Control and device application of multi-axis MEMS scanner by single driving apparatus

2017 Fiscal Year Final Research Report

• Project/Area Number: 15H05514
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: Waseda University
• Principal Investigator: Iwase Eiji 早稲田大学, 理工学術院, 准教授 (70436559)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: マイクロマシン / マイクロ・ナノデバイス / MEMSスキャナ

Outline of Final Research Achievements

Our objective in this research is to realize a three-dimensional (3-D) operation of a Micro-Electro-Mechanical Systems (MEMS) scanner with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3-D MEMS scanner with a single pair of beams having three resonant modes. We demonstrated the 3-D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the displacements are proportional to the voltage amplitudes of each resonant frequency in the superposed signal.

Free Research Field

マイクロマシン，MEMS