2007 Fiscal Year Final Research Report Summary
High-resolution, element-specific microscope using a laser-produced-plasma soft X-ray source
| Project/Area Number |
15002001
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| Research Category |
Grant-in-Aid for Specially Promoted Research
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| Allocation Type | Single-year Grants |
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| Review Section |
Science and Engineering
Engineering
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| Research Institution | Tohoku University |
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Principal Investigator |
YAMAMOTO Masaki Tohoku University, IMRAM, Professor (00137887)
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| Co-Investigator(Kenkyū-buntansha) |
YANAGIHARA Mihiro Tohoku University, IMRAM, Professor (40174552)
HATANO Tadashi Tohoku University, IMRAM, Assistant Professor (90302223)
EJIMA Takeo Tohoku University, IMRAM, Assistant Professor (80261478)
TSURU Toshihide Tohoku University, IMRAM, Assistant Professor (30306526)
TOYODA Mitsunori Tohoku University, IMRAM, Assistant Professor (40375168)
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| Project Period (FY) |
2003 – 2007
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| Keywords | Soft X-ray / Multilayer / Microscope / Laser Plasma / Period thickness distribution control / Sputtering / Ellipsometer / Growth rate monitor |
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| Research Abstract |
The project aims to develop a soft X-ray Schwarzschild microscope having spatial resolution of 50 nm enabling fast and easy laboratory imaging of organic and inorganic hybrids, magnetic materials and biological samples with the soft X-ray light in the wavelength range of 3 to 30 nm. The soft X-ray microscope is composed of a clean laboratory source of a laser produced plasma, imaging multilayer mirrors of specific D-spacing for monochromatic reflection, high accuracy alignment optics by visible light and image detectors, all comply with the high quality imaging.
The most outstanding technology established is with our multilayer fabricator enabling D-space control on concave and convex mirror substrates with high accuracy of 0.1%, which achieves exact wavelength matching among the monochromatic mirrors for the wavelengths of 13.5nm and beyond, down to the 4.5nm, the carbon window region. The fabrication is supported by a new laboratory spectro-reflectometer designed for the curved mirror samples, a soft X-ray interferometer for the wave-front error measurements and a multilayer surface milling system for digital error correction by the layer period removal. These equipments help establishing soft X-ray optical engineering with multiyear optics.
The most dominant achievement is the high grade <one shot imaging> by the microscope with the high 80% throughput 4-mirror optics developed. The resolution of the image has already met the 400nm limit by the CCD detector pixel size and is expected to reach 30nm. The high resolution imaging of living cells within the 0.2mm field of view will show details inside with 6000×6000 pixels by one shot. The image is free from burring by possible Brownian motion of particles in solution and offers new process of detailed analysis of multi-events in the wide field of view at desired magnification in the computer display of the novel optical microscope.
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Research Products
(223 results)
