Development of an environmental reflection high-energy electron diffraction apparatus for in-situ surface structural analysis under gas pressure

2017 Fiscal Year Final Research Report

• Project/Area Number: 15K04675
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Nagoya University
• Principal Investigator: Nakahara Hitoshi 名古屋大学, 工学研究科, 助教 (20293649)
• Co-Investigator(Kenkyū-buntansha): 堀尾 吉已 大同大学, 工学部, 教授 (00238792) ; 齋藤 弥八 名古屋大学, 工学研究科, 教授 (90144203)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: 反射高速電子回折装置 / 表面構造解析 / 気相成長 / 触媒反応

Outline of Final Research Achievements

An environmental reflection high-energy electron diffraction (ERHEED) apparatus with 2-stage lens and differential pumping system on both of incident and exit sides were developed, which is aimed to analyze surface crystalline structures under gas pressure. The exit side lens system could not operate properly, however, incident side lens system worked as designed and it was demonstrated that the developed ERHEED can obtain beam rocking patterns in gas atmosphere that is more than one order of higher pressure than conventional differential pumped RHEED system. With this new equipment, in-situ structural analysis of the reacting surfaces such as chemical vapor deposition and catalytic reaction becomes possible. Thus it is expected to be contribute to the development of novel materials.

Free Research Field

表面物理