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2007 Fiscal Year Final Research Report Summary

Generation of micro-scale reactive plasmas and development of their new applications

Research Project

Project/Area Number 15075101
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionKyoto University

Principal Investigator

TACHIBANA Kunihide  Kyoto University, Graduate School of Engineering, Professor (40027925)

Co-Investigator(Kenkyū-buntansha) ISHII Shozo  Tokyo Institute of Technology, Graduate School of Science and Engineering, Professor (40016655)
TERASHIMA Kazuo  The University of Tokyo, Graduate School of Frontier Science, Associate Professor (30176911)
SHIRAFUJI Tatsuru  Kyoto University, Innovative Collaboration Center, Associate Professor (10235757)
Project Period (FY) 2003 – 2008
KeywordsMicroplasma / Microdischarge / Plasma generation and control / Plasma diagnostics and simulation / Non-equilibrium material synthesis / Vacuum ultraviolet light source / biomedical processing / Plasma metamaterial
Research Abstract

We have carried out the 5-years research project on "Microplasmas" aiming at the generation of a new research field in the plasma science and technology area. Major achievements in three divisions can be listed as follows. In the first division [A01] : Generation of microplasmas, various types of microplasmas and their miniature driving power sources were developed, and the effects of gas dynamics were analyzed for the generation of microdplasmas. New electrode materials and their structures were also analyzed for improving the generation efficiency. In addition, several kinds of liquids and supercritical fluids were investigated in developing new media for microdischarges. In the second division [A02] : Diagnostics and simulation of microplasmas, charged particles and excited species were diagnosed in micro space and at the vicinity of wall surfaces for the analyses of those spatiotemporal behaviors by using various newly developed spectroscopic methods. As a topic in this division, n … More ew functions were derived from arranged integration of microplasmas such as plasma photonic crystals and metamaterials for controlling electromagnetic waves in mm to sub-mm ranges. In the third division [A03] : Application of microplasmas, new and promising applications were developed enthusiastically, e.g., biomaterial processing with microplasma jet at atmospheric pressure, new material syntheses by microplasmas at cryogenic gas temperature, encapsulization of carbon nano-tubes with DNAs in electrolyte solution, micro-thruster for miniature satellite, and so on.
The stealing committee has been conducting the project to keep the functional cooperation between the 28 research groups in total. It also organized microplasma sessions in many international conferences and encouraged the participation of as many members of our project as possible. As a result the International Workshop on Microplasmas, which started in Japan just in the year of the inauguration of our project, has been continued successively in U. S. A., Germany and Taiwan. For the publication of our activities and research results, we have been operating our own URL and publishing Microplasma News Letters besides the annual symposium or exhibition open for public. Less

  • Research Products

    (70 results)

All 2008 2007 2006 2005 2004 2003 Other

All Journal Article (27 results) (of which Peer Reviewed: 16 results) Presentation (31 results) Book (2 results) Remarks (1 results) Patent(Industrial Property Rights) (9 results)

  • [Journal Article] Spatiotemporal behavior of excited Xe^*(1s_4, 1s_5)and Kr^*(1s_5)atoms measured by laser-absorption spectroscopy in unit cell of a plasma display panel with Xe-Kr-Ne ternary gas mixture2007

    • Author(s)
      J. -S. Oh
    • Journal Title

      J. Appl. Phys. 102

      Pages: 073301-1-9

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Generation of microplasma using pulsed discharge of ethanol droplet in air2007

    • Author(s)
      N. Shirai
    • Journal Title

      Jpn. J. Appl. Phys. 46

      Pages: 370-374

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Carbon materials syntheses using dielectric barrier discharge microplasma in supercritical carbon dioxide environments2007

    • Author(s)
      T. Tomai
    • Journal Title

      J. Supercritical Fluids 41

      Pages: 404-411

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Spatiotemporal behavior of excited Xe^*(ls_4,ls_5) and Kr^*(lS_5) atoms measured by laser-absorption spectroscopy in unit cell of a plasma display panel with Xe-Kr-Ne ternary gas mixture2007

    • Author(s)
      J. -S. Oh
    • Journal Title

      Appl. Phys. 102

      Pages: 073301-1-9

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] マイクロプラズマの基礎と展望2006

    • Author(s)
      橘邦英
    • Journal Title

      応用物理 75

      Pages: 399-411

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Current status of microplasma research2006

    • Author(s)
      K. Tachibana
    • Journal Title

      IEEJ Trans. 1

      Pages: 145-155

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Water treatment by fast oxygen radical flow with dc-driven microhollow cathode discharge2006

    • Author(s)
      A. Yamatake
    • Journal Title

      IEEE Trans. Plasma Sci. 34

      Pages: 1375-1381

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Microplasma synthesis of carbon nanostructured materials2006

    • Author(s)
      K. Terashima
    • Journal Title

      Adv. Sci. Technol. 48

      Pages: 9-16

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Basic aspects of microplasmas and their future prospects2006

    • Author(s)
      K. Tachibana
    • Journal Title

      Oyobutsuri 75

      Pages: 399-411

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Water treatment by fast oxygen radical flow with dc-driven microhol low cathode discharge2006

    • Author(s)
      A. Yamatake
    • Journal Title

      IEEE Trans. Plasma Sci. 34

      Pages: 1375-1381

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Principles and applications of plasma diagnostics2006

    • Author(s)
      K. Tachibana
    • Journal Title

      Corona Pub., Tokyo

      Pages: 390

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Micro and nano-plasma technologies and their industrial applications2006

    • Author(s)
      K. Tachibana
    • Journal Title

      CMC Pub., Tokyo

      Pages: 329

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Diagnostics of microdischarge-integrated plasma sources for display and materials processing2005

    • Author(s)
      K. Tachibana
    • Journal Title

      Plasma Phys. Control. Fusion 47

      Pages: A167-A177

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Atmospheric dc discbarges with miniature gas flow as microplasma generation method2005

    • Author(s)
      T. Yokoyama
    • Journal Title

      J. Phys. D : Appl. Phys. 38

      Pages: 1684-1689

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] 2.45GHZ microwave-excited atmospheric pressure air microplasmas based on microstrip technology2005

    • Author(s)
      J. Kim
    • Journal Title

      Appl. Phys. Lett. 86

      Pages: 191504-1-3

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Atmospheric dc discharges with miniature gas flow as microplasma generation method2005

    • Author(s)
      T. Yokoyama
    • Journal Title

      J. Phys. D : Appl. Phys. 38

      Pages: 1684-1689

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] 2.45GHz microwave-excited atmospheric pressure air microplasmas based on microstrip technology2005

    • Author(s)
      J. Kim
    • Journal Title

      Appl. Phys. Lett. 86

      Pages: 191504-1-3

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] ミクロ反応場の生成と応用-マイクロプラズマ研究の現状と将来展望-2004

    • Author(s)
      橘邦英
    • Journal Title

      プラズマ・核融合学会誌 80

      Pages: 825-826

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] DC/Microwave driven micro-plasmas for ozone generation2004

    • Author(s)
      K. Yasuoka
    • Journal Title

      J. Advanced Oxidation Technol. 17

      Pages: 138-141

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Spectroscopic study on a thermoelectron-enhanced microplasma jet2004

    • Author(s)
      T. Ito
    • Journal Title

      J. Phys. D : Appl. Phys. 37

      Pages: 445-448

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] マイクロプラズマの計測・解析2004

    • Author(s)
      橘邦英
    • Journal Title

      プラズマ・核融合学会誌 80

      Pages: 835-844

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Generation of micro-scale reactive plasmas and development of their new applications - Present and future of research and development on microplasmas-2004

    • Author(s)
      K. Tachibana
    • Journal Title

      J. Plasma Fusion Res 80

      Pages: 825-826

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Diagnostics and simulation of microplasmas2004

    • Author(s)
      K. Tachibana
    • Journal Title

      J. Plasma Fusion Res. 80

      Pages: 835-844

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Decrease of breakdown voltages for micrometer-scale-gap electrodes for carbon dioxide near the critical point : temperature and pressure dependences2003

    • Author(s)
      T. Ito
    • Journal Title

      J. Appl. Phys. 94

      Pages: 5411-5413

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Observation of self-organized filaments in a dielectric barrier discharge of Ar gas2003

    • Author(s)
      T. Shirafuji
    • Journal Title

      Appl. Phys. Lett. 83

      Pages: 2309-2311

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Decreace of breakdown voltages for micrometer-scale-gap electrodes for carbon dioxide near the critical point : temperature and pressure dependences2003

    • Author(s)
      T. Ito
    • Journal Title

      Appl. Phys 94

      Pages: 5411-5413

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Observation of self-organized filaments in a dielectric barrier discharge of Ar gas2003

    • Author(s)
      T. Shirafuji
    • Journal Title

      Appl. Phys. Lett 83

      Pages: 2309-2311

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Electron density measurement of plasma at atmospheric pressure using CO_2 laser heterodyne interferometry2008

    • Author(s)
      N. Takano
    • Organizer
      25th Symp. Plasma Processing
    • Place of Presentation
      山口
    • Year and Date
      20080123-20080125
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Electron density measurement of plasma at atmospheric pressure using CO_2 laser heterodyne interferometry2008

    • Author(s)
      N. Takano
    • Organizer
      25th Symp. Plasma Processing
    • Place of Presentation
      Yamaguchi, Japan
    • Year and Date
      20080123-20080125
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Effect of cathode structure on the stability of high power atmospheric transient glow microplasma2007

    • Author(s)
      S. Ibuka
    • Organizer
      4th Int. Workshop on Microplasmas
    • Place of Presentation
      Tainan, Taiwan
    • Year and Date
      20071028-20071031
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Microdischarges on metal surface in a liquid medium2007

    • Author(s)
      M. Kimura
    • Organizer
      4th Int. Workshop on Microplasmas
    • Place of Presentation
      Tainan, Taiwan
    • Year and Date
      20071028-20071031
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Temperature dependent characteristics of cryo microplasma2007

    • Author(s)
      Y. Noma
    • Organizer
      18th Int. Symp. Plasma Chem.
    • Place of Presentation
      Kyoto
    • Year and Date
      20070826-20080831
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Temperature dependent characteristics of cryo microplasma2007

    • Author(s)
      Y. Noma
    • Organizer
      18th Int. Symp. Plasma Chem.
    • Place of Presentation
      京都
    • Year and Date
      20070826-20070831
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Electron density and collisional frequency in plasma with terahertz time-domain spectroscopy2007

    • Author(s)
      H. Nakanishi
    • Organizer
      18th Int. Symp. Plasma Chem.
    • Place of Presentation
      京都
    • Year and Date
      20070826-20070831
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Electron density and collisional frequency in plasma with terahertz time-domain spectroscopy2007

    • Author(s)
      H. Nakanishi
    • Organizer
      18th Int. Symp. Plasma Chem.
    • Place of Presentation
      Kyoto
    • Year and Date
      20070826-20070831
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Characterization of atmospheric pressure dielectric barrier discharges for environmental applications2006

    • Author(s)
      K. Tachibana
    • Organizer
      59th Gaseous Electronics Conf.
    • Place of Presentation
      Columbus, USA
    • Year and Date
      20061010-20061013
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Control of microplasma with miniature gas flow in air2006

    • Author(s)
      S. Ishii
    • Organizer
      3rd Int. Workshop on Microplasmas
    • Place of Presentation
      Greifswald, Germany
    • Year and Date
      20060509-20060511
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Micrometer-scale dc discharge plasma in high-pressure H_2O and Xe environments including supercritical fluid2006

    • Author(s)
      M. Sawada
    • Organizer
      3rd Int. Workshop on Microplasmas
    • Place of Presentation
      Greifswald, Germany
    • Year and Date
      20060509-20060511
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Spatio-temporal measurement of surface charge on dielectric electrodes in a coplanar-electrode cell2006

    • Author(s)
      K. Tachibana
    • Organizer
      3rd Int. Workshop on、Microplasmas
    • Place of Presentation
      Greifswald, Germany
    • Year and Date
      20060509-20060511
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Spatio-temporal measurement of surface charge on dielectric electrodes in a coplanar-electrode cell2006

    • Author(s)
      K. Tachibana
    • Organizer
      3rd Int. Workshop on Microplasmas
    • Place of Presentation
      Greifswald, Germany
    • Year and Date
      20060509-20060511
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Spatiotemporal surface charge measurement in two types of dielectric barrier discharges using Pockels effect2006

    • Author(s)
      R. Abo
    • Organizer
      6th Int. Conf. Reactive Plasmas &23rd Symp. Plasma Processing
    • Place of Presentation
      松島
    • Year and Date
      20060124-20060127
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Spatiotemporal surface charge measurement in two types of dielectric barrier discharges using Pockels effect2006

    • Author(s)
      R. Abo
    • Organizer
      6th Int. Conf. Reactive Plasmas & 23rd Symp. Plasma Processing
    • Place of Presentation
      Matsushima, Japan
    • Year and Date
      20060124-20060127
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Water treatment by radical injection with atmospheric micro plasma generated in fast oxygen flow2005

    • Author(s)
      A. Yamatake
    • Organizer
      17th Int. Symp. Plasma Chem.
    • Place of Presentation
      Toronto, Canada
    • Year and Date
      20050807-20050812
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Water treatment by radical injection with atmospheric micro plasma generated in fast oxvgen flow2005

    • Author(s)
      A. Yamatake
    • Organizer
      17th Int. Symp. Plasma Chem.
    • Place of Presentation
      Toronto, Canada
    • Year and Date
      20050807-20050812
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Diagnostics and modeling of microplasmas2005

    • Author(s)
      K. Tachibana
    • Organizer
      Plasma Sci. Symp. 2005 &22nd Symp. Plasma Processing
    • Place of Presentation
      名古屋
    • Year and Date
      20050126-20050128
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Diagnostics and modeling of microplasmas2005

    • Author(s)
      K. Tachibana
    • Organizer
      Plasma Sci. Symp. 2005 & 22nd Symp. Plasma Processing
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      20050126-20050128
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] DC discharge characteristics in a microplasma with miniature gas flow2004

    • Author(s)
      T. Yokoyama
    • Organizer
      5th Int. Symp. Pulsed Power and Plasma Applications
    • Place of Presentation
      Chang-Won, Korea
    • Year and Date
      20041018-20041019
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Design and control of microplasma devices based on spectroscopic diagnostics2004

    • Author(s)
      K. Tachibana
    • Organizer
      2nd Int. Workshop on Microplasmas
    • Place of Presentation
      Hoboken, USA
    • Year and Date
      20041006-20041008
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Measurement of charge distribution on electrodes in dielectric barrier discharge with self-organized filaments2004

    • Author(s)
      S. N. Abolmasov
    • Organizer
      Int. Workshop on Plasma Nano-Technol. and Its Future Vision
    • Place of Presentation
      高山
    • Year and Date
      20040205-20040206
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Measurement of charge distribution on electrodes in dielectric barrier discharge with self-organized filaments2004

    • Author(s)
      S. N. Abolmasov
    • Organizer
      Int. Workshop on Plasma Nano-Technol. and Its Future Vision
    • Place of Presentation
      Takayama, Japan
    • Year and Date
      20040205-20040206
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] A microplasma created from a powder particle by pulsed discharges2003

    • Author(s)
      S. Ishii
    • Organizer
      3rd. Asia-Pacific Int. Symp. Basic and Application of Plasma Technology
    • Place of Presentation
      Taoyuan, Taiwan
    • Year and Date
      20031215-20031217
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] A microplasma created from a powder particle by pulsed discharges2003

    • Author(s)
      S. Ishii
    • Organizer
      3rd. Asia-Pacific Int. Symp. Basic and Application of Plasma Technol.
    • Place of Presentation
      Taoyuan, Taiwan
    • Year and Date
      20031215-20031217
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Diagnostics of three dimensional behaviors of sustain discharge in an AC-PDP with auxiliary pulses2003

    • Author(s)
      Y. Shintani
    • Organizer
      10th Int. Display Workshops
    • Place of Presentation
      福岡
    • Year and Date
      20031203-20031205
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Diagnostics of three dimensional behaviors of sustain discharge in an AC-PDP with auxiliary pulses2003

    • Author(s)
      Y. Shintani
    • Organizer
      10th Int. Display Workshops
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      20031203-20031205
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Discharge under a high-pressure carbon dioxide environment up toa supercritical condition2003

    • Author(s)
      T. Ito
    • Organizer
      16th Int. Symp. Plasma Chem.
    • Place of Presentation
      Taormina, Italy
    • Year and Date
      20030623-20030627
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Control of glow/streamer transition in pulse-driven dielectric barrier discharge2003

    • Author(s)
      T. Somekawa
    • Organizer
      16th Int. Symp. Plasma Chem.
    • Place of Presentation
      Taormina, Italy
    • Year and Date
      20030623-20030627
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Discharge under a high-pressure carbon dioxide environment up to a supercritical condition2003

    • Author(s)
      T. Ito
    • Organizer
      16th Int. Symp. Plasma Chem.
    • Place of Presentation
      Taormina, Italy
    • Year and Date
      20030623-20030627
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Control of Glow/Streamer Transition in Pulse-Driven Dielectric Barrier Discharge2003

    • Author(s)
      T. Somekawa
    • Organizer
      16th Int. Symp. Plasma Chem.
    • Place of Presentation
      Taormina, Italy
    • Year and Date
      20030623-20030627
    • Description
      「研究成果報告書概要(欧文)」より
  • [Book] プラズマ診断の基礎と応用2006

    • Author(s)
      橘邦英(分担)
    • Total Pages
      390
    • Publisher
      コロナ社
    • Description
      「研究成果報告書概要(和文)」より
  • [Book] マイクロ・ナノプラズマ技術とその産業応用2006

    • Author(s)
      橘邦英(分担), 石井彰三(分担), 寺嶋和夫(分担)
    • Total Pages
      329
    • Publisher
      シーエムシー出版
    • Description
      「研究成果報告書概要(和文)」より
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://plasma.kuee.kyoto-u.ac.jp/tokutei429/index-j.html

  • [Patent(Industrial Property Rights)] マイクロプラズフCVD装置2007

    • Inventor(s)
      佐々木毅, 清水禎樹, 寺嶋和夫, 越崎直人
    • Industrial Property Rights Holder
      独立行政法人産業技術総合研究所
    • Industrial Property Number
      特許, 特許4041878
    • Acquisition Date
      2007-11-22
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] カーボンナノチューブを備えた金属ワイヤー又はキャピラリー及びカーボンナノチューブの形成方法2006

    • Inventor(s)
      佐々木毅, 清水禎樹, 寺嶋和夫, 越崎直人
    • Industrial Property Rights Holder
      独立行政法人産業技術総合研究所
    • Industrial Property Number
      特許, 特許3837556
    • Acquisition Date
      2006-08-11
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] プラズマ発生装置及び走査電子顕微鏡2005

    • Inventor(s)
      今野茂生, 西山寛之, 長船忠義, 寺嶋和夫
    • Industrial Property Rights Holder
      国立大学法人東京大学, 日本電子株式会社
    • Industrial Property Number
      特許, 特願2005-270362特開2007-080784
    • Filing Date
      2005-09-16
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] 電磁波伝送回路及び電磁波伝送制御装置2005

    • Inventor(s)
      橘邦英, 酒井道
    • Industrial Property Rights Holder
      国立大学法人京都大学
    • Industrial Property Number
      特許, 特願2005・282865特開2007・096712
    • Filing Date
      2005-09-28
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] プラズマ発生装置2004

    • Inventor(s)
      西山寛, 伊藤剛仁, 寺嶋和夫, 長船忠義
    • Industrial Property Rights Holder
      寺嶋和夫, 日本電子株式会社
    • Industrial Property Number
      特許, 特願2004-079483特開2003-173898
    • Filing Date
      2004-03-19
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] プラズマ発生装置及び低真空走査電子顕微鏡2004

    • Inventor(s)
      今野茂生, 西山寛之, 長船忠義, 寺嶋和夫
    • Industrial Property Rights Holder
      株式会社東京大学TLO, 日本電子株式会社
    • Patent Publication Number
      特許, 特願2004・096352特開2005-270362
    • Filing Date
      2004-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] マイクロ波励起プラズマ装置及びシステム2004

    • Inventor(s)
      金載浩, 寺嶋和夫
    • Industrial Property Rights Holder
      国立大学法人東京大学
    • Industrial Property Number
      特許, 特願2004-290339特開2006・107829
    • Filing Date
      2004-10-01
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] プラズマ処理方法およびプラズマ処理装置2003

    • Inventor(s)
      橘邦英, 井上良二
    • Industrial Property Rights Holder
      橘邦英, 日立金属株式会社
    • Industrial Property Number
      特許, 特願2003-016106特開2004-227990
    • Filing Date
      2003-01-24
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] プラズマ処理法およびプラズマ処理装置2003

    • Inventor(s)
      橘邦英, 井上良二
    • Industrial Property Rights Holder
      橘邦英, 日立金属株式会社
    • Industrial Property Number
      特許, 特願2003-165726特開2005・005065
    • Filing Date
      2003-06-10
    • Description
      「研究成果報告書概要(和文)」より

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Published: 2010-06-09  

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