (2003)
[Publications] X.Q.Zhang: "Optical gain in self-assembled ZnO microcrysallite thin films"J.Cryst.Growth. 259. 286-290 (2003)
[Publications] J.Nishii: "High Mobility Thin Film Transistors with Transparent ZnO Channels"Jpn.J.Appl.Phys.. 42. L347-L349 (2003)
[Publications] B.P.Zhang: "Epitaxial Growth and Polarity of ZnO Films on Sapphire (0001) Substrates by Low-Pressure Metal Organic Chemical Vapor Deposision"Ipn.J.Appl.Phys.. 42. 2291-2295 (2003)
[Publications] Y.Z.Yoo: "Heteroepitaxy of Hexagonal ZnS Thin Films Directly on Si (111)"Jpn.J.Appl.Phys.. 42. 7029-7032 (2003)
[Publications] K.Shibuya: "Growth and structure of wide-gap insulator films on SrTiO_3"Solid.State.Elec.. 47. 2211-2214 (2003)
[Publications] K.Shibuya: "Materials selection for SrTiO_3 -based epitaxial oxide field-effect devices"Mat.Res.Soc.Symp.Proc.. 747. 275-280 (2003)
[Publications] T.Makino: "Absorption-edge singularity observed at room-temperature in n-type ZnO thin films"Physics of semiconductors 2002 : proceedings of the 26th International Conference on the Physics of Semiconductors. D27 (2003)
[Publications] 川崎雅司: "ワイドギャップ酸化物半導体を用いた透明スピンエレクトロニクス"未来材料. 3. 30-36 (2003)
[Publications] Y.-Z.Yoo: "V defects of ZnO thin films grown on Si as an ultraviolet optical path"Appl.Phys.Lett.. 84. 502-504 (2004)
[Publications] T.Koida: "Radiative and nonradiative excitonic transitions in nonpolar (11-20) and polar (000-1) and (0001) ZnO epilayers"Appl.Phys.Lett.. 84. 1079-1081 (2004)
[Publications] K.Shibuya: "Domain structure of epitaxial CaHfO_3 gate insulator films on SrTiO_3"Appl.Phys.Lett.. (in press). (2004)
[Publications] J.Okabayashi: "X-Ray Absorption Spectroscopy of Transition-Metal Doped Diluted Magnetic Semicon"J.Appl.Phys.. (in press). (2004)
[Publications] Y.Kato: "Oxygen-Deficient Anatase Precipitated from High-Temperature Plasma"J.Am.Ceram.Soc.. 87. 166-169 (2004)
[Publications] T.Makino: "Internal Electric Field Effect on Luminescence Properties of ZnO/(Mg,Zn)O Quantum Wells"Physica E. (in press). (2004)
[Publications] Franque M.Hossain: "Modeling of Grain Boundary Barrier Modulation in ZnO Invisible Thin Film Transistors"Physica E. (in press). (2004)
[Publications] T.Fukumura: "Exploration of oxide-based diluted magnetic semiconductors toward transparent spintronics"Appl.Surf.Sci.. 223. 62-67 (2004)
[Publications] K.Terai: "Fabrication of lattice-tunable Ba_<1-x>Sr_xTiO_3 buffers on a SrTiO_3 substrate"Appl.Surf.Sci.. 223. 183-187 (2004)
[Publications] N.Okazaki: "Characterization of LiNb_<1-x>Ta_xO_3 composition-spread thin film by the scanning microwave microscope"Appl.Surf.Sci.. 223. 196-199 (2004)
[Publications] M.Sumiya: "SIMS analysis of ZnO films co-doped with N and Ga by temperature gradient pulsed laser deposition"Appl.Surf.Sci.. 223. 206-209 (2004)
[Publications] M.Murakami: "Combinatorial fabrication and characterization of ferromagnetic Ti-Co-O system"Appl.Surf.Sci.. 223. 245-248 (2004)
[Publications] H.Toyosaki: "Anomalous Hall effect governed by electron doping in a room-temperature transparent ferromagnetic semiconductor"Nature Materials. (in press). (2004)
[Publications] M.Lippmaa: "Combinatorial Materials Synthesis "Parallel Synthesis of Artificially Designed Lattices and Devices""MARCEL DEKKER, INC.. 469 (2003)
[Publications] 川崎雅司(分担): "先端化学シリーズII 電気化学/光化学/無機固体/環境ケミカルサイエンス 1.コンビナトリアル固体材料化学"丸善株式会社(日本化学会編). 338 (2003)
[Publications] T.Makino: "Properties, Processes and Application of ZnO "Room-temperature stimulated emission from ZnO multiple quantum wells grown on lattice-matched substrates""British IEE Publishing House (in press). (2004)

2003 Fiscal Year Annual Research Report

非平衡透明酸化物のパラレル合成による光・電子・磁気機能の高効率探索とデバイス実証

Principal Investigator

川崎 雅司 東北大学, 金属材料研究所, 教授 (90211862)

Research Products

[Publications] V.Z.Mordkovich: "Discovery and Optimization of New ZnO-Based Phosphors by Combinatorial Method"Adv.Funct.Mater.. 13. 519-524 (2003)

[Publications] Y.-Z.Yoo: "45° rotational epitaxy of SrTiO_3 thin films on sulfide-buffered Si"Appl.Phys.Lett.. 82. 4125-4127 (2003)

[Publications] K.Ueno: "Field-effect Transistor on SrTiO_3 with Sputtered Al_2O_3 Gate Insulator"Appl.Phys.Lett.. 83. 1755-1757 (2003)

[Publications] A.Tsukazaki: "Layer-by-layer growth of high-optical-quality ZnO film on atomically smooth and lattice relaxed ZnO buffer layer"Appl.Phys.Lett.. 83. 2784-2786 (2003)

[Publications] T.Makino: "Temperature Quenching of Exciton Luminescence Intensity in ZnO/(Mg,Zn)O Nultiple"J.Appl.Phys. 93. 5929-5933 (2003)

[Publications] Faruque M. Hossain: "Modeling and simulation of polycrystalline ZnO thin film transistors"J.Appl.Phys. 94. 7768-7777 (2003)

[Publications] X.Q.Zhang: "Resonant exciton second-harmonic generation in self-assembled ZnO microcrystallite thin films"J.Phys.-Condens.Matter. 15. 5191-5196 (2003)

[Publications] T.Makino: "Temperature Dependence of Absorption Spectra in Anatase TiO_2 Epilayers"J.Phys.Soc.Jpn.. 72. 2696-2697 (2003)

[Publications] K.Tamura: "Donor-acceptor pair luminescence in nitrogen-doped ZnO films grown on lattice-matched ScAlMgO_4 (0001) substrates"Solid State Comum.. 127. 265-269 (2003)

[Publications] X.Q.Zhang: "Optical gain in self-assembled ZnO microcrysallite thin films"J.Cryst.Growth. 259. 286-290 (2003)

[Publications] J.Nishii: "High Mobility Thin Film Transistors with Transparent ZnO Channels"Jpn.J.Appl.Phys.. 42. L347-L349 (2003)

[Publications] B.P.Zhang: "Epitaxial Growth and Polarity of ZnO Films on Sapphire (0001) Substrates by Low-Pressure Metal Organic Chemical Vapor Deposision"Ipn.J.Appl.Phys.. 42. 2291-2295 (2003)

[Publications] Y.Z.Yoo: "Heteroepitaxy of Hexagonal ZnS Thin Films Directly on Si (111)"Jpn.J.Appl.Phys.. 42. 7029-7032 (2003)

[Publications] K.Shibuya: "Growth and structure of wide-gap insulator films on SrTiO_3"Solid.State.Elec.. 47. 2211-2214 (2003)

[Publications] K.Shibuya: "Materials selection for SrTiO_3 -based epitaxial oxide field-effect devices"Mat.Res.Soc.Symp.Proc.. 747. 275-280 (2003)

[Publications] T.Makino: "Absorption-edge singularity observed at room-temperature in n-type ZnO thin films"Physics of semiconductors 2002 : proceedings of the 26th International Conference on the Physics of Semiconductors. D27 (2003)

[Publications] 川崎雅司: "ワイドギャップ酸化物半導体を用いた透明スピンエレクトロニクス"未来材料. 3. 30-36 (2003)

[Publications] Y.-Z.Yoo: "V defects of ZnO thin films grown on Si as an ultraviolet optical path"Appl.Phys.Lett.. 84. 502-504 (2004)

[Publications] T.Koida: "Radiative and nonradiative excitonic transitions in nonpolar (11-20) and polar (000-1) and (0001) ZnO epilayers"Appl.Phys.Lett.. 84. 1079-1081 (2004)

[Publications] K.Shibuya: "Domain structure of epitaxial CaHfO_3 gate insulator films on SrTiO_3"Appl.Phys.Lett.. (in press). (2004)

[Publications] J.Okabayashi: "X-Ray Absorption Spectroscopy of Transition-Metal Doped Diluted Magnetic Semicon"J.Appl.Phys.. (in press). (2004)

[Publications] Y.Kato: "Oxygen-Deficient Anatase Precipitated from High-Temperature Plasma"J.Am.Ceram.Soc.. 87. 166-169 (2004)

[Publications] T.Makino: "Internal Electric Field Effect on Luminescence Properties of ZnO/(Mg,Zn)O Quantum Wells"Physica E. (in press). (2004)

[Publications] Franque M.Hossain: "Modeling of Grain Boundary Barrier Modulation in ZnO Invisible Thin Film Transistors"Physica E. (in press). (2004)

[Publications] T.Fukumura: "Exploration of oxide-based diluted magnetic semiconductors toward transparent spintronics"Appl.Surf.Sci.. 223. 62-67 (2004)

[Publications] K.Terai: "Fabrication of lattice-tunable Ba_<1-x>Sr_xTiO_3 buffers on a SrTiO_3 substrate"Appl.Surf.Sci.. 223. 183-187 (2004)

[Publications] N.Okazaki: "Characterization of LiNb_<1-x>Ta_xO_3 composition-spread thin film by the scanning microwave microscope"Appl.Surf.Sci.. 223. 196-199 (2004)

[Publications] M.Sumiya: "SIMS analysis of ZnO films co-doped with N and Ga by temperature gradient pulsed laser deposition"Appl.Surf.Sci.. 223. 206-209 (2004)

[Publications] M.Murakami: "Combinatorial fabrication and characterization of ferromagnetic Ti-Co-O system"Appl.Surf.Sci.. 223. 245-248 (2004)

[Publications] H.Toyosaki: "Anomalous Hall effect governed by electron doping in a room-temperature transparent ferromagnetic semiconductor"Nature Materials. (in press). (2004)

[Publications] M.Lippmaa: "Combinatorial Materials Synthesis "Parallel Synthesis of Artificially Designed Lattices and Devices""MARCEL DEKKER, INC.. 469 (2003)

[Publications] 川崎雅司(分担): "先端化学シリーズII 電気化学/光化学/無機固体/環境ケミカルサイエンス 1.コンビナトリアル固体材料化学"丸善株式会社(日本化学会編). 338 (2003)

[Publications] T.Makino: "Properties, Processes and Application of ZnO "Room-temperature stimulated emission from ZnO multiple quantum wells grown on lattice-matched substrates""British IEE Publishing House (in press). (2004)

川崎雅司東北大学, 金属材料研究所, 教授 (90211862)