2017 Fiscal Year Final Research Report
A MEMS Tunable Resonator Array for THz Spatial Modulators
| Project/Area Number |
15H03984
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | The University of Tokyo |
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Principal Investigator |
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| Research Collaborator |
HAN Zhengli 国立研究開発法人理化学研究所, 光量子工学研究領域, 基礎科学特別研究員 (20752702)
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Keywords | MEMS / THz / マイクロマシン / テラヘルツ光 / メタマテリアル |
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| Outline of Final Research Achievements |
This work presents a novel tunable cross-slot resonator as a digital pixel for spatially modulated THz filter based on the MEMS electrostatic actuation mechanism. The tunable filter performance is theoretically studied by using the electromagnetic wave simulation and experimentally confirmed by performing THz measurement on proof-of-concept device developed by the surface micromachining process.
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| Free Research Field |
MEMS
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