2003 Fiscal Year Annual Research Report

超高速光ネットワーク用光IC-大規模集積限界への挑戦-

Research Project

Project/Area Number	14GS0212
Research Institution	Tokyo Institute of Technology
Principal Investigator	小山二三夫東京工業大学, 精密工学研究所, 教授 (30178397)
Co-Investigator(Kenkyū-buntansha)	國分泰雄横浜国立大学, 大学院・工学研究院, 教授 (60134839) 植之原裕行東京工業大学, 精密工学研究所, 助教授 (20334526) 宮本智之東京工業大学, 精密工学研究所, 助教授 (70282861) 滝沢國治成蹊大学, 工学部, 教授 (80327973)
Keywords	半導体レーザ / 面発光レーザ / 波長多重 / 光通信 / 光集積回路 / アレイ光源 / リング共振器 / 光波導路
Research Abstract	本研究では,(1)広いスペクトル領域における高性能面発光レーザとその極限性能追求,(2)面発光レーザの波長制御技術の開拓と大規模な2次元集積化,(3)3次元集積化による大規模集積化波長ルーティング回路,の3項目のデバイス研究を中核とし,これらのデバイスを結集して,超高速光ネットワークへの応用と新しいシステムコンセプトの創成を目指して,研究を進めた.具体的な研究成果は,以下の通りである. テラビット級大容量の光データリンクの実現を目指して研究を進め,GaInAs/GaAs高性能量子井戸面発光レーザを製作し,耐戻り光特性に優れた単一波長レーザ光源を実現して,10Gb/sの単一モード光ファイバ伝送に成功した.また,GaInNAsSb量子薄膜,量子ドット構造の成長条件を確立して,1.3〜1.5μm帯発光材料の可能性を示した.さらに,パターン基板を用いた多波長面発光レーザアレイの構成法を確立し,波長間隔20nmの等間隔多波長アレイを実現した.また,光マイクロマシンによる多重垂直光共振器を提案して,フィルタスペクトルの矩形化の道を拓くとともに,新しい中空光導波路による光機能回路の提案し,凹面回折格子を集積した中空光導波路型光分波器の実現,多層膜反射鏡による偏波無依存・低損失スラブ導波路の実現,可変分布ブラッグ反射器の可変特性解明などの成果を得た. 次世代フォトニックネットワーク用Add/Drop波長フィルタとして國分らが提案・実証してきた積層マイクロリング共振器型波長フィルタについては,今年度は,理論面では高密度波長多重光通信における極限符号効率の解明とそれに必要な最適フィルタ特性の解明を行い,また実験面では熱光学効果による波長9.4nmにわたる広範囲なチューナブル化,クロスグリッドバスライン導波路の積層交差構造による交差損失低減などを達成して大規模集積化を可能にした.

Research Products

(82 results)

All Other

All Publications (82 results)

[Publications] Akihiro Onomura, Masakazu Arai, Takashi Kondo, Akihiro Matsutani, Tomoyuki Miyamoto, Fumio Koyama: "Densely integrated multiple-wavelength vertical-cavity surface-emitting laser array"Jpn.J.Appl.Phys.. vol.42 no.5B. L529-L531 (2003)
[Publications] Toru Miura, Fumio Koyama, Akihiro Matsutani, Takahiro Sakaguchi: "Novel variable optical attenuator based on three-dimensional hollow waveguide"Jpn.J.Appl.Phys.. vol.42 no.6A. 3477-3478 (2003)
[Publications] Hiroyuki Uenohara, Takeshi Seki, Kohor Kobayashi: "Investigation of optical packet routing performance of optical packet switch with optical digital/analogue-conversion-type header processor (wavelength label switch)"Electron.Lett.. vol.39, no.14. 1076-1078 (2003)
[Publications] Wiganes Janto, Takeru Amano, Fumio Koyama, Akihiro Matsutani, Takashi Kondo, Masakazu Arai: "Design and fabrication of double-cavity tunable filter using micromachined structure"Jpn.J.Appl.Phys.. vol.42 no.7B. L828-L830 (2003)
[Publications] Yutaka Onishi, Fumio Koyama: "Design of long-wavelength vertical-cavity surface-emitting lasers with resonant optical pumping"Optical Review. vol.10 no.4. 179-181 (2003)
[Publications] Satoshi Shinada, Jiro Hashizume, Fumio Koyama: "Surface plasmon resonance on microaperture vertical-cavity surface-emitting laser with metal grating"Appl.Phys.Lett.. vol.83 no.5. 836-838 (2003)
[Publications] Fumio Koyama: "面発光レーザの現状と動向"Electronic Journal (2004 Opto Devices Technology Outlook). (2004)
[Publications] Takeshi Yamatoya, Fumio Koyama: "Optical preamplifier using antireflection-coating-free semiconductor optical amplifier with signal-inverted ASE"IEEE Photon.Technol.Lett.. vol.15 no.8. 1047-1049 (2003)
[Publications] Shigeki Makino, Tomoyuki Miyamoto, Masataka Ohta, Tetsuya Matsuura, Yasuhisa Matsui, Fumio Koyama: "Thermal annealing effect on self-assembled GaInNAs/GaAs quantum dots grown by chemical beam epitaxy"Physica Status Solidi. vol.0(c) no.4. 1097-1100 (2003)
[Publications] Wiganes Janto, Takeru Amano, Fumio Koyama: "Spot size dependence of filtering characteristics in micromachined GaAlAs/GaAs tunable filters"Jpn.J.Appl.Phys.. vol.42 no.9A. 5654-5655 (2003)
[Publications] Toru Miura, Fumio Koyama, Akihiro Matsutani: "Novel phase-tunable three-dimensional hollow waveguides with variable air core"IEEE Photon.Technol.Lett.. vol.15 no.9. 1240-1242 (2003)
[Publications] Takeshi Uchida, Tomoyuki Miyamoto: "Analysis of transverse-mode control in VCSELs using a convex mirror"Jpn.J.Appl.Phys.. vol.42, no.11. 6883-6886 (2003)
[Publications] Hidekazu Takeda, Hiroyuki Uenohara: "Novel optical signal regeneration system using cascaded wavelength converter based on cross-gain modulation in semiconductor optical amplifier"Jpn.J.Appl.Phys.. vol.42, no.12A. L1446-L1448 (2003)
[Publications] Fumio Koyama: "面発光レーザの製造技術"Electronic Journal (2004 Opto Devices Technology Outlook). (2004)
[Publications] Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama: "Cl2-based inductively coupled plasma etching of InP using internal antenna"Jpn.J.Appl.Phys.. vol.42 no.11. 6837-6838 (2003)
[Publications] Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama: "Low-temperature dry etching of InP by inductively coupled plasma using Hl/Cl2"Jpn.J.Appl.Phys.. vol.42 no.12A. L1414-L1415 (2003)
[Publications] Takeru Amano, Fumio Koyama, Masakazu Arai, Akihiro Matsutani: "Micromachined GaAs/AlGaAs resonant-cavity light emitter with small temperature dependence of emission wavelength"Jpn.J.Appl.Phys.. vol.42, no.11B. L1377-L1379 (2003)
[Publications] Tetsuya Matsuura, Tomoyuki Miyamoto, Takeo Kageyama, Masataka Ohta, Yasutaka Matsui, Fumio Koyama: "Elongation of emission wavelength of GaInAsSb-covered (Ga) InAs quantum dots grown by molecular beam epitaxy"Jpn.J.Appl.Phys.. vol.43 no.1AB. L82-L84 (2004)
[Publications] Takeo Kageyama, Tomoyuki Miyamoto, Masataka Ohta, Tetsuya Matsuura, Yasutaka Matsui, Tatsuya Furuhata, Fumio Koyama: "Low threshold GaInAsSb/GaAs quantum well lasers emitting at 1200 nm-range grown by molecular beam epitaxy"J.Appl.Phys.. (出版予定). (2004)
[Publications] Takashi Kondo, Masakazu Arai, Akihiro Matsutani, Tomoyuki Miyamoto, Fumio Koyama: "Isolator-free 10 Gb/s single-mode fiber data transmission using 1.1 um GaInAs/GaAs vertical cavity surface emitting laser"Electron.Lett.. Vol.40, no.1. 65-66 (2004)
[Publications] Yutaka Onishi, Nobuhiko Nishiyama, Catherine Caneau, Fumio Koyama, Chung-en Zah: "Light-induced transverse-mode switching of a vertical-cavity surface-emitting laser for optical signal processing"Jpn.J.Appl.Phys.. vol.43 no.2A. L187-L189 (2004)
[Publications] Yutaka Onishi, Fumio Koyama: "All-optical regeneration using a vertical-cavity surface-emitting laser with external light injection"IEICE Trans.. (出版予定). (2004)
[Publications] Yutaka Onishi, Nobuhiko Nishiyama, Catherine Caneau, Fumio Koyama, Chung-en Zah: "Dynamic behavior of an all-optical inverter using transverse mode switching in 1.55µm vertical-cavity surface-emitting lasers"IEEE Photon.Technol.Lett.. (出版予定). (2004)
[Publications] Yutaka Onishi, Nobuhiko Nishiyama, Catherine Caneau, Fumio Koyama, Chung-en Zah: "Nonlinear optical input-output characteristics of 1.55 um injection-locked vertical-cavity surface-emitting lasers"Appl.Phys.Lett.. (出版予定). (2004)
[Publications] Masakazu Arai, Takashi Kondo, Akihiro Onumura, Akihiro Matsutani, Tomoyuki Miyamoto, Fumio Koyama: "Multiple-Wavelength GaInAs/GaAs Vertical Cavity Surface Emitting Laser Array With Extended Wavelength Span"IEEE J Slected Topics in Quantum Electronics. Vol.19 no.5. 1367-1373 (2004)
[Publications] Jiro Hashizume, Fumio Koyama: "Plasmon-enhancement of Optical Near-field of Metal Nano-aperture Surface Emitting Laser"Appl.Phys.Lett.. (出版予定). (2004)
[Publications] Hidekazu Takeda, Hiroyuki Uenohara: "Investigation of Noise Suppression Effect for an Optical Signal Regeneration System Using Cascaded Wavelength Converters Based on Cross-Gain Modulation Semiconductor Optical Amplifiers"Jpn.J.Appl.Phys.. vol.43, no.3B. L399-L402 (2004)
[Publications] Masao Kawaguchi, Tomoyuki Miyamoto, Atsushi Saitoh, Fumio Koyama: "Photoluminescence and Lasing Characteristics of GaInNAs/GaAsP Strain-Compensated Quantum Wells"Jpn.J.Appl.Phys.. vol.43 no.2B. L267-L270 (2004)
[Publications] Toru Miura, Fumio Koyama: "Low-Loss and Polarization-Insensitive Semiconductor Hollow Waveguide with GaAs/AlAs Multi-Layer Mirrors"Jpn.J.Appl.Phys.. vol.43 no.1A/B. L21-L23 (2004)
[Publications] Tetsuya Matsuura, Tomoyuki Miyamoto, Takeo Kageyama, Masataka Ohta, Yasutaka Matsui, Tatsuya Furuhata, Fumio Koyama: "Elongation of Emission Wavelength of GaInAsSb-Covered (Ga) InAs Quantum Dots Grown by Molecular Beam Epitaxy"Jpn.J.Appl.Phys.. vol.3 no.1A/B. L82-L84 (2004)
[Publications] Takeru Amao, Tomoyuki Hino, Wiganes Janto, Masakazu Arai, Fumio Koyama: "Size Reduction of Tunable Micromachined Filters for Fast Wavelength tuning"Jpn.J.Appl.Phys.. vol.43 no.2A. L157-L159 (2004)
[Publications] Yutaka Onishi, Nobuhiko Nishiyama, Catherine Caneau, Fumio Koyama, Chung-en Zah: "Light-Induced Transverse-Mode Switching of a Vertical-Cavity Surface-Emitting Laser For Optical Signal Processing"Jpn.J.Appl.Phys.. vol.43 no.2A. L187-L189 (2004)
[Publications] *Tomoyuki Miyamoto, Masao Kawaguchi, Shugo Minobe, Shinichiro Kawakami, Fumio Koyama: "Improvement of MOCVD grown GaInNAs lasers"IWGAL Wroclaw, Poland. (発表予定). (2003)
[Publications] Takeshi Yamatoya, Fumio Koyama: "Modulation dynamics of amplified spontaneous emission in saturated GaInAsP/InP semiconductor optical amplifiers"15th Int.Conf. on Indium Phosphide and Related Materials IPRM 2003, Santa Barbara, USA. 194-197 (2003)
[Publications] Masataka Ohta, Tomoyuki Miyamoto, Shigeki Makino, Tetsuya Matsuura, Yasutaka Matsui, Fumio Koyama: "Investigation of well thickness reduction effect of GaInNAs/GaAs quantum well lasers"15th Int.Conf. on Indium Phosphide and Related Materials IPRM 2003, Santa Barbara, USA. 204-208 (2003)
[Publications] Shigeki Makino, Tomoyuki Miyamoto, Masataka Ohta, Tetsuya Matsuura, Yasutaka Matsui, Fumio Koyama: "Thermal annealing effect on self-assembled GaInNAs/GaAs quantum dots grown by chemical beam epitaxy"15th Int.Conf. on Indium Phosphide and Related Materials IPRM 2003, Santa Barbara, USA. 460-463 (2003)
[Publications] Tomoyuki Miyamoto: "Growth and characterization of GaInNAs/GaAs long wavelength lasers"JSPS Colloquium on Photonics Stockholm, Sweden. (発表予定). (2003)
[Publications] Masakazu Arai, Takashi Kondo, Akihiro Matsutani, Tomoyuki Miyamoto, Fumio Koyama: "Multiple-wavelength GaInAs/GaAs vertical cavity surface emitting laser array with record wide wavelength span"61th Annual Device Research Conference DRC 2003, Salt Lake City, USA. V.B-5. (2003)
[Publications] Hironobu Sai, Fumio Koyama, Kenichi Iga: "Precise aperture control of oxidized GaAs surface emitting laser using in-situ monitered oxidation process"30th International Symposium on Compound Semiconductors, ISCS 2003, San Diego, USA. (発表予定). (2003)
[Publications] Masao Kawaguchi, Tomoyuki Miyamoto, Shinichiro Kawakami, Atsushi Saito, Fumio Koyama: "Photoluminescence and lasing characteristics of 1.3µm GaInNAs/GaAs strain-compensated quantum wells"30th International Symposium on Compound Semiconductors, ISCS 2003, San Diego, USA. Paper MB3.6. 72-73 (2003)
[Publications] Fumio Koyama: "Wavelength engineering of surface emitting lasers for high capacity short reach systems"SPIE Symposium ITCom2003, Orland, USA. 1-9 (2003)
[Publications] Fumio Koyama: "Micromachined vertical cavities and hollow optical waveguides for widely tunable devices"SPIE Symposium ITCom2003, Orland, USA. 558-569 (2003)
[Publications] Wiganes Janto, Takeru Amano, Akihiro Matsutani, Takashi Kondo, Masakazu Arai, Fumio Koyama: "Micromachined GaAlAs/GaAs double cavity tunable filter"European Conference on Optical Communication 2003 ECOC2003, Rimini, Italy. Mo3.5.6. (2003)
[Publications] Masao Kawaguchi, Tomoyuki Miyamoto, Atsushi Saitoh, Fumio Koyama: "GaInNAs Intermediate Layer for Improvement of Lasing Characteristics of GaInNAs Quantum Well Lasers"Jpn.J.Appl.Phys.. Vol.43, No.4A. L453-L455 (2004)
[Publications] Toru Miura, Mayumi Ishikawa, Akihiro Matsutani, Fumio Koyama: "Hollow waveguide with variable air core for tunable planar waveguide devices"European Conference on Optical Communication 2003 ECOC2003, Rimini, Italy. Tu1.2.3. (2003)
[Publications] Hiroyuki Uenohara, Takeshi Seki, Kohroh Kobayashi: "High-speed wavelength routing performance of optical packet switch with an optical digital-to-analog converter"The 29th European Conference on Optical Communication. Tu1.4.3. 174-175 (2003)
[Publications] Hidekazu Takeda, Hiroyuki Uenohara: "Optical nonlinearity in a novel optical signal regeneration system based on cross-gain modulation using cascaded semiconductor optical amplifiers"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 14D2-4. (2003)
[Publications] Takeshi Uchida, Tomoyuki Miyamoto, Fumio Koyama: "Transverse-mode control of VCSELs with convex mirror"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 15C4-4. (2003)
[Publications] Hiroyuki Uenohara, Takeshi Seki, kohroh Kobayashi: "Optical packet routing performance of an optical packet switch with an optical digital/analog-conversion-type header processor (wavelength label switch)"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 15E3-2. (2003)
[Publications] Tomoyuki Hino, Takeru Amano, Wiganes Janto, Fumio Koyama: "Size reduction of tunable micromachined filters for High Speed Operations"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 16A4-3. 203-204 (2003)
[Publications] Masanobu Ito, Satoshi Suda, Fumio Koyama: "Measurement on spot size dependence of dense WDM dielectric multilayer filters"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 16A4-6. 209-210 (2003)
[Publications] Toru Miura, Fumio Koyama, Akihiro Matsutani: "Fabrication and characterization of novel 3-D hollow waveguide for widely tunable devices"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 16B4-6. (2003)
[Publications] Takeshi Seki, Hiroyuki Uenohara: "A study on stable operation condition and multi-level recognition of an optical digital-to-analog conversion-type header processor for an optical packet switch"The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society LEOS 2003, Tucson, USA. TuG 3. (2003)
[Publications] Takashi Kondo, Masakazu Arai, Tomoyuki Miyamoto, Fumio Koyama: "Highly strained GaInAs/GaAs 1.13µm vertical cavity surface emitting laser with uncooled single mode operation"The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society LEOS 2003, Tucson, USA. WD2. (2003)
[Publications] Yutaka Onishi, Nobuhiko Nishiyama, Catherine Caneau, Fumio Koyama, Chung-en Zah: "Optical inverter using a vertical-cavity surface-emitting laser with external light injection"The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society LEOS 2003, Tucson, USA. WBB 3. 708-709 (2003)
[Publications] Jiro Hashizume, Fumio Koyama: "Plasmon enhancement of optical near-field of metal nano-aperture VCSEL"The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society LEOS 2003, Tucson, USA. ThE 2. (2003)
[Publications] Toru Miura, Fumio Koyama: "Low-loss semiconductor hollow waveguide with GaAs/AlAs multi-layer mirrors for widely tunable waveguide device"The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society LEOS 2003, Tucson, USA. ThH4. (2003)
[Publications] Mayumi Ishikawa, Toru Miura, Akihiro Matsutani, Fumio Koyama: "Design and fabrication of grating demultiplexer using hollow optical waveguide"9th MICROOPTICS CONFERENCE MOC'03, Tokyo, Japan. B2. (2003)
[Publications] Yasuki Sakurai, Fumio Koyama: "Control of group delay and chromatic dispersion in tunable hollow waveguide with highly reflective mirrors"9th MICROOPTICS CONFERENCE MOC'03, Tokyo, Japan. H40. (2003)
[Publications] Takeshi Uchida, Tomoyuki Miyamoto, Fumio Koyama: "Analysis of higher-order transverse mode suppression using a convex mirror including thermal lensing effect"9th MICROOPTICS CONFERENCE MOC'03, Tokyo, Japan. H41. (2003)
[Publications] Jyunji Kinoshita, Tomoyuki Miyamoto, Yutaka Onishi, Fumio Koyama: "Characterization of single wavelength optically pumped GaInAsP/InP VCSELs with dielectric mirrors"9th MICROOPTICS CONFERENCE MOC'03, Tokyo, Japan. M4. (2003)
[Publications] Tetsuya Matsuura, Tomoyuki Miyamoto, Shigeki Makino, Masataka Ohta, Yasutaka Matsui, Fumio Koyama: "p-Type Doping Characteristics of GaInNAs : Be Grown by Solid Source Molecular Beam Epitaxy"Jpn.J.Appl.Phys.. Vol.43, No.4A. L433-L435 (2004)
[Publications] Tetsuya Matsuura, Tomoyuki Miyamoto, Takeo Kageyama, Masataka Ohta, Yasutaka Matsui, Fumio Koyama: "Surfactant effect of Sb for GaInAs quantum dots grown by molecular beam epitaxy"International Symposium on Quantum Dots and Photonic Crystals 2003, QDPC2003, Tokyo, Japan. P-6. (2003)
[Publications] Fumio Koyama: "Wavelength engineering of surface emitting Semiconductor lasers"Taiwan-Japan Optoelectronics Workshop, Tainan, Taiwan. (発表予定). (2003)
[Publications] Fumio Koyama, Masakazu Arai: "Long wavelength GaInAs/GaAs VCSEL and multi-wavelength arrays"The International Symposium on Microelectronics MEMS, Perth, Australia. (発表予定). (2003)
[Publications] Takeru Amano, Fumio Koyama, Masakazu Arai, Akihiro Matsutani: "Micromachined resonant cavity light emitter with low temperature dependence of emission wavelength"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. W2B-(2)-4. (2003)
[Publications] Masao Kawaguchi, Tomoyuki Miyamoto, Shinichiro Kawakami, Shugo Minobe, Atsushi Saitoh, Fumio Koyama: "Lasing Characteristics of GaInNAs/GaAsP Strain-compensated Lasers for Various Phosphorous Content"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. (発表予定). (2003)
[Publications] Yutaka Onishi, Fumio Koyama: "Analysis of all-optical regeneration using an injection-locked two-mode surface-emitting laser"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. TU4G-(6)-6. (2003)
[Publications] Satoshi Shinada, Jiro Hashizume, Fumio Koyama: "Surface plasmon resonance on micro-aperture VCSEL with metal grating"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. Th1J-(2)-3435. (2003)
[Publications] Munechika Azuchi, Naoto Jikutani, Masakazu Arai, Takashi Kondo, Fumio Koyama: "Multi-oxide Layer Vertical-Cavity Surface-Emitting Lasers with Improved Modulation Bandwidth"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. (発表予定). (2003)
[Publications] Wiganes Janto, Takeru Amano, Fumio Koyama: "Spot size dependence of micromachined tunable filter performance"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. W1I-(15)-5. (2003)
[Publications] Takashi Kondo, Masakazu Aral, Tomoyuki Miyamoto, Fumio Koyama: "Isolator-free, uncooled operation of highly strained 1.1 µm GaInAs/GaAs vertical cavity surface emitting laser for 10 Gb/s single mode fiber data transmission"Optical Fiber Communication Conference & Exposition OFC2004, Los Angeles, USA. ThD6. (2004)
[Publications] Hiroyuki Uenohara, Takeshi Seki, Kohroh Kobayashi: "Novel header processing technique and wavelength routing performance of an optical packet switch with a multi-bit optical digital-to-analog conversion-type header processor"Optical Fiber Communication Conference & Exposition OFC2004, Los Angeles, USA. ThV4. (2004)
[Publications] Yutaka Onishi, Fumio Koyama, Nobuhiko Nishiyama, Catherine Caneau, Chung-en Zah: "Dynamic behavior of 1.55 μm vertical-cavity surface-emitting laser with external light injection"Conference on Lasers & Electro-Optics/International Quantum Electronics Conference CLEO/IQEC2004 San Francisco USA. CTuAA.
[Publications] Yuji Yanagase, Shunichi Yamagata, Yasuo Kokubun: "Wavelength tunable polymer microring resonator filter with 9.4nm tuning range"Electronics Letters. vol.39, No.12. 922-924 (2003)
[Publications] Shuichi Suzuki, Yasuo Kokubun: "Design rule of filter bandwidth and pulse width for ultimate transmission capacity limited by crosstalk in DWDM systems"IEEE Photon.Techn.Lett.. vol.15, No.11. 1645-1647 (2003)
[Publications] Hirofumi Haeiwa, Toshiki Naganawa, Yasuo Kokubun: "Wide range center wavelength triming of vertically coupled microring resonator filter by direct UV irradiation to SiN ring core"IEEE Photon.Techn.Lett.. vol.16, No.1. 135-137 (2004)
[Publications] Yutaka Hatakeyama, Takamitsu Hanai, Shuichi Suzuki, Yasuo Kokubun: "Loss-less multilevel crossing of busline waveguide in vertically coupled microring resonator filter"IEEE Photon.Techn.Lett.. vol.16, No.2. 473-475 (2004)
[Publications] Toshinobu Ito, Yasuo Kokubun: "Non-destructive measurement of loss and coupling efficiency in microring resonator filters from filter responses"Jpn.J.Applied Physics. vol.43, No.3. 1002-1005 (2004)
[Publications] 滝沢國治: "高速空間光変調素子用電気光学ファブリ・ペロー共振器の解析"成蹊大学工学研究報告. Vol.40, No.2. 57-72 (2003)
[Publications] 滝沢國治: "超高精細画像形成・表示システム"成蹊大学工学研究報告. Vol.40, No.2. 73-78 (2003)
[Publications] 菊池宏, 小林慎治, 滝沢國治: "ポッケルス効果と逆圧電効果に基づく縦型光変調素子の解析と実験的検証"電子情報通信学会論文誌 C. Vol.J87-C, No.2. 276-277 (2004)

2003 Fiscal Year Annual Research Report

超高速光ネットワーク用光IC-大規模集積限界への挑戦-

Principal Investigator

小山 二三夫 東京工業大学, 精密工学研究所, 教授 (30178397)

Research Products

[Publications] Akihiro Onomura, Masakazu Arai, Takashi Kondo, Akihiro Matsutani, Tomoyuki Miyamoto, Fumio Koyama: "Densely integrated multiple-wavelength vertical-cavity surface-emitting laser array"Jpn.J.Appl.Phys.. vol.42 no.5B. L529-L531 (2003)

[Publications] Toru Miura, Fumio Koyama, Akihiro Matsutani, Takahiro Sakaguchi: "Novel variable optical attenuator based on three-dimensional hollow waveguide"Jpn.J.Appl.Phys.. vol.42 no.6A. 3477-3478 (2003)

[Publications] Hiroyuki Uenohara, Takeshi Seki, Kohor Kobayashi: "Investigation of optical packet routing performance of optical packet switch with optical digital/analogue-conversion-type header processor (wavelength label switch)"Electron.Lett.. vol.39, no.14. 1076-1078 (2003)

[Publications] Wiganes Janto, Takeru Amano, Fumio Koyama, Akihiro Matsutani, Takashi Kondo, Masakazu Arai: "Design and fabrication of double-cavity tunable filter using micromachined structure"Jpn.J.Appl.Phys.. vol.42 no.7B. L828-L830 (2003)

[Publications] Yutaka Onishi, Fumio Koyama: "Design of long-wavelength vertical-cavity surface-emitting lasers with resonant optical pumping"Optical Review. vol.10 no.4. 179-181 (2003)

[Publications] Satoshi Shinada, Jiro Hashizume, Fumio Koyama: "Surface plasmon resonance on microaperture vertical-cavity surface-emitting laser with metal grating"Appl.Phys.Lett.. vol.83 no.5. 836-838 (2003)

[Publications] Fumio Koyama: "面発光レーザの現状と動向"Electronic Journal (2004 Opto Devices Technology Outlook). (2004)

[Publications] Takeshi Yamatoya, Fumio Koyama: "Optical preamplifier using antireflection-coating-free semiconductor optical amplifier with signal-inverted ASE"IEEE Photon.Technol.Lett.. vol.15 no.8. 1047-1049 (2003)

[Publications] Shigeki Makino, Tomoyuki Miyamoto, Masataka Ohta, Tetsuya Matsuura, Yasuhisa Matsui, Fumio Koyama: "Thermal annealing effect on self-assembled GaInNAs/GaAs quantum dots grown by chemical beam epitaxy"Physica Status Solidi. vol.0(c) no.4. 1097-1100 (2003)

[Publications] Wiganes Janto, Takeru Amano, Fumio Koyama: "Spot size dependence of filtering characteristics in micromachined GaAlAs/GaAs tunable filters"Jpn.J.Appl.Phys.. vol.42 no.9A. 5654-5655 (2003)

[Publications] Toru Miura, Fumio Koyama, Akihiro Matsutani: "Novel phase-tunable three-dimensional hollow waveguides with variable air core"IEEE Photon.Technol.Lett.. vol.15 no.9. 1240-1242 (2003)

[Publications] Takeshi Uchida, Tomoyuki Miyamoto: "Analysis of transverse-mode control in VCSELs using a convex mirror"Jpn.J.Appl.Phys.. vol.42, no.11. 6883-6886 (2003)

[Publications] Hidekazu Takeda, Hiroyuki Uenohara: "Novel optical signal regeneration system using cascaded wavelength converter based on cross-gain modulation in semiconductor optical amplifier"Jpn.J.Appl.Phys.. vol.42, no.12A. L1446-L1448 (2003)

[Publications] Fumio Koyama: "面発光レーザの製造技術"Electronic Journal (2004 Opto Devices Technology Outlook). (2004)

[Publications] Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama: "Cl<sub><small>2</small></sub>-based inductively coupled plasma etching of InP using internal antenna"Jpn.J.Appl.Phys.. vol.42 no.11. 6837-6838 (2003)

[Publications] Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama: "Low-temperature dry etching of InP by inductively coupled plasma using Hl/Cl<sub><small>2</small></sub>"Jpn.J.Appl.Phys.. vol.42 no.12A. L1414-L1415 (2003)

[Publications] Takeru Amano, Fumio Koyama, Masakazu Arai, Akihiro Matsutani: "Micromachined GaAs/AlGaAs resonant-cavity light emitter with small temperature dependence of emission wavelength"Jpn.J.Appl.Phys.. vol.42, no.11B. L1377-L1379 (2003)

[Publications] Tetsuya Matsuura, Tomoyuki Miyamoto, Takeo Kageyama, Masataka Ohta, Yasutaka Matsui, Fumio Koyama: "Elongation of emission wavelength of GaInAsSb-covered (Ga) InAs quantum dots grown by molecular beam epitaxy"Jpn.J.Appl.Phys.. vol.43 no.1AB. L82-L84 (2004)

[Publications] Takeo Kageyama, Tomoyuki Miyamoto, Masataka Ohta, Tetsuya Matsuura, Yasutaka Matsui, Tatsuya Furuhata, Fumio Koyama: "Low threshold GaInAsSb/GaAs quantum well lasers emitting at 1200 nm-range grown by molecular beam epitaxy"J.Appl.Phys.. (出版予定). (2004)

[Publications] Takashi Kondo, Masakazu Arai, Akihiro Matsutani, Tomoyuki Miyamoto, Fumio Koyama: "Isolator-free 10 Gb/s single-mode fiber data transmission using 1.1 um GaInAs/GaAs vertical cavity surface emitting laser"Electron.Lett.. Vol.40, no.1. 65-66 (2004)

[Publications] Yutaka Onishi, Nobuhiko Nishiyama, Catherine Caneau, Fumio Koyama, Chung-en Zah: "Light-induced transverse-mode switching of a vertical-cavity surface-emitting laser for optical signal processing"Jpn.J.Appl.Phys.. vol.43 no.2A. L187-L189 (2004)

[Publications] Yutaka Onishi, Fumio Koyama: "All-optical regeneration using a vertical-cavity surface-emitting laser with external light injection"IEICE Trans.. (出版予定). (2004)

[Publications] Yutaka Onishi, Nobuhiko Nishiyama, Catherine Caneau, Fumio Koyama, Chung-en Zah: "Dynamic behavior of an all-optical inverter using transverse mode switching in 1.55µm vertical-cavity surface-emitting lasers"IEEE Photon.Technol.Lett.. (出版予定). (2004)

[Publications] Yutaka Onishi, Nobuhiko Nishiyama, Catherine Caneau, Fumio Koyama, Chung-en Zah: "Nonlinear optical input-output characteristics of 1.55 um injection-locked vertical-cavity surface-emitting lasers"Appl.Phys.Lett.. (出版予定). (2004)

[Publications] Masakazu Arai, Takashi Kondo, Akihiro Onumura, Akihiro Matsutani, Tomoyuki Miyamoto, Fumio Koyama: "Multiple-Wavelength GaInAs/GaAs Vertical Cavity Surface Emitting Laser Array With Extended Wavelength Span"IEEE J Slected Topics in Quantum Electronics. Vol.19 no.5. 1367-1373 (2004)

[Publications] Jiro Hashizume, Fumio Koyama: "Plasmon-enhancement of Optical Near-field of Metal Nano-aperture Surface Emitting Laser"Appl.Phys.Lett.. (出版予定). (2004)

[Publications] Hidekazu Takeda, Hiroyuki Uenohara: "Investigation of Noise Suppression Effect for an Optical Signal Regeneration System Using Cascaded Wavelength Converters Based on Cross-Gain Modulation Semiconductor Optical Amplifiers"Jpn.J.Appl.Phys.. vol.43, no.3B. L399-L402 (2004)

[Publications] Masao Kawaguchi, Tomoyuki Miyamoto, Atsushi Saitoh, Fumio Koyama: "Photoluminescence and Lasing Characteristics of GaInNAs/GaAsP Strain-Compensated Quantum Wells"Jpn.J.Appl.Phys.. vol.43 no.2B. L267-L270 (2004)

[Publications] Toru Miura, Fumio Koyama: "Low-Loss and Polarization-Insensitive Semiconductor Hollow Waveguide with GaAs/AlAs Multi-Layer Mirrors"Jpn.J.Appl.Phys.. vol.43 no.1A/B. L21-L23 (2004)

[Publications] Tetsuya Matsuura, Tomoyuki Miyamoto, Takeo Kageyama, Masataka Ohta, Yasutaka Matsui, Tatsuya Furuhata, Fumio Koyama: "Elongation of Emission Wavelength of GaInAsSb-Covered (Ga) InAs Quantum Dots Grown by Molecular Beam Epitaxy"Jpn.J.Appl.Phys.. vol.3 no.1A/B. L82-L84 (2004)

[Publications] Takeru Amao, Tomoyuki Hino, Wiganes Janto, Masakazu Arai, Fumio Koyama: "Size Reduction of Tunable Micromachined Filters for Fast Wavelength tuning"Jpn.J.Appl.Phys.. vol.43 no.2A. L157-L159 (2004)

[Publications] Yutaka Onishi, Nobuhiko Nishiyama, Catherine Caneau, Fumio Koyama, Chung-en Zah: "Light-Induced Transverse-Mode Switching of a Vertical-Cavity Surface-Emitting Laser For Optical Signal Processing"Jpn.J.Appl.Phys.. vol.43 no.2A. L187-L189 (2004)

[Publications] *Tomoyuki Miyamoto, Masao Kawaguchi, Shugo Minobe, Shinichiro Kawakami, Fumio Koyama: "Improvement of MOCVD grown GaInNAs lasers"IWGAL Wroclaw, Poland. (発表予定). (2003)

[Publications] Takeshi Yamatoya, Fumio Koyama: "Modulation dynamics of amplified spontaneous emission in saturated GaInAsP/InP semiconductor optical amplifiers"15th Int.Conf. on Indium Phosphide and Related Materials IPRM 2003, Santa Barbara, USA. 194-197 (2003)

[Publications] Tomoyuki Miyamoto: "Growth and characterization of GaInNAs/GaAs long wavelength lasers"JSPS Colloquium on Photonics Stockholm, Sweden. (発表予定). (2003)

[Publications] Masakazu Arai, Takashi Kondo, Akihiro Matsutani, Tomoyuki Miyamoto, Fumio Koyama: "Multiple-wavelength GaInAs/GaAs vertical cavity surface emitting laser array with record wide wavelength span"61th Annual Device Research Conference DRC 2003, Salt Lake City, USA. V.B-5. (2003)

[Publications] Hironobu Sai, Fumio Koyama, Kenichi Iga: "Precise aperture control of oxidized GaAs surface emitting laser using <i>in-situ</i> monitered oxidation process"30th International Symposium on Compound Semiconductors, ISCS 2003, San Diego, USA. (発表予定). (2003)

[Publications] Fumio Koyama: "Wavelength engineering of surface emitting lasers for high capacity short reach systems"SPIE Symposium ITCom2003, Orland, USA. 1-9 (2003)

[Publications] Fumio Koyama: "Micromachined vertical cavities and hollow optical waveguides for widely tunable devices"SPIE Symposium ITCom2003, Orland, USA. 558-569 (2003)

[Publications] Wiganes Janto, Takeru Amano, Akihiro Matsutani, Takashi Kondo, Masakazu Arai, Fumio Koyama: "Micromachined GaAlAs/GaAs double cavity tunable filter"European Conference on Optical Communication 2003 ECOC2003, Rimini, Italy. Mo3.5.6. (2003)

[Publications] Masao Kawaguchi, Tomoyuki Miyamoto, Atsushi Saitoh, Fumio Koyama: "GaInNAs Intermediate Layer for Improvement of Lasing Characteristics of GaInNAs Quantum Well Lasers"Jpn.J.Appl.Phys.. Vol.43, No.4A. L453-L455 (2004)

[Publications] Toru Miura, Mayumi Ishikawa, Akihiro Matsutani, Fumio Koyama: "Hollow waveguide with variable air core for tunable planar waveguide devices"European Conference on Optical Communication 2003 ECOC2003, Rimini, Italy. Tu1.2.3. (2003)

[Publications] Hiroyuki Uenohara, Takeshi Seki, Kohroh Kobayashi: "High-speed wavelength routing performance of optical packet switch with an optical digital-to-analog converter"The 29th European Conference on Optical Communication. Tu1.4.3. 174-175 (2003)

[Publications] Takeshi Uchida, Tomoyuki Miyamoto, Fumio Koyama: "Transverse-mode control of VCSELs with convex mirror"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 15C4-4. (2003)

[Publications] Tomoyuki Hino, Takeru Amano, Wiganes Janto, Fumio Koyama: "Size reduction of tunable micromachined filters for High Speed Operations"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 16A4-3. 203-204 (2003)

[Publications] Masanobu Ito, Satoshi Suda, Fumio Koyama: "Measurement on spot size dependence of dense WDM dielectric multilayer filters"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 16A4-6. 209-210 (2003)

[Publications] Toru Miura, Fumio Koyama, Akihiro Matsutani: "Fabrication and characterization of novel 3-D hollow waveguide for widely tunable devices"The 8th Opto Electronics and Communications Conference, OECC2003, Shanghai, P.R. China. 16B4-6. (2003)

[Publications] Takashi Kondo, Masakazu Arai, Tomoyuki Miyamoto, Fumio Koyama: "Highly strained GaInAs/GaAs 1.13µm vertical cavity surface emitting laser with uncooled single mode operation"The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society LEOS 2003, Tucson, USA. WD2. (2003)

[Publications] Jiro Hashizume, Fumio Koyama: "Plasmon enhancement of optical near-field of metal nano-aperture VCSEL"The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society LEOS 2003, Tucson, USA. ThE 2. (2003)

[Publications] Toru Miura, Fumio Koyama: "Low-loss semiconductor hollow waveguide with GaAs/AlAs multi-layer mirrors for widely tunable waveguide device"The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society LEOS 2003, Tucson, USA. ThH4. (2003)

[Publications] Mayumi Ishikawa, Toru Miura, Akihiro Matsutani, Fumio Koyama: "Design and fabrication of grating demultiplexer using hollow optical waveguide"9th MICROOPTICS CONFERENCE MOC'03, Tokyo, Japan. B2. (2003)

[Publications] Yasuki Sakurai, Fumio Koyama: "Control of group delay and chromatic dispersion in tunable hollow waveguide with highly reflective mirrors"9th MICROOPTICS CONFERENCE MOC'03, Tokyo, Japan. H40. (2003)

[Publications] Takeshi Uchida, Tomoyuki Miyamoto, Fumio Koyama: "Analysis of higher-order transverse mode suppression using a convex mirror including thermal lensing effect"9th MICROOPTICS CONFERENCE MOC'03, Tokyo, Japan. H41. (2003)

[Publications] Jyunji Kinoshita, Tomoyuki Miyamoto, Yutaka Onishi, Fumio Koyama: "Characterization of single wavelength optically pumped GaInAsP/InP VCSELs with dielectric mirrors"9th MICROOPTICS CONFERENCE MOC'03, Tokyo, Japan. M4. (2003)

[Publications] Tetsuya Matsuura, Tomoyuki Miyamoto, Shigeki Makino, Masataka Ohta, Yasutaka Matsui, Fumio Koyama: "p-Type Doping Characteristics of GaInNAs : Be Grown by Solid Source Molecular Beam Epitaxy"Jpn.J.Appl.Phys.. Vol.43, No.4A. L433-L435 (2004)

[Publications] Tetsuya Matsuura, Tomoyuki Miyamoto, Takeo Kageyama, Masataka Ohta, Yasutaka Matsui, Fumio Koyama: "Surfactant effect of Sb for GaInAs quantum dots grown by molecular beam epitaxy"International Symposium on Quantum Dots and Photonic Crystals 2003, QDPC2003, Tokyo, Japan. P-6. (2003)

[Publications] Fumio Koyama: "Wavelength engineering of surface emitting Semiconductor lasers"Taiwan-Japan Optoelectronics Workshop, Tainan, Taiwan. (発表予定). (2003)

[Publications] Fumio Koyama, Masakazu Arai: "Long wavelength GaInAs/GaAs VCSEL and multi-wavelength arrays"The International Symposium on Microelectronics MEMS, Perth, Australia. (発表予定). (2003)

[Publications] Takeru Amano, Fumio Koyama, Masakazu Arai, Akihiro Matsutani: "Micromachined resonant cavity light emitter with low temperature dependence of emission wavelength"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. W2B-(2)-4. (2003)

[Publications] Yutaka Onishi, Fumio Koyama: "Analysis of all-optical regeneration using an injection-locked two-mode surface-emitting laser"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. TU4G-(6)-6. (2003)

[Publications] Satoshi Shinada, Jiro Hashizume, Fumio Koyama: "Surface plasmon resonance on micro-aperture VCSEL with metal grating"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. Th1J-(2)-3435. (2003)

[Publications] Munechika Azuchi, Naoto Jikutani, Masakazu Arai, Takashi Kondo, Fumio Koyama: "Multi-oxide Layer Vertical-Cavity Surface-Emitting Lasers with Improved Modulation Bandwidth"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. (発表予定). (2003)

[Publications] Wiganes Janto, Takeru Amano, Fumio Koyama: "Spot size dependence of micromachined tunable filter performance"The 5th Pacific Rim Conference on Lasers and Electro-Optics CLEO/PR 2003, Taipei, Taiwan. W1I-(15)-5. (2003)

[Publications] Yuji Yanagase, Shunichi Yamagata, Yasuo Kokubun: "Wavelength tunable polymer microring resonator filter with 9.4nm tuning range"Electronics Letters. vol.39, No.12. 922-924 (2003)

[Publications] Shuichi Suzuki, Yasuo Kokubun: "Design rule of filter bandwidth and pulse width for ultimate transmission capacity limited by crosstalk in DWDM systems"IEEE Photon.Techn.Lett.. vol.15, No.11. 1645-1647 (2003)

[Publications] Hirofumi Haeiwa, Toshiki Naganawa, Yasuo Kokubun: "Wide range center wavelength triming of vertically coupled microring resonator filter by direct UV irradiation to SiN ring core"IEEE Photon.Techn.Lett.. vol.16, No.1. 135-137 (2004)

[Publications] Yutaka Hatakeyama, Takamitsu Hanai, Shuichi Suzuki, Yasuo Kokubun: "Loss-less multilevel crossing of busline waveguide in vertically coupled microring resonator filter"IEEE Photon.Techn.Lett.. vol.16, No.2. 473-475 (2004)

[Publications] Toshinobu Ito, Yasuo Kokubun: "Non-destructive measurement of loss and coupling efficiency in microring resonator filters from filter responses"Jpn.J.Applied Physics. vol.43, No.3. 1002-1005 (2004)

[Publications] 滝沢國治: "高速空間光変調素子用電気光学ファブリ・ペロー共振器の解析"成蹊大学 工学研究報告. Vol.40, No.2. 57-72 (2003)

[Publications] 滝沢國治: "超高精細画像形成・表示システム"成蹊大学 工学研究報告. Vol.40, No.2. 73-78 (2003)

[Publications] 菊池 宏, 小林慎治, 滝沢國治: "ポッケルス効果と逆圧電効果に基づく縦型光変調素子の解析と実験的検証"電子情報通信学会論文誌 C. Vol.J87-C, No.2. 276-277 (2004)

小山二三夫東京工業大学, 精密工学研究所, 教授 (30178397)

[Publications] 滝沢國治: "高速空間光変調素子用電気光学ファブリ・ペロー共振器の解析"成蹊大学工学研究報告. Vol.40, No.2. 57-72 (2003)

[Publications] 滝沢國治: "超高精細画像形成・表示システム"成蹊大学工学研究報告. Vol.40, No.2. 73-78 (2003)

[Publications] 菊池宏, 小林慎治, 滝沢國治: "ポッケルス効果と逆圧電効果に基づく縦型光変調素子の解析と実験的検証"電子情報通信学会論文誌 C. Vol.J87-C, No.2. 276-277 (2004)