Development of advanced soft x-ray focusing system with a symmetric rotational mirror

2019 Fiscal Year Final Research Report

• Project/Area Number: 15H02041
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Quantum beam science
• Research Institution: The University of Tokyo
• Principal Investigator: Mimura Hidekazu 東京大学, 大学院工学系研究科(工学部), 准教授 (30362651)
• Project Period (FY): 2015-04-01 – 2019-03-31
• Keywords: Ｘ線集光 / 超精密加工 / 軟Ｘ線

Outline of Final Research Achievements

Various analysis methods using x-rays such as x-ray photoemission spectroscopy and x-ray absorption spectroscopy are indispensable for developing advanced materials. One of key technologies for improving the performance of these methods is x-ray focusing.
The purpose of this study is the development of mirror-based focusing soft x-rays whose wavelength ranges are from 1 nm to 10 nm.By employing a symmetric rotational mirror, it is possible to focus soft x-rays into a nanometer size. In this study, we improve the figure accuracy of the mirror and proposed two-stage soft x-ray focusing system in which a ring-focusing mirror and a symmetric rotational mirror are installed. We performed basic research on soft x-ray focusing with a mirror using high order harmonic generation source and constructed the two-stage soft x-ray focusing system at a beamline of SPring-8. We confirmed the size of soft x-ray focused beam is less than 200 nm at a wavelength of 3 nm .

Free Research Field

超精密加工、Ｘ線光学

Academic Significance and Societal Importance of the Research Achievements

ミラーによる軟X線集光システムは理論的な性能は高いが、その作製が困難であったため利用されていなかった。本研究により、ミラーの製造技術が大幅に進歩するとともに、実際に軟Ｘ線集光が実証され、今後、ミラーによる集光技術が普及すると考えている。その結果、多くのＸ線分析装置の性能が向上し、電池材料や半導体材料の新規開発に貢献する。