2017 Fiscal Year Final Research Report
Development of an ultrasonic sensor for detecting formation of a continuous film during deposition
| Project/Area Number |
15H05503
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Osaka University |
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Principal Investigator |
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Keywords | 超音波センサ / 金属膜 / 連続膜 / 共振 / 圧電体 |
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| Outline of Final Research Achievements |
During deposition of metallic films, a morphological change from discontinuous islands to a continuous film occurs. The morphological change happens when film thickness is a few nanometers. In this study, a novel sensor that detects the morphological change without contacting substrate nor film was developed. Experiments with different substrates and deposition conditions were carried out, and applicability of the developed sensor was evaluated. Then, an equivalent circuit that reproduces the measurement setup was developed, and the detailed mechanism of the developed sensor was clarified using the circuit.
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| Free Research Field |
ナノメカニクス
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