2003 Fiscal Year Annual Research Report

a/c配向制御YBCO薄膜とMn系薄膜の作成と積層および可変マイクロ波フィルター

Research Project

Project/Area Number	15560006
Research Institution	Mie University
Principal Investigator	遠藤民生三重大学, 工学部, 助教授 (80115691)
Keywords	マイクロ波フィルター / YBCO薄膜 / a-c配向 / 基板温度 / 酸素分圧 / 酸素分子・プラズマ / 薄膜結晶性 / YBCO / LBMO積層膜
Research Abstract	移動体電話基地局の高温超伝導マイクロ波フィルターと、高温超伝導層と強磁性層の積層化による可変フィルターの開発を目指している。現時点では膜質の面で、a配向よりもc配向YBCO膜の方が有望視されているが、面内完全配向a膜でもマイクロ波はCuO2面に沿って伝播できるので、散乱・損失は小さい。磁場下で使用する可変フィルターを考えると、aとc膜のどちらが低損失で有利であるかわからないので、c膜と共にa膜のフィルター特性を調べて比較する。現有のイオンビーム・スパッタ(IBS)装置に、改良した酸素プラズマ管を装着した。IBS法でMgOとLAO基板上にYBa2Cu30x(YBCO)薄膜を作成した。この時酸素分子(ML)または酸素プラズマを供給(PL)し、効果を比較した。酸素分圧(Po)を固定し、基板温度(Ts)を400-700℃の範囲の種々の値で成膜した。Tsを固定し、Poを0.1-4mTorrの範囲の種々の値で成膜した。作成したYABCO薄膜のX線回折(XRD)によってa軸とc軸配向割合を求め、その基板種や,酸化種(ML,PL),TsおよびPo依存性を求めた。MgO基板では、低Ts側でa配向膜、高Ts側でc配向膜、中間温度ではa-c混相膜が成長した。低Po側でc配向膜、高Po側でa配向膜の成長が促進されることが明らかとなった。低Ts側ではPL供給でa配向成長が促進され、結晶性と平滑性が促進されたLAO基板ではMgOよりa配向成長し易すく、高温域までa配向相が成長する。a単相とc単相が得られる作成条件が明らかとなった。単相薄膜のXRD(θ-2θ,ロッキング,φ-scan)測定によって薄膜の結晶性,モザイク性・面内配向性を評価した。a/c単相膜のAFM測定によって薄膜の表面モフォロジーを求めた。表面粗さを最小限に抑えるために基板温度を500-600℃に固定し、単相膜の膜質を改善するために供給プラズマの条件(放電条件)を変えて成膜し、最適条件を求めた。LBMO(La(Ba)MnO3)薄膜を作成し、その上にYBCO上層膜の堆積を試みた結果、a配向相もc配向相も成長できることがわかった。

Research Products

(20 results)

All Other

All Publications (20 results)

[Publications] Tamio Endo: "Crystal Growth of Excellent Perovskite Oxide Thin Films of LBMO by IBS"Proc.Ninth National Seminar on Crystal Growth. 2-3 (2003)
[Publications] Tamio Endo: "Surface Migration is a Crucial Factor for Growth of a-c Oriented YBCO Thin films"New Materials (Proc.Asia Academic Seminar. 205-223 (2003)
[Publications] Tamio Endo: "Oxygen Partial Pressure Dependences of a-c Phase Ratio, Cristallinity, Surface Roughness in YBCO thin films by IBS"Superconductors Science and Technology. 16. 110-119 (2003)
[Publications] Gutran Ahmad: "Microwave Absorption Spectrum and Reentrant Phase in Bi2212 Single Crystal : Microwave Power Dependence"Physica C. 388-389. 687-688 (2003)
[Publications] Shin-ichi Iwasaki: "Temperature Dependence of FMR of La-Ba-Mn-O thin Films"Physica B. 329-333. 794-796 (2003)
[Publications] Kouji Yoshii: "Fabrication of LBMO Films and Magnetic Properties at Low Temperatures"Physica B. 329-333. 791-793 (2003)
[Publications] R.Dhanasekaran: "Synthesis, Growth and Characterization of Lead Molybdate and Lead Tungustate Single Crystals"Proc.10th Int.Conf.on Composites/Nano Engineering. 145-146 (2003)
[Publications] Tamio Endo: "LBMO thin film Fabrication and Nano Double Structures, and Microwave Magnetic Properties"Proc.10th Int.Conf.on Composites/Nano Engineering. 171-172 (2003)
[Publications] Kouji Yoshii: "Variations of Lattice Parameters of YBCO and YBCO/LBMO Nano-Composite Thin Films Deposited by IBS Method"Proc.10th Int.Conf.on Composites/Nano Engineering. 795-796 (2003)
[Publications] Shin-ichi Iwasaki: "Growth of LBMO Thin Films by Ion Beam Sputtering - Crystallinities and Ferromagnetic Resonance"Trans.Mat.Res.Soc.Jpn. 28-4. 1117-1120 (2003)
[Publications] S.Uthayakumar: "Preparation of Perovskite Bi-Sr-Ca-Cu-O Thin Films by Ion Beam Sputtering : Effects of Oxygen MOlecules and Plasma"Trans.Mat.Res.Soc.Jpn. 28-4. 112-1124 (2003)
[Publications] Kouji Yoshii: "Depositions of YBCO thin Films by Ion Beam Sputtering : a-c Orientations, Crystallinities and In-plane Orientations"Trans.Mat.Res.Soc.Jpn. 28-4. 1125-1128 (2003)
[Publications] S.Uthayakumar: "Growth of Bi_2Sr_2Ca(Cu_<1-x>Mn_x)_2O_8 Bulk Textured Crystals by IHFZ Technique"Physica C. 392-396. 403-467 (2003)
[Publications] Axel Hoffmann: "Persistent Photoconductivity in High-Tc Superconductors"IUMRS-ICAM2003 Int.Conf.Abstract. A/B(招待). 215 (2003)
[Publications] Tamio Endo: "Low Temperature Growths of Perovskite Oxide Thin Films and Nano-Multilayers by IBS"IUMRS-ICAM2003 Int.Conf.Abstract. A/B(招待). 225 (2003)
[Publications] A.K.Sarkar: "Effects of Collisions between Sputtered Particles and Supplied Oxygen above Substrate on Bi2201 Film Growth"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 219 (2003)
[Publications] T.Sakurada: "Superconductive Microwave Absorption on Bi2212 Single Crystals under Crossing Field"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 220 (2003)
[Publications] K.Yoshii: "Nano-size Control of a-c Orientations of YBCO Film Growth and Heterostructure of YBCO/LBMO"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 221 (2003)
[Publications] Saji Augustine: "Fabrication of Single Layers of LSMO and Nano-Doube-Layers of LSMO/YBCO by IBS"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 226 (2003)
[Publications] M.Ogata: "Fabrication of LBMO Thin Films and Nano-Stacking of LBMO/YBCO"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 221 (2003)

2003 Fiscal Year Annual Research Report

a/c配向制御YBCO薄膜とMn系薄膜の作成と積層および可変マイクロ波フィルター

Principal Investigator

遠藤 民生 三重大学, 工学部, 助教授 (80115691)

Research Products

[Publications] Tamio Endo: "Crystal Growth of Excellent Perovskite Oxide Thin Films of LBMO by IBS"Proc.Ninth National Seminar on Crystal Growth. 2-3 (2003)

[Publications] Tamio Endo: "Surface Migration is a Crucial Factor for Growth of a-c Oriented YBCO Thin films"New Materials (Proc.Asia Academic Seminar. 205-223 (2003)

[Publications] Tamio Endo: "Oxygen Partial Pressure Dependences of a-c Phase Ratio, Cristallinity, Surface Roughness in YBCO thin films by IBS"Superconductors Science and Technology. 16. 110-119 (2003)

[Publications] Gutran Ahmad: "Microwave Absorption Spectrum and Reentrant Phase in Bi2212 Single Crystal : Microwave Power Dependence"Physica C. 388-389. 687-688 (2003)

[Publications] Shin-ichi Iwasaki: "Temperature Dependence of FMR of La-Ba-Mn-O thin Films"Physica B. 329-333. 794-796 (2003)

[Publications] Kouji Yoshii: "Fabrication of LBMO Films and Magnetic Properties at Low Temperatures"Physica B. 329-333. 791-793 (2003)

[Publications] R.Dhanasekaran: "Synthesis, Growth and Characterization of Lead Molybdate and Lead Tungustate Single Crystals"Proc.10th Int.Conf.on Composites/Nano Engineering. 145-146 (2003)

[Publications] Tamio Endo: "LBMO thin film Fabrication and Nano Double Structures, and Microwave Magnetic Properties"Proc.10th Int.Conf.on Composites/Nano Engineering. 171-172 (2003)

[Publications] Kouji Yoshii: "Variations of Lattice Parameters of YBCO and YBCO/LBMO Nano-Composite Thin Films Deposited by IBS Method"Proc.10th Int.Conf.on Composites/Nano Engineering. 795-796 (2003)

[Publications] Shin-ichi Iwasaki: "Growth of LBMO Thin Films by Ion Beam Sputtering - Crystallinities and Ferromagnetic Resonance"Trans.Mat.Res.Soc.Jpn. 28-4. 1117-1120 (2003)

[Publications] S.Uthayakumar: "Preparation of Perovskite Bi-Sr-Ca-Cu-O Thin Films by Ion Beam Sputtering : Effects of Oxygen MOlecules and Plasma"Trans.Mat.Res.Soc.Jpn. 28-4. 112-1124 (2003)

[Publications] Kouji Yoshii: "Depositions of YBCO thin Films by Ion Beam Sputtering : a-c Orientations, Crystallinities and In-plane Orientations"Trans.Mat.Res.Soc.Jpn. 28-4. 1125-1128 (2003)

[Publications] S.Uthayakumar: "Growth of Bi_2Sr_2Ca(Cu_<1-x>Mn_x)_2O_8 Bulk Textured Crystals by IHFZ Technique"Physica C. 392-396. 403-467 (2003)

[Publications] Axel Hoffmann: "Persistent Photoconductivity in High-Tc Superconductors"IUMRS-ICAM2003 Int.Conf.Abstract. A/B(招待). 215 (2003)

[Publications] Tamio Endo: "Low Temperature Growths of Perovskite Oxide Thin Films and Nano-Multilayers by IBS"IUMRS-ICAM2003 Int.Conf.Abstract. A/B(招待). 225 (2003)

[Publications] A.K.Sarkar: "Effects of Collisions between Sputtered Particles and Supplied Oxygen above Substrate on Bi2201 Film Growth"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 219 (2003)

[Publications] T.Sakurada: "Superconductive Microwave Absorption on Bi2212 Single Crystals under Crossing Field"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 220 (2003)

[Publications] K.Yoshii: "Nano-size Control of a-c Orientations of YBCO Film Growth and Heterostructure of YBCO/LBMO"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 221 (2003)

[Publications] Saji Augustine: "Fabrication of Single Layers of LSMO and Nano-Doube-Layers of LSMO/YBCO by IBS"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 226 (2003)

[Publications] M.Ogata: "Fabrication of LBMO Thin Films and Nano-Stacking of LBMO/YBCO"IUMRS-ICAM2003 Int.Conf.Abstract. A/B. 221 (2003)

遠藤民生三重大学, 工学部, 助教授 (80115691)